1. Differential micro-Pirani gauge for monitoring MEMS wafer-level package
- Author
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Bruce C. S. Chou, Keaton C.-H. Lin, Fan Chen-Chih, Yang-Che Chen, Wei-Chu Lin, Hung-Sen Wang, and Mingo Liu
- Subjects
Microelectromechanical systems ,Materials science ,business.industry ,Electrical engineering ,Mechanical engineering ,Heat sink ,law.invention ,Pressure measurement ,Pirani gauge ,law ,Torr ,Calibration ,Wafer ,business ,Ambient pressure - Abstract
The implementation of differential Pirani gauge for accurately measuring wafer-level package pressures was demonstrated. We proposed a multiple-sensor-solution, where two Pirani gauges were constructed under different pressures; one in sealed micro-cavity for measuring pressures and the other one in opened micro-cavity as a reference. Ambient pressure, structural dimension variations, and resistivity differences among wafers/lots, were captured through the differential scheme for error compensations, allowing accurate pressure determinations. Presented Pirani utilized small gaps (∼2µm) between heater and dual heat sinks to obtain wide operation range (0.05∼100 Torr) and high sensitivity (∼10000 ppm/Torr). With 5X error reductions and high stabilities, the proposed device was successfully used in examining reliabilities and monitoring processes of wafer-level packages.
- Published
- 2015
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