1. End-to-End Integration of a Multi-die Glass Interposer for System Scaling Applications
- Author
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Benjamin V. Fasano, Richard F. Indyk, Brittany Hedrick, Franklin M. Baez, Jorge Lubguban, Michael S. Cranmer, Shidong Li, Luc Guerin, Sarah H. Knickerbocker, David J. Lewison, Marc Phaneuf Luc Ouellet, Ian D. Melville, Koushik Ramachandran, Charles L. Arvin, Maryse Cournoyer, Daniel Berger, Christopher L. Tessler, John J. Garant, Matthew Angyal, Jean Audet, Vijay Sukumaran, and Subramanian S. Iyer
- Subjects
0301 basic medicine ,030219 obstetrics & reproductive medicine ,Materials science ,Through-silicon via ,Silicon ,Copper interconnect ,chemistry.chemical_element ,Chip ,Die (integrated circuit) ,03 medical and health sciences ,030104 developmental biology ,0302 clinical medicine ,chemistry ,visual_art ,visual_art.visual_art_medium ,Interposer ,Wafer ,Ceramic ,Composite material - Abstract
The processes key to enabling 3D manufacturing, namely, bond, backgrind, and through silicon via (TSV) reveal, are extended for 300 mm glass substrates to fabricate a heterogeneous, multi-die, 2.5D glass interposer. Based on an existing silicon interposer offering, the glass interposer is comprised of multi-level "device" side copper wiring, with line space (L/S) of = 2.5 µm, built using damascene techniques, a 55 µm glass core with through glass vias (TGVs), and multiple UBM levels finished with tin silver (SnAg) C4 bumps. The 300mm TGV wafers are processed on existing silicon wafer manufacturing equipment following established, integrated silicon process flows. Once fully processed, the glass wafers are diced, and the interposer joined to a ceramic carrier by mass reflow. Sub-assemblies are then underfilled, the top die attached, and lidding completed. The final assemblies are tested to evaluate performance of chip to chip interconnects, chip-to-package (through interposer) interconnects, and chip-to-PCB (through interposer and package) interconnects. Results of loss vs frequency measurements are compared, for the glass interposer against the existing silicon interposer results.
- Published
- 2016
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