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1. Recent Progresses and Perspectives of UV Laser Annealing Technologies for Advanced CMOS Devices

2. Microsecond non-melt UV laser annealing for future 3D-stacked CMOS

3. Solid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser Annealing

4. Copper Large-scale Grain Growth by UV Nanosecond Pulsed Laser Annealing

5. Solid Phase Recrystallization and Dopant Activation in Arsenic Ion-Implanted Silicon-On-Insulator by UV Laser Annealing

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