1. Thick beryllium coatings by ion-assisted magnetron sputtering
- Author
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H. Xu, Yinmin Wang, K. A. Moreno, Heather Wilkens, C. Alford, K. P. Youngblood, Tim Fuller, Alex V. Hamza, Jun-jim Wu, Eric Chason, J. Hayes, Abbas Nikroo, Andrew J. Detor, and Tony van Buuren
- Subjects
Materials science ,Scanning electron microscope ,Mechanical Engineering ,chemistry.chemical_element ,engineering.material ,Sputter deposition ,Condensed Matter Physics ,Focused ion beam ,chemistry ,Coating ,Mechanics of Materials ,Sputtering ,Cavity magnetron ,engineering ,General Materials Science ,Beryllium ,Composite material ,High-power impulse magnetron sputtering - Abstract
Thick (>150 μm) beryllium coatings are studied as an ablator material of interest for fusion fuel capsules for the National Ignition Facility. DC magnetron sputtering is used because of the relative controllability of the processing temperature and energy of the deposits. However, coatings produced by DC magnetron sputtering leak the fuel gas D2. By using ion-assisted DC magnetron, sputtered coatings can be made that are leak-tight. Transmission electron microscopy (TEM) studies revealed microstructural changes that lead to leak-tight coating. Ultrasmall angle x-ray spectroscopy is used to characterize the void distribution and volume along the spherical surface along with a combination of focused ion beam, scanning electron microscope, and TEM. An in situ multibeam optical stress sensor was used to measure the stress behavior of thick beryllium coatings on flat substrates as the material was being deposited.
- Published
- 2011