20 results on '"Hasumi, Kazuhisa"'
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2. Cu pad surface height evaluation technique by in-line SEM for wafer hybrid bonding
3. In-situ electrical property quantification of memory devices by modulated electron microscopy
4. In-situ electrical property quantification of memory devices by modulated electron microscopy
5. EB metrology of Ge channel gate-all-around FET: buckling evaluation and EB damage assessment
6. Review of scanning electron microscope-based overlay measurement beyond 3-nm node device
7. Contact inspection and resistance–capacitance measurement of Si nanowire with SEM voltage contrast
8. Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM
9. Contact inspection of Si nanowire with SEM voltage contrast
10. SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM
11. Variability study with CD-SEM metrology for STT-MRAM: correlation analysis between physical dimensions and electrical property of the memory element
12. Enabling CD SEM metrology for 5nm technology node and beyond
13. SEM based overlay measurement between resist and buried patterns
14. Contact inspection of Si nanowire with SEM voltage contrast
15. SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM
16. Variability study with CD-SEM metrology for STT-MRAM: correlation analysis between physical dimensions and electrical property of the memory element
17. SEM based overlay measurement between resist and buried patterns
18. Effects of Na2 CO 3 Addition on the Gas Sensing Characteristics of CuO / ZnO Heterocontact
19. EB metrology of Ge channel gate-all-around FET: buckling evaluation and EB damage assessment.
20. Enabling CD SEM metrology for 5nm technology node and beyond
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