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Your search keyword '"Honda, Tokuyuki"' showing total 92 results
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92 results on '"Honda, Tokuyuki"'

2. Fast computation of constructive and destructive interference areas in partially coherent imaging for resolution enhancement in optical microlithography

Author

Yamazoe, Kenji, Sekine, Yoshiyuki, and Honda, Tokuyuki

Subjects
Imaging systems -- Methods, Resolution (Optics) -- Research, Interference (Light) -- Measurement, Astronomy, Physics
Abstract

We present a method to determine constructive and destructive interference areas on the object plane in partially coherent imaging. This method is based on the interference pattern on the image plane. A function F that shows constructive and destructive interference areas with respect to the origin on the object plane is derived as the product of mutual intensity on the object plane and the Fourier transform of the pupil function. The convolution integral off and object transmittance gives the constructive and destructive interference areas. Experimental results show that small clear openings placed at constructive interference areas enhance light intensity at desired positions. By applying this method to optical microlithography imaging, one can achieve resolution enhancement of fine features with a relatively small amount of computation. OCIS codes: 110.4980, 110.2990, 110.5220.

Published
2009

4. Reflection-grating self-pumped phase conjugation with optical feedback free of input conditions

Author

Honda, Tokuyuki and Matsumoto, Hirokazu

Subjects
Diffraction gratings -- Analysis, Optical instruments -- Research, Resolution (Optics) -- Analysis, Astronomy, Physics
Abstract

A reflection-grating self-pumped phase-conjugate mirror is demonstrated with a photorefractive KNb[O.sub.3] crystal in a novel ring configuration. The feedback beam in the ring configuration is made to track the input probe beam automatically so that the phase conjugation is sustained without readjustment of the optical feedback loop when the angle or the position of the input probe beam is changed. The tracking feedback is realized by means of a simple three-lens erect imaging system. The angular and the positional acceptances for a tightly focused input beam of 50-[[micro] meter] diameter are [Delta][[Theta].sub.x] = 55 mrad, [Delta][[Theta].sub.y] = 67 mrad, and [Delta] x = 2.1 mm, [Delta] y = 4.2 mm, respectively.

Published
1994

5. Ultraminiature video-rate forward-view spectrally encoded endoscopy with straight axis configuration

Author

Wang, Zhuo, additional, Wu, Tzu-Yu, additional, Hamm, Mark A., additional, Altshuler, Alexander, additional, Mach, Anderson T., additional, Gilbody, Donald I., additional, Wu, Bin, additional, Ganesan, Santosh N., additional, Chung, James P., additional, Ikuta, Mitsuhiro, additional, Brauer, Jacob S., additional, Takeuchi, Seiji, additional, and Honda, Tokuyuki, additional

Published
2017
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18. Development of ArF immersion exposure tool

Author

Nakano, Hitoshi, primary, Hata, Hideo, additional, Takahashi, Kazuhiro, additional, Arakawa, Mikio, additional, Chibana, Takahito, additional, Honda, Tokuyuki, additional, Chiba, Keiko, additional, and Mori, Sunao, additional

Published
2005
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20. ArF immersion lithography: critical optical issues

Author

Honda, Tokuyuki, primary, Kishikawa, Yasuhiro, additional, Tokita, Toshinobu, additional, Ohsawa, Hiroshi, additional, Kawashima, Miyoko, additional, Ohkubo, Akinori, additional, Yoshii, Minoru, additional, Uda, Koji, additional, and Suzuki, Akiyoshi, additional

Published
2004
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