1. Development and Application of a Diaphragm Micro-Pump with Piezoelectric Device
- Author
-
Ma, H. K., Hou, B. R., Wu, H. Y., Lin, C. Y., Gao, J. J., and Kou, M. C.
- Subjects
Computer Science - Other Computer Science - Abstract
In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate the liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 5mm x 8mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow which may change the chamber volume by changing the curvature of a diaphragm. Several experimental set-ups for performance test in a single micro-diaphragm pump, isothermal flow open system, and a closed liquid cooling system is designed and implemented. The performance of one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of operation frequency 70-180 Hz., Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
- Published
- 2008