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After the technologies of measurement for thin-film thickness were analyzed, the method of real-time measurement for coating thickness based on quartz crystal oscillation was proposed. The principle of the thickness measured by frequency shifting was analyzed on theory, the functional relationship between the resonant frequency shifting and the film thickness changing was deduced. Aim at the complicated working condition in coating machine, the structure of the measuring system for reducing the influence from external pressure and temperature was designed. The circuit for detecting the frequency shift was designed. Final, according to the experiment result, the resolution of thickness measurement can achieve sub-micrometer level.

Based on the studying of IEEE145 international standard and achievement of hardware and software of TEDS intelligent sensor, it suggested designing an intelligent unit that wont change the input / output interface of the sensor but enables device plug-and-play. The system still can operate normally when the intelligent unit was removed. The intelligent unit includes various modules or functions, such as the logo of IEEE1415 standard device, humiture measurement, nonlinear data table, unified model as well as MCU achievement, normalized treatment and synthesis of signals, aiming to realize the normalization of sensors output signals and achieve the quick connection of test system as well as plug-and-play.

The self-cleaning technology for solar cell array can promote efficiency of electricity produced and protect the solar cell. In this paper, a method of dusts-removal based on travelling-wave dielectrophoretic force was proposed. The theory of travelling-wave dielectrophoresis and the adhesion model between the dusts and the surface of the solar cell array were analyzed. According to the theory and the fabricating process of the film, the structure of the self-cleaning film for large solar cell array was designed.

The cantilever with a high-aspect-ratio and long probe is a key sub-system of the atomic force microscopes (AFMs) used to measure the surface aspect of the mechanical and optical devices. In this paper, a novel cantilever with a 50μm-length-probe and self-sensing piezoresistor was designed; and based on the micro fabrication technology, the processes were planned. The dynamic and static characteristics of the cantilever were analyzed on theory and finite element method (FEM). The results show that the length of the probe has no effect on the cantilever’s dynamic and static performance.

An Atomic Force Microscope(AFM) system with high-speed and large-area was constructed to measure the micro-structure surface of an optical grating.The effects of scanning speed on measuring results under different scanning modes were researched.First,the spectra of the micro-probe under constant-height and constant-force modes were measured,respectively,and the effective bandwidths of the probe were obtained under the two modes.Then,based on the constant-height and constant-force modes,the effects of scanning speed on measuring results were analyzed via measuring a line and a circle on the surface of the optical grating at different scanning speeds.By employing this AFM system,the 3-dimensional profile of the large-area micro-structure surface on the optical grating was measured at a distortionless scanning-speed in a constant-height mode.The results show that it takes only 40 s to measure a circle area with a diameter of 4.0 mm on the grating surface.When the scanning speed is no more than the speed that is corresponding to the effective bandwidth of the micro-probe,the AFM system can achieve the high-speed,large-area and distortionless measurement for micro-structure surfaces.

In order to overcome the traditional shortcomings of the contact-type fatigue detection for locomotive drivers, this paper presents a system that detects face in images collected by the CCD,then establishes the eye's position in the region of the detected face, to determine the degree of the driver's fatigue through the analysis of the state of the human eye. In this paper, AdaBoost method based on Haar features is applied to detect the face, on the basis of which, through the four templates matching method, to ultimately identify the position and status of the human eyes. Experiments show that, AdaBoost algorithm combined with the template matching method can be carried out with high detection accuracy and high speed, meanwhile, has good robustness for the changes of environmental conditions, and can meet the requirements of real time and accuracy in the fatigue detection.