1. Fabrication of Silicon Carriers With TSV Electrical Interconnections and Embedded Thermal Solutions for High Power 3-D Packages
- Author
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N. Khan, G. Archit, Seung Wook Yoon, Aibin Yu, Vaidyanathan Kripesh, J.H. Lau, Kok Chuan Toh, and Damaruganath Pinjala
- Subjects
Interconnection ,Materials science ,Wafer-scale integration ,Fabrication ,Computer cooling ,Silicon ,Wafer bonding ,Hybrid silicon laser ,business.industry ,Heat transfer enhancement ,Electrical engineering ,chemistry.chemical_element ,Electronic, Optical and Magnetic Materials ,chemistry ,Electronic engineering ,Optoelectronics ,Wafer ,Electrical and Electronic Engineering ,business ,Wafer-level packaging - Abstract
This paper presents micro fabrication process and wafer-level integration of a silicon carrier, which consists of two Si chips that are bonded together with evaporated AuSn-solder. There are micro fins and channels fabricated in the Si chip and form the embedded cooling layer after bonding. The embedded cooling layer is connected with an inlet and an outlet to form a fluidic path for heat transfer enhancement. Besides, in the silicon carrier, there are through silicon vias (TSVs) with metal film on sidewall for electrical interconnection. Two or more carriers can then be stacked together with a silicon interposer in between to make up of a stacked cooling module for high power heat dissipation. The advantage of this 3-D stacking method is that it provides a method of simultaneously realizing electrical interconnection and fluidic path and it can extract heat from the constraints of 3-D silicon module chips to surface without external liquid circulation.
- Published
- 2009