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Development of highly effective debris free EUV (extreme ultraviolet) radiation source is an actual problem today. Experimental results on EUV output from the source based on laser-produced plasma in supersonic Xe jet have been obtained. The conversion efficiency is 0.08% at a wavelength of 13.5 nm (Δλ = 0.35 nm, 2π sterrad). The methods of optimization of gas-jet converter have been determined. Measurements of EUV radiation energy dependence on the laser energy and the target material (solid-state Cu, Mo, W, Ta and supersonic Xe jet) have been made. The conversion efficiency of laser-produced plasma (CELPP) has been determined and the experimental values have been obtained for different materials of the target.

A method has been developed and applied to measure the beam waist and spot size of a focused soft x-ray beam at the free-electron laser FLASH of the Deutsches Elektronen-Synchrotron in Hamburg. The method is based on a saturation effect upon atomic photoionization and represents an indestructible tool for the characterization of powerful beams of ionizing electromagnetic radiation. At the microfocus beamline BL2 at FLASH, a full width at half maximum focus diameter of (15±2)μm was determined.