1. XRD and EXAFS studies of crystallisation in films
- Author
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Nasser Afify, G. Dalba, F Rocca, Cristina Armellini, Y. Jestin, and U. Mahendra Kumar Koppolu
- Subjects
Materials science ,Extended X-ray absorption fine structure ,Mechanical Engineering ,Nucleation ,Analytical chemistry ,Thermal treatment ,Condensed Matter Physics ,Microstructure ,Tetragonal crystal system ,Crystallography ,Mechanics of Materials ,X-ray crystallography ,General Materials Science ,Crystallite ,Monoclinic crystal system - Abstract
This paper reports a detailed structural study on the nucleation of t- HfO 2 nanocrystals in thin films of 70 SiO 2 – 30 HfO 2 prepared by sol–gel route on v- SiO 2 substrates. Thermal treatment was performed at different temperatures ranging from 900 to 1200 °C for short (30 min) or long (24 h) time periods. Crystallisation and microstructure evolutions were traced by X-ray diffraction (XRD). The local structure around hafnium ions was determined from Hf L 3 -edge extended X-ray absorption fine structure (EXAFS) measurements carried out at the BM08-GILDA Beamline of ESRF (France). XRD shows the nucleation of HfO 2 nanocrystals in the tetragonal phase after heat treatment at 1000 °C for 30 min, and a partial phase transformation to the monoclinic phase (m- HfO 2 ) starts after heat treatment at 1200 °C for 30 min. The lattice parameters as well as the average crystallites size and their distributions were determined as a function of the heat treatment. EXAFS results are in agreement with the XRD ones, with hafnium ions in the film heat treated at 1100 °C for 24 h are present in mixed phases.
- Published
- 2006
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