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We demonstrate temporally multiplexed multibeam ptychography implemented for the first time in the EUV, by using a high harmonic based light source. This allows for simultaneous imaging of different sample areas, or of the same area at different times or incidence angles. Furthermore, we show that this technique is compatible with wavelength multiplexing for multibeam spectroscopic imaging, taking full advantage of the temporal and spectral characteristics of high harmonic light sources. This technique enables increased data throughput using a simple experimental implementation and with high photon efficiency.

Recent advances in structured illumination are enabling a wide range of applications from imaging to metrology, which can benefit from advanced beam characterization techniques. Solving uniquely for the spatial distribution of polarization in a beam typically involves the use of two or more polarization optics, such as a polarizer and a waveplate, which is prohibitive for some wavelengths outside of the visible spectrum. We demonstrate a technique that circumvents the use of a waveplate by exploiting extended Gerchberg–Saxton phase retrieval to extract the phase. The technique enables high-resolution, wavefront-sensing, full-field polarimetry capable of solving for both simple and exotic polarization states, and moreover, is extensible to shorter wavelength light.

The discovery of enols in combustion environments and our atmosphere has garnered increasing attention to the many unanswered questions surrounding enol chemistry. The scarcity of experimental data concerning these enols renders combustion and atmospheric models with a lack of constraining parameters, leading to varying computational predictions. Experimental detection is difficult because mass spectrometry, a powerful tool for probing a wide variety of species, cannot distinguish between enols and their thermodynamically favorable ketone isomers. A solution to this ambiguity is to use tunable vacuum ultraviolet (VUV) light from a synchrotron to identify the presence of the enol by its lower ionization energy compared to the isomer. We present a tabletop-scale VUV light source that implements highly cascaded harmonic generation, a new regime of cascaded nonlinear optics, to provide a set of spectral lines spaced by 1.2 eV. We demonstrate that the variety of photon energies available allows us to detect the keto-enol tautomerization of four aldehydes and ketones. By combining this novel VUV light source with an established microreactor, we first revisit the formation of vinyl alcohol from acetaldehyde and confirm that the observed isomerization is indeed unimolecular. Secondly, we observe the thermal tautomerization of acetone to propen-2-ol for the first time. Finally, we observe the thermal tautomerization of cyclohexanone to 1-cyclohexenol and methyl vinyl ketone to 2-hydroxybutadiene, where the results are in good agreement with those reported at a synchrotron. Our measurements can be used to constrain models, inform future experimental studies of enol reactivity, and potentially enhance current understanding of combustion and environmental chemistry.

Multiple beam ptychographic imaging with an extreme ultraviolet high harmonic light source is demonstrated through simultaneous spectral and temporal multiplexing. This method is experimentally straightforward to implement and ideal for hyperspectral functional imaging of nanosystems

We demonstrated a simple method to quantitatively characterize the spatiotemporal orbital angular momentum (ST-OAM) of light. Our method can measure the presence of ST-OAM, space-time topological charges, OAM helicity, pulse dispersion, and beam divergence.

Nanostructuring on length scales corresponding to phonon mean free paths provides control over heat flow in semiconductors and makes it possible to engineer their thermal properties. However, the influence of boundaries limits the validity of bulk models, while first principles calculations are too computationally expensive to model real devices. Here we use extreme ultraviolet beams to study phonon transport dynamics in a 3D nanostructured silicon metalattice with deep nanoscale feature size, and observe dramatically reduced thermal conductivity relative to bulk. To explain this behavior, we develop a predictive theory wherein thermal conduction separates into a geometric permeability component and an intrinsic viscous contribution, arising from a new and universal effect of nanoscale confinement on phonon flow. Using both experiments and atomistic simulations, we show that our theory is valid for a general set of highly-confined silicon nanosystems, from metalattices, nanomeshes, porous nanowires to nanowire networks. This new analytical theory of thermal conduction can be used to predict and engineer phonon transport in boundary-dominated nanosystems, that are of great interest for next-generation energy-efficient devices.

Light carrying spatiotemporal orbital angular momentum (ST-OAM) makes possible new types of optical vortices arising from transverse OAM. ST-OAM pulses exhibit novel properties during propagation, transmission, refraction, diffraction, and nonlinear conversion, attracting growing experimental and theoretical interest and studies. However, one major challenge is the lack of a simple and straightforward method for characterizing ultrafast ST-OAM pulses. Using spatially resolved spectral interferometry, we demonstrate a simple, stationary, single-frame method to quantitatively characterize ultrashort light pulses carrying ST-OAM. Using our method, the presence of an ST-OAM pulse, including its main characteristics such as topological charge numbers and OAM helicity, can be identified easily from the unique and unambiguous features directly seen on the raw data--without any need for a full analysis of the data. After processing and reconstructions, other exquisite features, including pulse dispersion and beam divergence, can also be fully characterized. Our fast characterization method allows high-throughput and quick feedback during the generation and optical alignment processes of ST-OAM pulses. It is straightforward to extend our method to single-shot measurement by using a high-speed camera that matches the pulse repetition rate. This new method can help advance the field of spatially and temporally structured light and its applications in advanced metrologies., Comment: 5 figures, 3 supplementary figures, 10 pages

We developed soft x-ray vector ptychography at 10 nm spatial resolution without requiring a priori knowledge, which is then used to quantitatively image 3D magnetization vector fields of topological magnetic monopoles and their interactions.

We developed a simple single-shot method to characterize ultrafast light pulses carrying spatiotemporal orbital angular momentum (ST-OAM) near its Fourier-transform limit. The method is used to measure ST-OAM pulses with different topological charges, chirps, and divergence.

Metalattices are artificial 3D solids, periodic on sub-100 nm length scales, that enable the functional properties of materials to be tuned. However, because of their complex structure, predicting and characterizing their properties is challenging. Here we demonstrate the first nondestructive measurements of the mechanical and structural properties of metalattices with feature sizes down to 14 nm. By monitoring the time-dependent diffraction of short wavelength light from laser-excited acoustic waves in the metalattices, we extract their acoustic dispersion, Young's modulus, filling fraction, and thicknesses. Our measurements are in excellent agreement with macroscopic predictions and potentially destructive techniques such as nanoindentation and scanning electron microscopy, with increased accuracy over larger areas. This is interesting because the transport properties of these metalattices do not obey bulk predictions. Finally, this approach is the only way to validate the filling fraction of metalattices over macroscopic areas. These combined capabilities can enable accurate synthesis of nanoenhanced materials.

[EN]High-harmonic generation (HHG) is a unique tabletop light source with femtosecond-to-attosecond pulse duration and tailorable polarization and beam shape. Here, we use counter-rotating femtosecond laser pulses of 0.8 µm and 2.0 μm to extend the photon energy range of circularly polarized high-harmonics and also generate single-helicity HHG spectra. By driving HHG in helium, we produce circularly polarized soft x-ray harmonics beyond 170 eV—the highest photon energy of circularly polarized HHG achieved to date. In an Ar medium, dense spectra at photon energies well beyond the Cooper minimum are generated, with regions composed of a single helicity—consistent with the generation of a train of circularly polarized attosecond pulses. Finally, we show theoretically that circularly polarized HHG photon energies can extend beyond the carbon K edge, extending the range of molecular and materials systems that can be accessed using dynamic HHG chiral spectro-microscopies, Department of Energy BES (DE-FG02-99ER14982); Air Force Office of Scientific Research (FA9550-16-1-0121); National Science Foundation (DGE-1144083, DGE-1650115); European Research Council (8511201); Ministerio de Ciencia, Innovación y Universidades (PID2019-106910GB-100); Junta de Castilla y León (SA287P18); Ramón y Cajal contract (RYC-2017-22745).

${\mathrm{D}}_{2}$ molecules, excited by linearly cross-polarized femtosecond extreme ultraviolet (XUV) and near-infrared (NIR) light pulses, reveal highly structured ${\mathrm{D}}^{+}$ ion fragment momenta and angular distributions that originate from two different four-step dissociative ionization pathways after four-photon absorption (one XUV $+$ three NIR). We show that, even for very low dissociation kinetic energy release $\ensuremath{\le}$ 240 meV, specific electronic excitation pathways can be identified and isolated in the final ion momentum distributions. With the aid of ab initio electronic structure and time-dependent Schr\"odinger equation calculations, angular momentum, energy, and parity conservation are used to identify the excited neutral molecular states and molecular orientations relative to the polarization vectors in these different photoexcitation and dissociation sequences of the neutral ${\mathrm{D}}_{2}$ molecule and its ${\mathrm{D}}_{2}^{+}$ cation. In one sequential photodissociation pathway, molecules aligned along either of the two light polarization vectors are excluded, while another pathway selects molecules aligned parallel to the light propagation direction. The evolution of the nuclear wave packet on the intermediate $B{\phantom{\rule{0.16em}{0ex}}}^{1}{\mathrm{\ensuremath{\Sigma}}}_{u}^{+}$ electronic state of the neutral ${\mathrm{D}}_{2}$ molecule is also probed in real time.

Understanding nanoscale thermal transport is critical for nano-engineered devices such as quantum sensors, thermoelectrics, and nanoelectronics. However, despite overwhelming experimental evidence for nondiffusive heat dissipation from nanoscale heat sources, the underlying mechanisms are still not understood. In this work, we show that for nanoscale heat source spacings that are below the mean free path of the dominant phonons in a substrate, close packing of the heat sources increases in-plane scattering and enhances cross-plane thermal conduction. This leads to directional channeling of thermal transport—a novel phenomenon. By using advanced atomic-level simulations to accurately access the lattice temperature and the phonon scattering and transport properties, we finally explain the counterintuitive experimental observations of enhanced cooling for close-packed heat sources. This represents a distinct fundamental behavior in materials science with far-reaching implications for electronics and future quantum devices.

High-harmonic generation (HHG) is among the most extreme nonlinear optical processes to date. In HHG, some of the driving laser beam properties are imprinted on the dynamics of the radiating electron, and, in turn, on the emitted extreme-ultraviolet/soft X-ray light. As a consequence, it is now possible to coherently manipulate the HHG pulse duration (attosecond waveforms), the photon energy (UV to soft X-rays [1] ), polarization and orbital angular momentum (OAM) [2] , [3] , among others. However, precise coherent control over the frequency content—a key property to perform high-harmonic spectroscopy—has not been achieved yet. Also, equally important to the frequency content is the transverse confinement of the HHG radiation [4] , [5] is a key aspect for applications in imaging and scatterometry.

Light with spatiotemporal orbital angular momentum (ST-OAM) is a recently discovered type of structured and localized electromagnetic field. This field carries characteristic space-time spiral phase structure and transverse intrinsic OAM. In this work, we present the generation and characterization of the second-harmonic of ST-OAM pulses. We uncovered the conservation of transverse OAM in a second-harmonic generation process, where the space-time topological charge of the fundamental field is doubled along with the optical frequency. Our experiment thus suggests a general ST-OAM nonlinear scaling rule - analogous to that in conventional OAM of light. Furthermore, we observe that the topology of a second-harmonic ST-OAM pulse can be modified by complex spatiotemporal astigmatism, giving rise to multiple phase singularities separated in space and time. Our study opens a new route for nonlinear conversion and scaling of light carrying ST-OAM with the potential for driving other secondary ST-OAM sources of electromagnetic fields and beyond., 15 pages, 6 figures

[EN]Optical interactions are governed by both spin and angular momentum conservation laws, which serve as a tool for controlling light–matter interactions or elucidating electron dynamics and structure of complex systems. Here, we uncover a form of simultaneous spin and orbital angular momentum conservation and show, theoretically and experimentally, that this phenomenon allows for unprecedented control over the divergence and polarization of extreme-ultraviolet vortex beams. High harmonics with spin and orbital angular momenta are produced, opening a novel regime of angular momentum conservation that allows for manipulation of the polarization of attosecond pulses—from linear to circular—and for the generation of circularly polarized vortices with tailored orbital angular momentum, including harmonic vortices with the same topological charge as the driving laser beam. Our work paves the way to ultrafast studies of chiral systems using high-harmonic beams with designer spin and orbital angular momentum., The authors are thankful for useful and productive conversations with E. Pisanty, C. Durfee, D. Hickstein, S. Alperin and M. Siemens. H.C.K. and M.M.M. graciously acknowledge support from the Department of Energy BES Award No. DE-FG02–99ER14982 for the experimental implementation, as well as a MURI grant from the Air Force Office of Scientific Research under Award No. FA9550–16–1–0121 for the theory. J.L.E., N.J.B. and Q.L.N. acknowledge support from National Science Foundation Graduate Research Fellowships (Grant No. DGE-1144083). C.H.-G., J.S.R. and L.P. acknowledge support from Junta de Castilla y León (SA046U16) and Ministerio de Economía y Competitividad (FIS2013–44174-P, FIS2016–75652-P). C.H.-G. acknowledges support from a 2017 Leonardo Grant for Researchers and Cultural Creators, BBVA Foundation. L.R. acknowledges support from Ministerio de Educación, Cultura y Deporte (FPU16/02591). A.P. acknowledges support from the Marie Sklodowska-Curie Grant, Agreement No. 702565. We thankfully acknowledge the computer resources at MareNostrum and the technical support provided by Barcelona Supercomputing Center (RES-AECT-2014–2–0085). This research made use of the high-performance computingresources of the Castilla y León Supercomputing Center (SCAYLE, www.scayle.es),financed by the European Regional Development Fund (ERDF). Certain commercial instruments are identified to specify the experimental study adequately. This does not imply endorsement by the National Institute of Standards and Technology (NIST) or that the instruments are the best available for the purpose.

Coherent Fourier scatterometry (CFS) via laser beams with a Gaussian spatial profile is routinely used as an in-line inspection tool to detect defects on, for example, lithographic substrates, masks, reticles, and wafers. New metrology techniques that enable high-throughput, high-sensitivity, and in-line inspection are critically in need for next-generation high-volume manufacturing including those based on extreme ultraviolet (EUV) lithography. Here, a set of novel defect inspection techniques are proposed and investigated numerically [Wang et al., Opt. Express 29, 3342 (2021)], which are based on bright-field CFS using coherent beams that carry orbital angular momentum (OAM). One of our proposed methods, the differential OAM CFS, is particularly unique because it does not require a pre-established database for comparison in the case of regularly patterned structures with reflection symmetry such as 1D and 2D grating structures. We studied the performance of these metrology techniques on both amplitude and phase defects. We demonstrated their superior advantages, which shows up to an order of magnitude higher in signal-to-noise ratio over the conventional Gaussian beam CFS. These metrology techniques will enable higher sensitivity and robustness for in-line nanoscale defect inspection. In general, our concept could benefit EUV and x-ray scatterometry as well.

Imec’s AttoLab is the first industrial laboratory capable of watching the ultrafast dynamics of photoresists following 13.5 nm, EUV exposure, and for emulating high-numerical-aperture (high-NA) exposure on 300-mm wafers using two-beam EUV interference. The two respective beamlines are powered by a laser-based high-harmonic generation EUV source. Its capabilities have recently been proven by imaging 20 nm pitch lines and spaces using Lloyd’s Mirror interference lithography. In parallel, time-averaged and time-resolved techniques for studying the ultrafast dynamics of photoresists after EUV exposure, coherent diffractive imaging to study resist interfaces, and more sophisticated interference lithography techniques for printing sub-22 nm pitches on full 300-mm wafers are being developed. Taking advantage of the bright and short EUV pulses now available at imec, we will be able to contribute to a smooth transition towards next generation high-NA lithography.

Biominerals such as seashells, corals skeletons, bone, and enamel are optically anisotropic crystalline materials with unique nano- and micro-scale organization that translates into exceptional macroscopic mechanical properties, providing inspiration for engineering new and superior biomimetic structures. Here we use particles of Seriatopora aculeata coral skeleton as a model and demonstrate, for the first time, x-ray linear dichroic ptychography. We map the aragonite (CaCO3) crystal c-axis orientations in coral skeleton with 35 nm spatial resolution. Linear dichroic phase imaging at the O K-edge energy shows strong polarization-dependent contrast and reveals the presence of both narrow (< 35{\deg}) and wide (> 35{\deg}) c-axis angular spread in sub-micrometer coral particles. These x-ray ptychography results were corroborated using 4D scanning transmission electron nano-diffraction on the same particles. Evidence of co-oriented but disconnected corallite sub-domains indicates jagged crystal boundaries consistent with formation by amorphous nanoparticle attachment. Looking forward, we anticipate that x-ray linear dichroic ptychography can be applied to study nano-crystallites, interfaces, nucleation and mineral growth of optically anisotropic materials with sub-ten nanometers spatial resolution in three dimensions.

By driving high-harmonics with necklace laser beams, we produce combs with tunable frequency content and spacing, up to the soft x-ray region. The emitted harmonics also exhibit distinct spatial profiles and lower divergence than Gaussian-driven harmonics.

By generating the second-harmonic of spatiotemporal orbital angular momentum light, conservation of transverse orbital angular momentum is observed, while the topology of such second-harmonic pulses can be modified by complex spatiotemporal astigmatism.

Altres ajuts: acords transformatius de la UAB Heat management is crucial in the design of nanoscale devices as the operating temperature determines their efficiency and lifetime. Past experimental and theoretical works exploring nanoscale heat transport in semiconductors addressed known deviations from Fourier's law modeling by including effective parameters, such as a size-dependent thermal conductivity. However, recent experiments have qualitatively shown behavior that cannot be modeled in this way. Here, we combine advanced experiment and theory to show that the cooling of 1D- and 2D-confined nanoscale hot spots on silicon can be described using a general hydrodynamic heat transport model, contrary to previous understanding of heat flow in bulk silicon. We use a comprehensive set of extreme ultraviolet scatterometry measurements of nondiffusive transport from transiently heated nanolines and nanodots to validate and generalize our ab initio model, that does not need any geometry-dependent fitting parameters. This allows us to uncover the existence of two distinct time scales and heat transport mechanisms: an interface resistance regime that dominates on short time scales and a hydrodynamic-like phonon transport regime that dominates on longer time scales. Moreover, our model can predict the full thermomechanical response on nanometer length scales and picosecond time scales for arbitrary geometries, providing an advanced practical tool for thermal management of nanoscale technologies. Furthermore, we derive analytical expressions for the transport time scales, valid for a subset of geometries, supplying a route for optimizing heat dissipation.

The conservation of spatiotemporal orbital angular momentum (ST-OAM) of light is observed in second-harmonic generation for the first time. The space-time topological charge of the fundamental ST-OAM field is doubled along with the optical frequency.

An analysis of blind ptychography that provides predictions of error and the reconstructed field-of-view (FOV) is presented. The utility of this analysis is demonstrated with a new approach called dual-grid ptychography that maximizes the FOV.

Structural dynamics 9(1), 014501 (2022). doi:10.1063/4.0000132, Charge density wave (CDW) order is an emergent quantum phase that is characterized by periodic lattice distortion and charge density modulation, often present near superconducting transitions. Here, we uncover a novel inverted CDW state by using a femtosecond laser to coherently reverse the star-of-David lattice distortion in 1T-TaSe2. We track the signature of this novel CDW state using time- and angle-resolved photoemission spectroscopy and the time-dependent density functional theory to validate that it is associated with a unique lattice and charge arrangement never before realized. The dynamic electronic structure further reveals its novel properties that are characterized by an increased density of states near the Fermi level, high metallicity, and altered electron���phonon couplings. Our results demonstrate how ultrafast lasers can be used to create unique states in materials by manipulating charge-lattice orders and couplings.INTRODUCTION, Published by AIP Publishing LLC, Melville, NY

Optical interactions are governed by both spin and angular momentum conservation laws, which serve as a tool for controlling light–matter interactions or elucidating electron dynamics and structure of complex systems. Here, we uncover a form of simultaneous spin and orbital angular momentum conservation and show, theoretically and experimentally, that this phenomenon allows for unprecedented control over the divergence and polarization of extreme-ultraviolet vortex beams. High harmonics with spin and orbital angular momenta are produced, opening a novel regime of angular momentum conservation that allows for manipulation of the polarization of attosecond pulses—from linear to circular—and for the generation of circularly polarized vortices with tailored orbital angular momentum, including harmonic vortices with the same topological charge as the driving laser beam. Our work paves the way to ultrafast studies of chiral systems using high-harmonic beams with designer spin and orbital angular momentum.

We identify, via numerical simulations, the regime of enhanced frequency chirp during nonlinear propagation in multipass cell. This regime - used before the dawn of chirped pulse amplification to generate ultrashort pulses - paves the way for the generation of temporally clean few-cycle pulses. Here, we demonstrate numerically that the spectra of pulses from an Yb-based laser system can be broadened into a flat supercontinuum with a smooth spectral phase compatible with a clean few-cycle pulse with temporal secondary structures with peak intensity below 0.5% that of the main peak.

A new imaging technique enables nondestructive, 3D characterization of nanostructures, their composition, and interfaces., Next-generation nano- and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here, we present the first phase-sensitive extreme ultraviolet imaging reflectometer. It combines the excellent phase stability of coherent high-harmonic sources, the unique chemical sensitivity of extreme ultraviolet reflectometry, and state-of-the-art ptychography imaging algorithms. This tabletop microscope can nondestructively probe surface topography, layer thicknesses, and interface quality, as well as dopant concentrations and profiles. High-fidelity imaging was achieved by implementing variable-angle ptychographic imaging, by using total variation regularization to mitigate noise and artifacts in the reconstructed image, and by using a high-brightness, high-harmonic source with excellent intensity and wavefront stability. We validate our measurements through multiscale, multimodal imaging to show that this technique has unique advantages compared with other techniques based on electron and scanning probe microscopies.

Author(s): Frazer, TD; Knobloch, JL; Hernandez-Charpak, JN; Hoogeboom-Pot, KM; Nardi, D; Yazdi, S; Chao, W; Anderson, EH; Tripp, MK; King, SW; Kapteyn, HC; Murnane, MM; Abad, B | Abstract: Ultrathin films and multilayers, with controlled thickness down to single atomic layers, are critical for advanced technologies ranging from nanoelectronics to spintronics to quantum devices. However, for thicknesses less than 10 nm, surfaces and dopants contribute significantly to the film properties, which can differ dramatically from that of bulk materials. For amorphous films being developed as low dielectric constant interfaces for nanoelectronics, the presence of surfaces or dopants can soften films and degrade their mechanical performance. Here we use coherent short-wavelength light to fully and nondestructively characterize the mechanical properties of individual films as thin as 5 nm within a bilayer. In general, we find that the mechanical properties depend both on the amount of doping and the presence of surfaces. In very thin (5-nm) silicon carbide bilayers with low hydrogen doping, surface effects induce a substantial softening - by almost an order of magnitude - compared with the same doping in thicker (46-nm) bilayers. These findings are important for informed design of ultrathin films for a host of nano- and quantum technologies, and for improving the switching speed and efficiency of next-generation electronics.

Ultrashort light pulses can selectively excite charges, spins and phonons in materials, providing a powerful approach for manipulating their properties. Here we use femtosecond laser pulses to coherently manipulate the electron and phonon distributions, and their couplings, in the charge density wave (CDW) material 1T-TaSe$_2$. After exciting the material with a short light pulse, spatial smearing of the electrons launches a coherent lattice breathing mode, which in turn modulates the electron temperature. This indicates a bi-directional energy exchange between the electrons and the strongly-coupled phonons. By tuning the laser excitation fluence, we can control the magnitude of the electron temperature modulation, from ~ 200 K in the case of weak excitation, to ~ 1000 K for strong laser excitation. This is accompanied by a switching of the dominant mechanism from anharmonic phonon-phonon coupling to coherent electron-phonon coupling, as manifested by a phase change of $\pi$ in the electron temperature modulation. Our approach thus opens up possibilities for coherently manipulating the interactions and properties of quasi-2D and other quantum materials using light., Comment: 15 pages, 4 figures

We present a versatile, ptychographic phase-sensitive imaging EUV reflectometer that can nondestructively image samples with spatial, depth and compositional resolution, with sensitivities to dopant levels and interface quality.

We observe new intermediate and inverted charge density wave states in 1T-TaSe2 using time- and angle-resolved photoemission spectroscopy. The results provide unique opportunities to understand and control the microscopic interactions and material properties.

We experimentally characterized an unexpectedly-strong nonlinear response in dispersive dielectric multilayer mirrors below the known damage threshold. We observed a strong reflectivity decrease, local heating, transient spectral modifications, and time-dependent absorption of the incident pulse.

Using trARPES, we observe that the CDW amplitude mode in 1T-TaSe2 can coherently modulate the electron temperature. Coherent electron-phonon coupling mechanisms are proposed to explain the electron temperature oscillations at different pump fluences.