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2. A tabletop x-ray tomography instrument for nanometer-scale imaging: demonstration of the 1,000-element transition-edge sensor subarray

Author

Szypryt, Paul, Nakamura, Nathan, Becker, Daniel T., Bennett, Douglas A., Dagel, Amber L., Doriese, W. Bertrand, Fowler, Joseph W., Gard, Johnathon D., Harris, J. Zachariah, Hilton, Gene C., Imrek, Jozsef, Jimenez, Edward S., Larson, Kurt W., Levine, Zachary H., Mates, John A. B., McArthur, D., Miaja-Avila, Luis, Morgan, Kelsey M., O'Neil, Galen C., Ortiz, Nathan J., Pappas, Christine G., Schmidt, Daniel R., Thompson, Kyle R., Ullom, Joel N., Vale, Leila, Vissers, Michael R., Walker, Christopher, Weber, Joel C., Wessels, Abigail L., Wheeler, Jason W., and Swetz, Daniel S.

Subjects
Physics - Instrumentation and Detectors
Abstract

We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a high spatial resolution scanning electron microscope (SEM) with a highly efficient and pixelated TES spectrometer to reconstruct three-dimensional maps of nanoscale integrated circuits (ICs). A 240-pixel prototype spectrometer was recently used to reconstruct ICs at the 130 nm technology node, but to increase imaging speed to more practical levels, the detector efficiency needs to be improved. For this reason, we are building a spectrometer that will eventually contain 3,000 TES microcalorimeters read out with microwave superconducting quantum interference device (SQUID) multiplexing, and we currently have commissioned a 1,000 TES subarray. This still represents a significant improvement from the 240-pixel system and allows us to begin characterizing the full spectrometer performance. Of the 992 maximimum available readout channels, we have yielded 818 devices, representing the largest number of TES x-ray microcalorimeters simultaneously read out to date. These microcalorimeters have been optimized for pulse speed rather than purely energy resolution, and we measure a FWHM energy resolution of 14 eV at the 8.0 keV Cu K$\alpha$ line., Comment: 5 pages, 4 figures, submitted to IEEE Transactions on Applied Superconductivity

Published
2022
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3. Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

Author

Nakamura, Nathan, Szypryt, Paul, Dagel, Amber L., Alpert, Bradley K., Bennett, Douglas A., Doriese, W. Bertrand, Durkin, Malcolm, Fowler, Joseph W., Fox, Dylan T., Gard, Johnathon D., Goodner, Ryan N., Harris, J. Zachariah, Hilton, Gene C., Jimenez, Edward S., Kernen, Burke L., Larson, Kurt W., Levine, Zachary H., McArthur, Daniel, Morgan, Kelsey M., O'Neil, Galen C., Ortiz, Nathan J., Pappas, Christine G., Reintsema, Carl D., Schmidt, Daniel R., Schultz, Peter A., Thompson, Kyle R., Ullom, Joel N., Vale, Leila, Vaughan, Courtenay T., Walker, Christopher, Weber, Joel C., Wheeler, Jason W., and Swetz, Daniel S.

Subjects
Physics - Instrumentation and Detectors
Abstract

X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but is difficult to implement due to competing requirements on X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while changing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot in a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with high signal-to-noise. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enable nanoscale, element-specific X-ray imaging in a compact footprint. The proof-of-concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in 6 layers of a Cu-SiO2 integrated circuit, and a path towards finer resolution and enhanced imaging capabilities is discussed.

Published
2022

4. Design of a 3000-pixel transition-edge sensor x-ray spectrometer for microcircuit tomography

Author

Szypryt, Paul, Bennett, Douglas A., Boone, William J., Dagel, Amber L., Dalton, Gabriella, Doriese, W. Bertrand, Fowler, Joseph W., Garboczi, Edward J., Gard, Johnathon D., Hilton, Gene C., Imrek, Jozsef, Jimenez, Edward S., Kotsubo, Vincent Y., Larson, Kurt, Levine, Zachary H., Mates, John A. B., McArthur, Daniel, Morgan, Kelsey M., Nakamura, Nathan, O'Neil, Galen C., Ortiz, Nathan J., Pappas, Christine G., Reintsema, Carl D., Schmidt, Daniel R., Swetz, Daniel S., Thompson, Kyle R., Ullom, Joel N., Walker, Christopher, Weber, Joel C., Wessels, Abigail L., and Wheeler, Jason W.

Subjects
Physics - Instrumentation and Detectors
Abstract

Feature sizes in integrated circuits have decreased substantially over time, and it has become increasingly difficult to three-dimensionally image these complex circuits after fabrication. This can be important for process development, defect analysis, and detection of unexpected structures in externally sourced chips, among other applications. Here, we report on a non-destructive, tabletop approach that addresses this imaging problem through x-ray tomography, which we uniquely realize with an instrument that combines a scanning electron microscope (SEM) with a transition-edge sensor (TES) x-ray spectrometer. Our approach uses the highly focused SEM electron beam to generate a small x-ray generation region in a carefully designed target layer that is placed over the sample being tested. With the high collection efficiency and resolving power of a TES spectrometer, we can isolate x-rays generated in the target from background and trace their paths through regions of interest in the sample layers, providing information about the various materials along the x-ray paths through their attenuation functions. We have recently demonstrated our approach using a 240 Mo/Cu bilayer TES prototype instrument on a simplified test sample containing features with sizes of $\sim$1 $\mu$m. Currently, we are designing and building a 3000 Mo/Au bilayer TES spectrometer upgrade, which is expected to improve the imaging speed by factor of up to 60 through a combination of increased detector number and detector speed., Comment: 5 pages, 3 figures, published in IEEE Transactions on Applied Superconductivity

Published
2022
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5. Absolute Energy Measurements with Superconducting Transition-Edge Sensors for Muonic X-ray Spectroscopy at 44 keV

Author

Yan, Daikang, Weber, Joel C., Guruswamy, Tejas, Morgan, Kelsey M., O'Neil, Galen C., Wessels, Abigail L., Bennett, Douglas A., Pappas, Christine G., Mates, John A., Gard, Johnathon D., Becker, Daniel T., Fowler, Joseph W., Swetz, Daniel S., Schmidt, Daniel R., Ullom, Joel N., Okumura, Takuma, Isobe, Tadaaki, Azuma, Toshiyuki, Okada, Shinji, Yamada, Shinya, Hashimoto, Tadashi, Quaranta, Orlando, Miceli, Antonino, Gades, Lisa M., Patel, Umeshkumar M., Paul, Nancy, Bian, Guojie, and Indelicato, Paul

Subjects
Physics - Instrumentation and Detectors
Abstract

Superconducting transition-edge sensor (TES) microcalorimeters have great utility in x-ray applications owing to their high energy resolution, good collecting efficiency and the feasibility of being multiplexed into large arrays. In this work, we develop hard x-ray TESs to measure the absolute energies of muonic-argon ($\mu$-Ar) transition lines around 44 keV and 20 keV. TESs with sidecar absorbers of different heat capacities were fabricated and characterized for their energy resolution and calibration uncertainty. We achieved ~ 1 eV absolute energy measurement accuracy at 44 keV, and < 12 eV energy resolution at 17.5 keV.

Published
2022
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6. Quantification of 242Pu with a Microcalorimeter Gamma Spectrometer

Author

Mercer, David J., Winkler, Ryan, Koehler, Katrina E., Becker, Daniel T., Bennett, Douglas A., Carpenter, Matthew H., Croce, Mark P., de Castro, Krystal I., Feissle, Eric A., Fowler, Joseph W., Gard, Johnathon D., Mates, John A. B., McNeel, Daniel G., Ortiz, Nathan J., Schmidt, Daniel, Schreiber, Katherine A., Swetz, Daniel S., Ullom, Joel N., Vale, Leila R., Weidenbenner, Sophie L., and Wessels, Abigail L.

Subjects
Physics - Instrumentation and Detectors, Nuclear Experiment
Abstract

We report measurements of the 103-keV and 159-keV gamma ray signatures of 242Pu using microcalorimetry. This is the first observation of these gamma rays in a non-destructive measurement of an unprepared sample, and so represents an important advance in nuclear material accountancy. The measurement campaign also serves as the first demonstration of a field campaign with a portable microcalorimeter gamma-ray spectrometer. For the 103-keV gamma ray we report an improved centroid energy and emission probability., Comment: 6 pages, 7 figures

Published
2022

7. New Experimentally Observable Gamma-ray Emissions from 241Am Nuclear Decay

Author

Koehler, Katrina E., Yoho, Michael D., Carpenter, Matthew H., Croce, Mark P., Mercer, David J., Smith, Chandler M., Tollefson, Aidan D., Vo, Duc T., Famiano, Michael A., Nesaraja, Caroline D., Becker, Daniel T., Gard, Johnathon D., Wessels, Abigail L., Bennett, Douglas A., Mates, J. A. B., Ortiz, Nathan J., Schmidt, Daniel R., Ullom, Joel N., and Vale, Leila R.

Subjects
Nuclear Experiment
Abstract

With the high resolution of microcalorimeter detectors, previously unresolvable gamma-ray lines are now clearly resolvable. A careful measurement of Am-241 decay with a large array of gamma-ray microcalorimeters has revealed never before seen or predicted gamma lines at 207.72 +/- 0.02 keV and 208.21 +/- 0.01 keV. These results were made possible by new microwave-multiplexing readout to increase the array size and improved analysis algorithms to eliminate spectral artifacts. We suggest nuclear levels from which these gamma-rays might originate and calculate branching ratios for these transitions from measurements of both mixed Pu-Am standards and a pure Am-241 source. These results have implications for nuclear material safeguards and accounting, particularly for microcalorimeter gamma spectrometers, which are now being adopted in nuclear safeguards analytical laboratories., Comment: 7 pages, 4 figures, 2 tables

Published
2021

8. Improved Plutonium and Americium Photon Branching Ratios from Microcalorimeter Gamma Spectroscopy

Author

Yoho, Michael D., Koehler, Katrina E., Becker, Daniel T., Bennett, Douglas A., Carpenter, Matthew H., Croce, Mark P., Gard, Johnathon D., Mates, J. A. Ben, Mercer, David J., Ortiz, Nathan J., Schmidt, Daniel R., Smith, Chandler M., Swetz, Daniel S., Tollefson, Aidan D., Ullom, Joel N., Vale, Leila R., Wessels, Abigail L., and Vo, Duc T.

Subjects
Nuclear Experiment, Physics - Instrumentation and Detectors
Abstract

Photon branching ratios are critical input data for activities such as nuclear materials protection and accounting because they allow material compositions to be extracted from measurements of gamma-ray intensities. Uncertainties in these branching ratios are often a limiting source of uncertainty in composition determination. Here, we use high statistics, high resolution (~60-70eV full-width-at-half-maximum at 100 keV) gamma-ray spectra acquired using microcalorimeter sensors to substantially reduce the uncertainties for 11 plutonium (238Pu,239Pu,241Pu) and 241Am branching ratios important for material control and accountability and nuclear forensics in the energy range of 125 keV to 208 keV. We show a reduction in uncertainty of over a factor of three for one branching ratio and a factor of 2{3 for four branching ratios., Comment: 25 pages, 6 figures, 7 tables

Published
2020
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9. A Model for Excess Johnson Noise in Superconducting Transition-edge Sensors

Author

Wessels, Abigail, Morgan, Kelsey, Becker, Daniel T., Gard, Johnathon D., Hilton, Gene C., Mates, John A. B., Reintsema, Carl D., Schmidt, Daniel R., Swetz, Daniel S., Ullom, Joel N., Vale, Leila R., and Bennett, Douglas A.

Subjects
Condensed Matter - Superconductivity, Physics - Instrumentation and Detectors
Abstract

Transition-Edge Sensors (TESs) are two-dimensional superconducting films used to detect energy or power. TESs are voltage biased in the resistive transition where the film resistance is both finite and a strong function of temperature. Electrical noise is observed in TESs that exceeds the predictions of existing noise theories. In this manuscript, we describe a model for the unexplained excess noise based on the dynamic resistance of the TES and noise mixed down from frequencies around the Josephson oscillations. We derive an expression for the power spectral density of this noise and show that its predictions match measured data.

Published
2019
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10. L-Edge Spectroscopy of Dilute, Radiation-Sensitive Systems Using a Transition-Edge-Sensor Array

Author

Titus, Charles J., Baker, Michael L., Lee, Sang Jun, Cho, Hsiao-mei, Doriese, William B., Fowler, Joseph W., Gaffney, Kelly, Gard, Johnathon D., Hilton, Gene C., Kenney, Chris, Knight, Jason, Li, Dale, Marks, Ron, Minitti, Michael P., Morgan, Kelsey M., O'Neil, Galen C., Reintsema, Carl D., Schmidt, Daniel R., Sokaras, Dimosthenis, Swetz, Daniel S., Ullom, Joel N., Weng, Tsu-Chien, Williams, Christopher, Young, Betty A., Irwin, Kent D., Solomon, Edward I., and Nordlund, Dennis

Subjects
Physics - Instrumentation and Detectors
Abstract

We present X-ray absorption spectroscopy and resonant inelastic X-ray scattering (RIXS) measurements on the iron L-edge of 0.5 mM aqueous ferricyanide. These measurements demonstrate the ability of high-throughput transition-edge-sensor (TES) spectrometers to access the rich soft X-ray (100-2000eV) spectroscopy regime for dilute and radiation-sensitive samples. Our low-concentration data are in agreement with high-concentration measurements recorded by conventional grating-based spectrometers. These results show that soft X-ray RIXS spectroscopy acquired by high-throughput TES spectrometers can be used to study the local electronic structure of dilute metal-centered complexes relevant to biology, chemistry and catalysis. In particular, TES spectrometers have a unique ability to characterize frozen solutions of radiation- and temperature-sensitive samples., Comment: 19 pages, 4 figures

Published
2017
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11. Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer.

Author

Nakamura, Nathan, Szypryt, Paul, Dagel, Amber L., Alpert, Bradley K., Bennett, Douglas A., Doriese, William Bertrand, Durkin, Malcolm, Fowler, Joseph W., Fox, Dylan T., Gard, Johnathon D., Goodner, Ryan N., Harris, James Zachariah, Hilton, Gene C., Jimenez, Edward S., Kernen, Burke L., Larson, Kurt W., Levine, Zachary H., McArthur, Daniel, Morgan, Kelsey M., and O'Neil, Galen C.

Subjects
THREE-dimensional integrated circuits, X-ray detection, SCANNING electron microscopes, X-ray imaging, SPECTROMETERS, ELECTRON beams, NANOSTRUCTURED materials
Abstract

X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but it is difficult to implement due to the competing requirements of X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while addressing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot on a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with a high signal-to-noise ratio. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enables nanoscale, element-specific X-ray imaging in a compact footprint. The proof of concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in six layers of a Cu-SiO2 integrated circuit, and a path toward finer resolution and enhanced imaging capabilities is discussed. [ABSTRACT FROM AUTHOR]

Published
2024
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12. A Tabletop X-Ray Tomography Instrument for Nanometer-Scale Imaging: Demonstration of the 1,000-Element Transition-Edge Sensor Subarray

Author

Szypryt, Paul, primary, Nakamura, Nathan, additional, Becker, Daniel T., additional, Bennett, Douglas A., additional, Dagel, Amber L., additional, Doriese, W. Bertrand, additional, Fowler, Joseph W., additional, Gard, Johnathon D., additional, Harris, J. Zachariah, additional, Hilton, Gene C., additional, Imrek, Jozsef, additional, Jimenez, Edward S., additional, Larson, Kurt W., additional, Levine, Zachary H., additional, Mates, John A. B., additional, McArthur, D., additional, Miaja-Avila, Luis, additional, Morgan, Kelsey M., additional, O'Neil, Galen C., additional, Ortiz, Nathan J., additional, Pappas, Christine G., additional, Schmidt, Daniel R., additional, Thompson, Kyle R., additional, Ullom, Joel N., additional, Vale, Leila, additional, Vissers, Michael R., additional, Walker, Christopher, additional, Weber, Joel C., additional, Wessels, Abigail L., additional, Wheeler, Jason W., additional, and Swetz, Daniel S., additional

Published
2023
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14. Symmetric time-division-multiplexed SQUID readout with two-layer switches for future TES observatories

Author

Durkin, Malcolm, primary, Backhaus, Scott, additional, Bandler, Simon R., additional, Chervenak, James A., additional, Denison, Ed V., additional, Doriese, William B., additional, Gard, Johnathon D., additional, Hilton, Gene C., additional, Lew, Richard A., additional, Lucas, Tammy J., additional, Reintsema, Carl D., additional, Schmidt, Daniel R., additional, Smith, Stephen J., additional, Ullom, Joel N., additional, Vale, Leila R., additional, Vissers, Michael R., additional, and Wakeham, Nicholas A., additional

Published
2023
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15. Microwave SQUID Multiplexing for the Lynx X-Ray Microcalorimeter

Author

Bennett, Douglas A, Mates, John A. B, Bandler, Simon R, Becker, Daniel T, Fowler, Joseph W, Gard, Johnathon D, Hilton, Gene C, Irwin, Kent D, Morgan, Kelsey M, Reintsema, Carl D, Sakai, Kazuhiro, Schmidt, Daniel R, Smith, Stephen J, Swetz, Daniel S, Ullom, Joel N, Vale, Leila R, and Wessels, Abigail L

Subjects
Instrumentation And Photography
Abstract

The Lynx x-ray microcalorimeter (LXM) is an imaging spectrometer for the Lynx satellite mission, an x-ray telescope being considered by NASA to be a new flagship mission. Lynx will enable unique astrophysical observations into the x-ray universe due to its high angular resolution and large field of view. The LXM consists of an array of over 100,000 pixels and poses a significant technological challenge to achieve the high degree of multiplexing required to read out these sensors. We discuss the details of microwave superconducting quantum interference device (SQUID) multiplexing and describe why it is ideally suited to the needs of the LXM. This case is made by summarizing the current and predicted performance of microwave SQUID multiplexing and describing the steps needed to optimize designs for all the LXM arrays. Finally, we describe our plan to advance the technology readiness level (TRL) of microwave SQUID multiplexing of the LXM microcalorimeters to TRL-5 by 2024.

Published
2019
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16. Absolute Energy Measurements with Superconducting Transition-Edge Sensors for Muonic X-ray Spectroscopy at 44 keV

Author

Yan, Daikang, primary, Weber, Joel C., additional, Guruswamy, Tejas, additional, Morgan, Kelsey M., additional, O’Neil, Galen C., additional, Wessels, Abigail L., additional, Bennett, Douglas A., additional, Pappas, Christine G., additional, Mates, John A., additional, Gard, Johnathon D., additional, Becker, Daniel T., additional, Fowler, Joseph W., additional, Swetz, Daniel S., additional, Schmidt, Daniel R., additional, Ullom, Joel N., additional, Okumura, Takuma, additional, Isobe, Tadaaki, additional, Azuma, Toshiyuki, additional, Okada, Shinji, additional, Yamada, Shinya, additional, Hashimoto, Tadashi, additional, Quaranta, Orlando, additional, Miceli, Antonino, additional, Gades, Lisa M., additional, Patel, Umeshkumar M., additional, Paul, Nancy, additional, Bian, Guojie, additional, and Indelicato, Paul, additional

Published
2022
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17. Broadband kinetic inductance detectors for far-IR observations

Author

Wheeler, Jordan D., primary, Austermann, Jason E., additional, Vissers, Michael R., additional, Beall, James A., additional, Gao, Jiansong, additional, Imrek, Jozsef, additional, Heilweil, Edwin J., additional, Bennett, Douglas, additional, Gard, Johnathon D., additional, Van Lanen, Jeff, additional, Hubmayr, Johannes, additional, and Ullom, Joel, additional

Published
2022
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18. A Tabletop X-Ray Tomography Instrument for Nanometer-Scale Imaging: Integration of a Scanning Electron Microscope with a Transition-Edge Sensor Spectrometer

Author

Nakamura, Nathan, Szypryt, Paul, Dagel, Amber L., Alpert, Bradley K., Bennett, Douglas A., Doriese, W. Bertrand, Durkin, Malcolm, Fowler, Joseph W., Fox, Dylan T., Gard, Johnathon D., Goodner, Ryan N., Harris, J. Zachariah, Hilton, Gene C., Jimenez, Edward S., Kernen, Burke L., Larson, Kurt W., Levine, Zachary H., McArthur, Daniel, Morgan, Kelsey M., O'Neil, Galen C., Ortiz, Nathan J., Pappas, Christine G., Reintsema, Carl D., Schmidt, Daniel R., Schulz, Peter A., Thompson, Kyle R., Ullom, Joel N., Vale, Leila, Vaughan, Courtenay T., Walker, Christopher, Weber, Joel C., Wheeler, Jason W., and Swetz, Daniel S.

Subjects
Physics - Instrumentation and Detectors, FOS: Physical sciences, Instrumentation and Detectors (physics.ins-det)
Abstract

X-ray nanotomography has proven to be a powerful tool for the characterization of nanoscale materials and structures, such as energy storage devices and next-generation integrated circuits (ICs). In a nanotomography measurement the X-ray spot size must be kept at the nanoscale, which significantly limits the total amount of X-ray flux achievable. Due to this photon limit, nanotomography has been generally restricted to synchrotron facilities, where higher flux can be maintained even at nanoscale spot sizes. Here, we present a laboratory-scale nanotomography instrument, deemed TOMCAT (TOMographic Circuit Analysis Tool). TOMCAT combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) spectrometer. The electron beam generates a highly focused X-ray spot in a metal target, while the TES spectrometer isolates target photons with high signal-to-noise. TOMCAT design is discussed, including target optimization, system geometry, and scan procedures. Features which are 160 nm wide are resolved in three-dimensional images on a Cu-SiO$_2$ IC sample, demonstrating the capabilities of laboratory-scale nanotomography based on a focused electron beam and TES spectrometer., Comment: The following article has been submitted to Review of Scientific Instruments

Published
2022
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19. Toward Large FOV High-Resolution X-Ray Imaging Spectrometer: Microwave Multiplexed Readout of 32 TES Microcalorimeters

Author

Yoon, Wonsik, Adams, Joseph S, Bandler, Simon R, Chervenak, James A, Datesman, Aaron M, Eckart, Megan E, Finkbeiner, Fred M, Kelley, Richard L, Kilbourne, Caroline A, Miniussi, Antoine R, Moseley, Samuel H, Porter, Frederick S, Sadleir, John E, Kazuhiro, Sakai, Smith, Stephen J, Stevenson, Thomas R, Wakeham, Nicholas A, Wassell, Edward J, Wollack, Edward J, Noroozian, Omid, Becker, Dan, Bennett, Douglas A, Fowler, Joseph W, Gard, Johnathon D, Hilton, Gene C, Mates, John A. B, Reintsema, Carl D, Swetz, Daniel S, Ullom, Joel N, and Vale, Leila R

Subjects
Instrumentation And Photography, Communications And Radar
Abstract

We performed a small-scale demonstration at GSFC of high-resolution x-ray TES microcalorimeters read out using a microwave SQUID multiplexer. This work is part of our effort to develop detector and readout technologies for future space based x-ray instruments such as the microcalorimeter spectrometer envisaged for Lynx, a large mission concept under development for the Astro 2020 Decadal Survey. In this paper we describe our experiment, including details of a recently designed, microwave-optimized low-temperature setup that is thermally anchored to the 50 mK stage of our laboratory ADR. Using a ROACH2 FPGA at room temperature, we simultaneously read out 32 pixels of a GSFC-built detector array via a NIST-built multiplexer chip with Nb coplanar waveguide resonators coupled to RF SQUIDs. The resonators are spaced 6 MHz apart (at approx. 5.9 GHz) and have quality factors of approximately 15,000. Using flux-ramp modulation frequencies of 160 kHz we have achieved spectral resolutions of 3 eV FWHM on each pixel at 6 keV. We will present the measured system-level noise and maximum slew rates, and briefly describe the implications for future detector and readout design.

Published
2017

20. Development of X-Ray Microcalorimeter Imaging Spectrometers for the X-Ray Surveyor Mission Concept

Author

Bandler, Simon R, Adams, Joseph S, Chervenak, James A, Datesman, Aaron M, Eckart, Megan E, Finkbeiner, Fred M, Kelley, Richard L, Kilbourne, Caroline A, Betncourt-Martinez, Gabriele, Miniussi, Antoine R, Porter, Frederick S, Sadleir, John E, Sakai, Kazuhiro, Smith, Stephen J, Stevenson, Thomas R, Wakeham, Nicholas A, Wassell, Edward J, Yoon, Wonsik, Becker, Dan, Bennett, Douglas, Doriese, William B, Fowler, Joseph W, Gard, Johnathon D, Hilton, Gene C, Mates, Benjamin, Morgan, Kelsey M, Reintsema, Carl D, Swetz, Daniel, Ullom, Joel N, Chaudhuri, Saptarshi, Irwin, Kent D, Lee, Sang-Jun, and Vikhlinin, Alexey

Subjects
Astrophysics
Abstract

Four astrophysics missions are currently being studied by NASA as candidate large missions to be chosen inthe 2020 astrophysics decadal survey.1 One of these missions is the X-Ray Surveyor (XRS), and possibleconfigurations of this mission are currently under study by a science and technology definition team (STDT). Oneof the key instruments under study is an X-ray microcalorimeter, and the requirements for such an instrument arecurrently under discussion. In this paper we review some different detector options that exist for this instrument,and discuss what array formats might be possible. We have developed one design option that utilizes eithertransition-edge sensor (TES) or magnetically coupled calorimeters (MCC) in pixel array-sizes approaching 100kilo-pixels. To reduce the number of sensors read out to a plausible scale, we have assumed detector geometriesin which a thermal sensor such a TES or MCC can read out a sub-array of 20-25 individual 1 pixels. In thispaper we describe the development status of these detectors, and also discuss the different options that exist forreading out the very large number of pixels.

Published
2016
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21. Dynamical Response of Transition-Edge Sensor Microcalorimeters to a Pulsed Charged-Particle Beam

Author

Okumura, Takuma, primary, Azuma, Toshiyuki, additional, Bennett, Douglas A., additional, Caradonna, Pietro, additional, Chiu, I-Huan, additional, Doriese, W. Bertrand, additional, Durkin, Malcolm S., additional, Fowler, Joseph W., additional, Gard, Johnathon D., additional, Hashimoto, Tadashi, additional, Hayakawa, Ryota, additional, Hilton, Gene C., additional, Ichinohe, Yuto, additional, Indelicato, Paul, additional, Isobe, Tadaaki, additional, Kanda, Sohtaro, additional, Katsuragawa, Miho, additional, Kawamura, Naritoshi, additional, Kino, Yasushi, additional, Mine, Kairi, additional, Miyake, Yasuhiro, additional, Morgan, Kelsey M., additional, Ninomiya, Kazuhiko, additional, Noda, Hirofumi, additional, O'Neil, Galen C., additional, Okada, Shinji, additional, Okutsu, Kenichi, additional, Osawa, Takahito, additional, Paul, Nancy, additional, Reintsema, Carl D., additional, Schmidt, Dan R., additional, Shimomura, Koichiro, additional, Strasser, Patrick, additional, Suda, Hirotaka, additional, Swetz, Daniel S., additional, Takahashi, Tadayuki, additional, Takeda, Shinichiro, additional, Takeshita, Soshi, additional, Tatsuno, Hideyuki, additional, Ueno, Yasuhiro, additional, Ullom, Joel N., additional, Watanabe, Shin, additional, and Yamada, Shinya, additional

Published
2021
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22. Hyperspectral X-Ray Imaging: Progress Towards Chemical Analysis in the SEM

Author

Carpenter, Matthew H., primary, Stein, Benjamin, additional, Koehler, Katrina E., additional, Fontes, Christopher J., additional, Smith, Chandler M., additional, Wagner, Gregory L., additional, Baker, Zachary K., additional, Handley, Matthew L., additional, Rabin, Michael W., additional, Yang, Ping, additional, Batista, Enrique R., additional, McNeel, Daniel G., additional, Schreiber, Katherine A., additional, Bowes, Eric G., additional, Ullom, Joel N., additional, O'Neil, Galen C., additional, Reintsema, Carl D., additional, Bennett, Douglas A., additional, Hilton, Gene C., additional, Swetz, Daniel S., additional, Schmidt, Daniel R., additional, Mates, John A. B., additional, Becker, Daniel T., additional, Weber, Joel C., additional, Gard, Johnathon D., additional, Morgan, Kelsey M., additional, Imrek, Jozsef, additional, Yan, Daikang, additional, Wessels, Abigail L., additional, and Croce, Mark, additional

Published
2021
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23. Design of a 3000-Pixel Transition-Edge Sensor X-Ray Spectrometer for Microcircuit Tomography

Author

Szypryt, Paul, primary, Bennett, Douglas A., additional, Boone, William J., additional, Dagel, Amber L., additional, Dalton, Gabriella, additional, Doriese, W. Bertrand, additional, Durkin, M., additional, Fowler, Joseph W., additional, Garboczi, Edward J., additional, Gard, Johnathon D., additional, Hilton, Gene C., additional, Imrek, Jozsef, additional, Jimenez, Edward S., additional, Kotsubo, Vincent Y., additional, Larson, Kurt, additional, Levine, Zachary H., additional, Mates, John A. B., additional, McArthur, Daniel, additional, Morgan, Kelsey M., additional, Nakamura, Nathan, additional, O'Neil, Galen C., additional, Ortiz, Nathan J., additional, Pappas, Christine G., additional, Reintsema, Carl D., additional, Schmidt, Daniel R., additional, Swetz, Daniel S., additional, Thompson, Kyle R., additional, Ullom, Joel N., additional, Walker, Christopher, additional, Weber, Joel C., additional, Wessels, Abigail L., additional, and Wheeler, Jason W., additional

Published
2021
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24. Mitigation of Finite Bandwidth Effects in Time-Division-Multiplexed SQUID Readout of TES Arrays

Author

Durkin, Malcolm, primary, Adams, Joseph S., additional, Bandler, Simon R., additional, Chervenak, James A., additional, Denison, Edward V., additional, Doriese, William B., additional, Duff, Shannon M., additional, Finkbeiner, Fred M., additional, Fowler, Joseph W., additional, Gard, Johnathon D., additional, Hilton, Gene C., additional, Hummatov, Ruslan, additional, Irwin, Kent D., additional, Joe, Young Il, additional, Kelley, Richard L., additional, Kilbourne, Caroline A., additional, Miniussi, Antoine R., additional, Morgan, Kelsey M., additional, O'Neil, Galen C., additional, Pappas, Christine G., additional, Porter, Frederick S., additional, Reintsema, Carl D., additional, Rudman, David A., additional, Sakai, Kazuhiro, additional, Smith, Stephen J., additional, Stevens, Robert W., additional, Swetz, Daniel S., additional, Szypryt, Paul, additional, Ullom, Joel N., additional, Vale, Leila R., additional, and Wakeham, Nicholas, additional

Published
2021
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25. NIST microcalorimeter arrays for the hard x-ray and γ-ray astronomy

Author

Hossen, Md. Arman, primary, Becker, Daniel T., additional, Bennett, Douglas, additional, Dober, Bradley J., additional, Fowler, James, additional, Gard, Johnathon D., additional, Gau, Ephraim, additional, Hays-Wehle, James P., additional, Hilton, Gene C., additional, Kislat, Fabian, additional, Krawczynski, Henric, additional, Mates, John A. B., additional, Nagy, Johanna M., additional, Reintsema, Carl D., additional, Schmidt, Daniel R., additional, Swetz, Daniel S., additional, Ullom, Joel N., additional, Vale, Leila R., additional, and Okajima, Takashi, additional

Published
2021
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26. A model for excess Johnson noise in superconducting transition-edge sensors

Author

Wessels, Abigail, primary, Morgan, Kelsey, additional, Gard, Johnathon D., additional, Hilton, Gene C., additional, Mates, John A. B., additional, Reintsema, Carl D., additional, Schmidt, Daniel R., additional, Swetz, Daniel S., additional, Ullom, Joel N., additional, Vale, Leila R., additional, and Bennett, Douglas A., additional

Published
2021
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27. Advances in Analysis of Microcalorimeter Gamma-Ray Spectra

Author

Becker, Daniel T., primary, Alpert, Bradley K., additional, Bennett, Douglas A., additional, Croce, Mark P., additional, Fowler, Joseph W., additional, Gard, Johnathon D., additional, Hoover, Andrew S., additional, Joe, Young Il, additional, Koehler, Katrina E., additional, Mates, John A. B., additional, O'Neil, Galen C., additional, Rabin, Michael W., additional, Reintsema, Carl D., additional, Schmidt, Daniel R., additional, Swetz, Daniel S., additional, Szypryt, Paul, additional, Vale, Leila R., additional, Wessels, Abigail L., additional, and Ullom, Joel N., additional

Published
2019
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28. Soft X-ray spectroscopy with transition-edge sensors at Stanford Synchrotron Radiation Lightsource beamline 10-1

Author

Lee, Sang-Jun, primary, Titus, Charles J., additional, Alonso Mori, Roberto, additional, Baker, Michael L., additional, Bennett, Douglas A., additional, Cho, Hsiao-Mei, additional, Doriese, William B., additional, Fowler, Joseph W., additional, Gaffney, Kelly J., additional, Gallo, Alessandro, additional, Gard, Johnathon D., additional, Hilton, Gene C., additional, Jang, Hoyoung, additional, Joe, Young Il, additional, Kenney, Christopher J., additional, Knight, Jason, additional, Kroll, Thomas, additional, Lee, Jun-Sik, additional, Li, Dale, additional, Lu, Donghui, additional, Marks, Ronald, additional, Minitti, Michael P., additional, Morgan, Kelsey M., additional, Ogasawara, Hirohito, additional, O’Neil, Galen C., additional, Reintsema, Carl D., additional, Schmidt, Daniel R., additional, Sokaras, Dimosthenis, additional, Ullom, Joel N., additional, Weng, Tsu-Chien, additional, Williams, Christopher, additional, Young, Betty A., additional, Swetz, Daniel S., additional, Irwin, Kent D., additional, and Nordlund, Dennis, additional

Published
2019
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29. Optimization of Time- and Code-Division-Multiplexed Readout for Athena X-IFU

Author

Doriese, W. Bertrand, primary, Bandler, Simon R., additional, Chaudhuri, Saptarshi, additional, Dawson, Carl S., additional, Denison, Edward V., additional, Duff, Shannon M., additional, Durkin, Malcolm, additional, FitzGerald, Connor T., additional, Fowler, Joseph W., additional, Gard, Johnathon D., additional, Hilton, Gene C., additional, Irwin, Kent D., additional, Joe, Young Il, additional, Morgan, Kelsey M., additional, O'Neil, Galen C., additional, Pappas, Christine G., additional, Reintsema, Carl D., additional, Rudman, David A., additional, Smith, Stephen James, additional, Stevens, Robert W., additional, Swetz, Daniel S., additional, Szypryt, Paul, additional, Ullom, Joel N., additional, Vale, Leila R., additional, Weber, Joel C., additional, and Young, Betty A., additional

Published
2019
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30. Demonstration of Athena X-IFU Compatible 40-Row Time-Division-Multiplexed Readout

Author

Durkin, Malcolm, primary, Adams, Joseph S., additional, Bandler, Simon R., additional, Chervenak, James A., additional, Chaudhuri, Saptarshi, additional, Dawson, Carl S., additional, Denison, Edward V., additional, Doriese, William B., additional, Duff, Shannon M., additional, Finkbeiner, Fred M., additional, FitzGerald, Connor T., additional, Fowler, Joseph W., additional, Gard, Johnathon D., additional, Hilton, Gene C., additional, Irwin, Kent D., additional, Joe, Young Il, additional, Kelley, Richard L., additional, Kilbourne, Caroline A., additional, Miniussi, Antoine R., additional, Morgan, Kelsey M., additional, O'Neil, Galen C., additional, Pappas, Christine G., additional, Porter, Frederick S., additional, Reintsema, Carl D., additional, Rudman, David A., additional, Sakai, Kazuhiro, additional, Smith, Stephen J., additional, Stevens, Robert W., additional, Swetz, Daniel S., additional, Szypryt, Paul, additional, Ullom, Joel N., additional, Vale, Leila R., additional, Wakeham, Nicholas A., additional, Weber, Joel C., additional, and Young, Betty A., additional

Published
2019
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31. Use of Transition Models to Design High Performance TESs for the LCLS-II Soft X-Ray Spectrometer

Author

Morgan, Kelsey M., primary, Becker, Dan T., additional, Bennett, Douglas Alan, additional, Doriese, William B., additional, Gard, Johnathon D., additional, Irwin, Kent D., additional, Lee, Sang Jun, additional, Li, Dale, additional, Mates, John A. B., additional, Pappas, Christine G., additional, Schmidt, Dan R., additional, Titus, Charles J., additional, Van Winkle, Dan D., additional, Ullom, Joel N., additional, Wessels, Abigail, additional, and Swetz, Daniel S., additional

Published
2019
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32. High-Throughput, DC-Parametric Evaluation of Flux-Activated-Switch-Based TDM and CDM SQUID Multiplexers

Author

Reintsema, Carl D., primary, Bennett, Doug A., additional, Denison, Edward V., additional, Durkin, Malcolm, additional, Doriese, Willaim B., additional, Fowler, Joseph W., additional, Gard, Johnathon D., additional, Grigorian, Arpi, additional, Hilton, Gene C., additional, Hubmayr, Johannes, additional, O'Neil, Galen C., additional, Mates, John A. B., additional, Morgan, Kelsey M., additional, Schmidt, Dan R., additional, Stevens, Robert W., additional, Swetz, Daniel S., additional, Vale, Leila R., additional, Ullom, Joel N., additional, Irwin, Kent D., additional, Chaudhuri, Saptarshi, additional, Titus, Charles J., additional, and Dawson, Carl S., additional

Published
2019
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33. Readout demonstration of 512 TES bolometers using a single microwave SQUID multiplexer (Conference Presentation)

Author

Dober, Bradley, primary, Ahmed, Zeeshan, additional, Austermann, Jason E., additional, Becker, Daniel, additional, Bennett, Douglas A., additional, Brown, David, additional, Chaudhuri, Saptarshi, additional, Cho, Hsiao-Mei Sherry, additional, D'Ewart, John M., additional, Duff, Shannon M., additional, Dusatko, John E., additional, Fatigoni, Sofia, additional, Frisch, Josef C., additional, Gard, Johnathon D., additional, Halpern, Mark, additional, Henderson, Shawn W., additional, Hilton, Gene C., additional, Hubmayr, Johannes, additional, Irwin, Kent D., additional, Karpel, Ethan D., additional, Kernasovskiy, Sarah S., additional, Mates, John A. B., additional, Reintsema, Carl D., additional, Vissers, Michael, additional, Vale, Leila R., additional, Ullom, Joel, additional, Kuenstner, Stephen E., additional, Kuo, Chao-Lin, additional, Li, Dale, additional, Smith, Stephen R., additional, Van Winkle, Daniel D., additional, Young, Betty A., additional, and Yu, Cyndia, additional

Published
2018
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34. L-edge spectroscopy of dilute, radiation-sensitive systems using a transition-edge-sensor array

Author

Titus, Charles J., primary, Baker, Michael L., additional, Lee, Sang Jun, additional, Cho, Hsiao-Mei, additional, Doriese, William B., additional, Fowler, Joseph W., additional, Gaffney, Kelly, additional, Gard, Johnathon D., additional, Hilton, Gene C., additional, Kenney, Chris, additional, Knight, Jason, additional, Li, Dale, additional, Marks, Ronald, additional, Minitti, Michael P., additional, Morgan, Kelsey M., additional, O’Neil, Galen C., additional, Reintsema, Carl D., additional, Schmidt, Daniel R., additional, Sokaras, Dimosthenis, additional, Swetz, Daniel S., additional, Ullom, Joel N., additional, Weng, Tsu-Chien, additional, Williams, Christopher, additional, Young, Betty A., additional, Irwin, Kent D., additional, Solomon, Edward I., additional, and Nordlund, Dennis, additional

Published
2017
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35. Eliminating the non-Gaussian spectral response of X-ray absorbers for transition-edge sensors

Author

Divan, Ralu, primary, Gades, Lisa M., additional, Kenesei, Peter, additional, Madden, Timothy J., additional, Miceli, Antonino, additional, Park, Jun-Sang, additional, Patel, Umeshkumar M., additional, Quaranta, Orlando, additional, Sharma, Hemant, additional, Bennett, Douglas A., additional, Doriese, William B., additional, Fowler, Joseph W., additional, Gard, Johnathon D., additional, Hays-Wehle, James P., additional, Morgan, Kelsey M., additional, Schmidt, Daniel R., additional, Swetz, Daniel S., additional, and Ullom, Joel N., additional

Published
2017
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36. Development of ROACH Firmware for Microwave Multiplexed X-Ray TES Microcalorimeters

Author

Madden, Timothy J., primary, Cecil, Thomas W., additional, Gades, Lisa M., additional, Quaranta, Orlando, additional, Yan, Daikang, additional, Miceli, Antonino, additional, Becker, Dan T., additional, Bennett, Doug A., additional, Hays-Wehle, James P., additional, Hilton, Gene C., additional, Gard, Johnathon D., additional, Mates, John A. B., additional, Reintsema, Carl D., additional, Schmidt, Dan R., additional, Swetz, Daniel S., additional, Vale, Leila R., additional, and Ullom, Joel N., additional

Published
2017
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37. Eliminating the non-Gaussian spectral response of X-ray absorbers for transition-edge sensors.

Author

Daikang Yan, Divan, Ralu, Gades, Lisa M., Kenesei, Peter, Madden, Timothy J., Miceli, Antonino, Jun-Sang Park, Patel, Umeshkumar M., Quaranta, Orlando, Sharma, Hemant, Bennett, Douglas A., Doriese, William B., Fowler, Joseph W., Gard, Johnathon D., Hays-Wehle, James P., Morgan, Kelsey M., Schmidt, Daniel R., Swetz, Daniel S., and Ullom, Joel N.

Subjects
CALORIMETERS, X-ray spectroscopy, TUNED mass dampers, HEAT capacity, BISMUTH
Abstract

Transition-edge sensors (TESs) as microcalorimeters for high-energy-resolution X-ray spectroscopy are often fabricated with an absorber made of materials with high Z (for X-ray stopping power) and low heat capacity (for high resolving power). Bismuth represents one of the most compelling options. TESs with evaporated bismuth absorbers have shown spectra with undesirable and unexplained low-energy tails. We have developed TESs with electroplated bismuth absorbers over a gold layer that are not afflicted by this problem and that retain the other positive aspects of this material. To better understand these phenomena, we have studied a series of TESs with gold, gold/ evaporated bismuth, and gold/electroplated bismuth absorbers, fabricated on the same die with identical thermal coupling. We show that the bismuth morphology is linked to the spectral response of X-ray TES microcalorimeters. [ABSTRACT FROM AUTHOR]

Published
2017
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