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Your search keyword '"Gruendl, T."' showing total 21 results
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21 results on '"Gruendl, T."'

1. In-situ direct visualization of irradiated e-beam patterns on unprocessed resists using atomic force microscopy

Author

Koop, H., Schnurbusch, D., Mueller, M., Gruendl, T., Zech, M., Amann, M. -C., Karrai, K., and Holleitner, A. W.

Subjects
Condensed Matter - Materials Science, Condensed Matter - Other Condensed Matter
Abstract

We introduce an in-situ characterization method of resists used for e-beam lithography. The technique is based on the application of an atomic force microscope which is directly mounted below the cathode of an electron-beam lithography system. We demonstrate that patterns irradiated by the e-beam can be efficiently visualized and analyzed in surface topography directly after the e-beam exposure. This in-situ analysis takes place without any development or baking steps, and gives access to the chemical (or latent) image of the irradiated resist.

Published
2010
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2. 100 Gb/s single VCSEL data transmission link

Author

Rodes Lopez, Roberto, Estaran Tolosa, Jose Manuel, Li, Bomin, Muller, M., Jensen, Jesper Bevensee, Gruendl, T., Ortsiefer, M., Neumeyr, C., Rosskopf, J., Larsen, Knud J., Amann, M.-C., Tafur Monroy, Idelfonso, Rodes Lopez, Roberto, Estaran Tolosa, Jose Manuel, Li, Bomin, Muller, M., Jensen, Jesper Bevensee, Gruendl, T., Ortsiefer, M., Neumeyr, C., Rosskopf, J., Larsen, Knud J., Amann, M.-C., and Tafur Monroy, Idelfonso

Abstract

100 Gb/s optical fiber transmission link with a single 1.5 um VCSEL has been experimentally demonstrated using 4-level pulse amplitude modulation.

Published
2012

7. 1.55 μm high-speed MEMS-tunable VCSEL

Author

Zogal, K., primary, Gruendl, T., additional, Davani, H. A., additional, Gierl, C., additional, Grasse, C., additional, Kueppers, F., additional, Meissner, P., additional, and Amann, M.-C., additional

Published
2012
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9. 100 Gb/s single VCSEL data transmission link

Author

Rodes, R., primary, Estaran, J., additional, Li, B., additional, Muller, M., additional, Jensen, J. B., additional, Gruendl, T., additional, Ortsiefer, M., additional, Neumeyr, C., additional, Rosskopf, J., additional, Larsen, K. J., additional, Amann, M.-C., additional, and Monroy, I. T., additional

Published
2012
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16. 1.55 m high-speed MEMS-tunable VCSEL

Author

Zogal, K., Gruendl, T., Davani, H. A., Gierl, C., Grasse, C., Kueppers, F., Meissner, P., and Amann, M.-C.

Abstract

We present a micro electro-mechanical system (MEMS) tunable vertical-cavity surface-emitting laser (VCSEL) emitting around 1.55 m with single-mode output power of >2.5mW and high side-mode suppression-ratio (SMSR) of >50dB over the entire tuning range of >50nm. The small-signal modulation technique (S21) has been used to study intrinsic and parasitic influences on the modulation response of the device. Additionally, the static characteristics as well as electrical and thermal design of the device are discussed with respect to its high-speed modulation behavior. The tunable laser shows 3-dB direct modulation frequencies above 6.4 GHz.

Published
2012
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18. Linewidth of surface micro-machined MEMS tunable VCSELs at 1.5μm.

Author

Gierl, C., Gruendl, T., Zogal, K., Grasse, C., Davani, H. A., Bohm, G., Kuppers, F., Meissner, P., and Amann, M.-C.

Abstract

We demonstrate the linewidth characteristics of a micro-electro-mechanical system (MEMS) widely tunable VCSEL based on a newly developed surface micro-machining technology. The minimal linewidth is 98MHz at thermal rollover. [ABSTRACT FROM PUBLISHER]

Published
2012

19. Singlemode 50nm tunable surface micro-machined MEMS-VCSEL operating at 1.95 μm.

Author

Zogal, K., Gruendl, T., Gierl, C., Grasse, C., Davani, H. A., Boehm, G., Meissner, P., Kueppers, F., and Amann, M.-C.

Abstract

We demonstrate for the first time a surface micro-machined micro-electro-mechanical tunable VCSEL operating at 1.95 μm with 50 nm tuning range, 1 mW output power and 2.5 mA threshold current, capable for absorption spectroscopy. [ABSTRACT FROM PUBLISHER]

Published
2012

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