11 results on '"Hur, Jiuk"'
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2. Improving mask yield by implementing an advanced mask blank inspection system
3. MTO-like reference mask modeling for advanced inverse lithography technology patterns
4. A novel design-based global CDU metrology for 1X nm node logic devices
5. Improving inspectability of sub-2x-nm node masks with complex SRAF
6. MTO-like reference mask modeling for advanced inverse lithography technology patterns
7. Implementation strategy of wafer-plane and aerial-plane inspection for advanced mask manufacture
8. Implementation strategy of wafer-plane and aerial-plane inspection for advanced mask manufacture.
9. Improving inspectability of sub-2x-nm node masks with complex SRAF
10. A novel design-based global CDU metrology for 1X nm node logic devices
11. Improving mask yield by implementing an advanced mask blank inspection system
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