5 results on '"Hwang, Guen-Ho"'
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2. Improved particle control by adopting advanced ceramic materials in dry etcher for defect reduction
3. Effects of photo resist erosion in development on critical dimension performance for 45nm node and below
4. Patterning capability and limitations by pattern collapse in 45nm and below node photo mask production
5. Effects of photo resist erosion in development on critical dimension performance for 45nm node and below.
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