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We developed an implantable thin film transistor temperature sensor (TFT-TS) to measure temperature changes in the brain. These changes are assumed to be associated with cerebral metabolism and neuronal activity. Two prototype TFT-TSs were designed and tested in-vitro: one with 8 diode-connected single-ended sensors, and the other with 4 pairs of differential-ended sensors in an array configuration. The sensor elements are 25 ~ 100 pm in width and 5 μm in length. The TFT-TSs were fabricated based on high-speed ZnO TFT process technology on flexible polyimide substrates (50 μm thick, 500 μm width, 20 mm length). In order to interface external signal electronics, they were directly bonded to a prototype printed circuit board using anisotropic conductive films The prototypes were characterized between 23 ~ 38 °C using a commercial temperature sensor and custom-designed temperature controlled oven. The maximum sensitivity of 40 mV/°C was obtained from the TFT-TS.

Oxide semiconductor electronics may enable new applications including large-area, flexible, integrated systems. ZnO thin film transistors have been reported with field-effect mobility > 100 cm2/V·s, on-current density > 700 mA/mm, and microwave operation (f T > 2 GHz, f max > 7 GHz) for ZnO deposited by pulsed laser deposition at 400°C.[1] Other oxide semiconductors, including amorphous and crystalline mixtures of I 2 O 3 , Ga 2 O 3 , ZnO, have also been widely studied, and high mobility (> 30 cm2/V·s) thin film transistors and circuits with propagation delays d = dI DS /dV DS ) observed in a range of oxide thin film transistors. In particular we find that self-heating is a significant limiting factor for the performance of oxide devices and circuits on low-cost, low-thermal conductivity substrates such as glass and plastic.

We report using a novel, weak oxidant, plasma-enhanced atomic layer deposition (PEALD) process at 200 °C to fabricate stable, high mobility ZnO thin film transistors (TFTs) and fast circuits on glass and polyimide substrates. Weak oxidant PEALD provides a simple, fast deposition process that results in uniform, conformai semiconductor and dielectric layers and enhancement-mode MOSFETs from uncompensated films. Highly conformai PEALD Al2O3 layers provide a high yield dielectric on rough plastic substrates for both PEALD ZnO TFTs and cross-overs. Our PEALD ZnO TFTs have field-effect mobility of >20 cm2/V·s on polyimide substrates with excellent bias stress stability. TFTs biased continuously for 40,000s showed