1. Relaxation and dynamics of high-stress pre-displaced string resonators
- Author
-
Yao, Xiong, Hoch, David, and Poot, Menno
- Subjects
Physics - Classical Physics ,Condensed Matter - Mesoscale and Nanoscale Physics - Abstract
Pre-displaced micromechanical resonators made from high-stress material give rise to new rich static and dynamic behavior. Here, an analytical model is presented to describe the mechanics of such pre-displaced resonators. The bending and tension energies are derived and a modified Euler-Bernoulli equation is obtained by applying the least action principle. By projecting the model onto a cosine shape, the energy landscape is visualized, and the pre-displacement dependence of stress and frequency is studied semi-analytically. The analysis is extended with finite-element simulations, including the mode shape, the role of overhang, and the stress distribution., Comment: 12 pages, 6 figures
- Published
- 2022
- Full Text
- View/download PDF