1. Characterization by OCT of a new kind of micro-interferometric components for the NanoCarb miniature imaging spectrometer
- Author
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Yann Ferrec, Hélène Ehrhardt, Etienne Le Coarer, Silvère Gousset, J. Boussey, Laurence Croizé, Marie Panabière, Laure Brooker, Institut de Planétologie et d'Astrophysique de Grenoble (IPAG), Centre National d'Études Spatiales [Toulouse] (CNES)-Université Grenoble Alpes (UGA)-Centre National de la Recherche Scientifique (CNRS)-Institut national des sciences de l'Univers (INSU - CNRS)-Observatoire des Sciences de l'Univers de Grenoble (OSUG), Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut national de recherche en sciences et technologies pour l'environnement et l'agriculture (IRSTEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut national des sciences de l'Univers (INSU - CNRS)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut national de recherche en sciences et technologies pour l'environnement et l'agriculture (IRSTEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Laboratoire des technologies de la microélectronique (LTM), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'Énergie Atomique et aux Énergies Alternatives (CEA) - Grenoble-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA), DOTA, ONERA, Université Paris Saclay [Palaiseau], ONERA-Université Paris-Saclay, Airbus Defence and Space [Toulouse], Scarbo Consortium, Institut national des sciences de l'Univers (INSU - CNRS)-Centre National d'Études Spatiales [Toulouse] (CNES)-Centre National de la Recherche Scientifique (CNRS)-Observatoire des Sciences de l'Univers de Grenoble (OSUG ), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut national des sciences de l'Univers (INSU - CNRS)-Institut national de recherche en sciences et technologies pour l'environnement et l'agriculture (IRSTEA)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut national de recherche en sciences et technologies pour l'environnement et l'agriculture (IRSTEA)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Laboratoire des technologies de la microélectronique (LTM ), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), DOTA, ONERA, Université Paris Saclay (COmUE) [Palaiseau], ONERA-Université Paris Saclay (COmUE), and Ehrhardt, Hélène
- Subjects
[SPI.OPTI] Engineering Sciences [physics]/Optics / Photonic ,Novel optical systems design ,Computer science ,Imaging spectrometer ,Field of view ,02 engineering and technology ,Optical Coherence Tomography (OCT) characterization ,Miniaturized imaging spectrometer ,01 natural sciences ,010309 optics ,Optical path ,Optical coherence tomography ,0103 physical sciences ,Astronomical interferometer ,medicine ,Electronic engineering ,medicine.diagnostic_test ,Metrology for interferometers ,Detectors ,021001 nanoscience & nanotechnology ,Metrology ,Interferometry ,Cardinal point ,Green-house gasses monitoring ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,0210 nano-technology - Abstract
International audience; In this paper, we describe the NanoCarb concept as well as its key elements. Then we will explain the design of the prototype followed by the development of characterization techniques. Finally, we will present how this tool can be used as part of end-to-end model. The key element of the NanoCarb concept is a matrix of silicon Fabry-Perot micro-interferometers, which allows us to perform both imaging and interferometry with a field of view of 18° and several interferometric samples in a snapshot. This technique permits us to optimize the SNR for a much reduced volume. The very complex and unusual design of this component brings huge optical and technological challenges, and requires the development of characterization techniques at the nanometer scale. Upon achievement of this purpose, the next step will be the integration of this matrix in a NanoCarb prototype to demonstrate its effective performances. We present a test bench using the interferential metrology technique of Optical Coherence Tomography (OCT). In a first time, we managed to obtain optical path maps of different silicon wafers with nanometer accuracy. Then, we employed the technique to characterize the first micro-interferometers. In parallel, we realized the first prototype integration of NanoCarb with an InGaAs focal plane array and started its characterization
- Published
- 2019
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