1. Ferroelectric memory devices using hafnium aluminum oxides and remote plasma-treated electrodes for sustainable energy-efficient electronics
- Author
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Cun-Bo Liu, Ruo-Yin Liao, Hsuan-Han Chen, Zhi-Wei Zheng, Kuan-Hung Su, I-Cheng Lin, Ting-An Liang, Ping-Yu Lin, Chen-Hao Wen, Hsiao-Hsuan Hsu, Chun-Hu Cheng, and Ching-Chien Huang
- Subjects
hafnium aluminum oxide ,ferroelectric ,plasma ,Materials of engineering and construction. Mechanics of materials ,TA401-492 ,Chemical technology ,TP1-1185 - Abstract
In this work, we adopt a low-temperature sustainable plasma treatment approach for the fabrication of ferroelectric memory devices. From our experimental results, we found that the ferroelectric polarization characteristics of HfAlO _x ferroelectric device could be further improved by using low-temperature nitrogen plasma treatment on bottom TiN electrode for surface modification. The low-temperature nitrogen plasma treatment on TiN bottom electrode not only prevent electrode oxidation, but also lowers the generation of defect traps at the interface between ferroelectric HfAlO _x and TiN bottom electrode during high-temperature ferroelectric annealing process. Besides, the nitrogen-treated bottom electrode also can improve bias-stress induced instability and cycling endurance of HfAlO _x ferroelectric devices due to the effective suppression of randomly distributed defect traps or oxygen vacancies near the surface of bottom electrode.
- Published
- 2024
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