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3. Improved binary collision approximation ion implant simulators

Author

Hernandez-Mangas, J.M., Arias, J., Bailon, L., Jaraiz, M., and Barbolla, J.

Subjects
Mass spectrometry -- Usage, Ions -- Atomic properties, Collisions (Physics) -- Observations, Physics
Abstract

An efficient binary collision approximation (BCA) ion implant code with good prediction capabilities for semiconductor materials (Si, GaAs, SiC) with only one adjustable parameter for low implementation doses is presented. A comparison with experimental secondary ion mass spectroscopy results for several projectiles and targets is presented.

Published
2002

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