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We have recently shown that normal-metal/superconductor (N/S) bilayer TESs (superconducting Transition-Edge Sensors) exhibit weak-link behavior.1 Here we extend our understanding to include TESs with added noise-mitigating normal-metal structures (N structures). We find TESs with added Au structures also exhibit weak-link behavior as evidenced by exponential temperature dependence of the critical current and Josephson-like oscillations of the critical current with applied magnetic field. We explain our results in terms of an effect converse to the longitudinal proximity effect (LoPE)1, the lateral inverse proximity effect (LaiPE), for which the order parameter in the N/S bilayer is reduced due to the neighboring N structures. Resistance and critical current measurements are presented as a function of temperature and magnetic field taken on square Mo/Au bilayer TESs with lengths ranging from 8 to 130 {\mu}m with and without added N structures. We observe the inverse proximity effect on the bilayer over in-plane distances many tens of microns and find the transition shifts to lower temperatures scale approximately as the inverse square of the in- plane N-structure separation distance, without appreciable broadening of the transition width. We also present evidence for nonequilbrium superconductivity and estimate a quasiparticle lifetime of 1.8 \times 10-10 s for the bilayer. The LoPE model is also used to explain the increased conductivity at temperatures above the bilayer's steep resistive transition., Comment: 10 pages, 8 figures

We are developing arrays of position-sensitive microcalorimeters for future x-ray astronomy applications. These position-sensitive devices commonly referred to as hydras consist of multiple x-ray absorbers, each with a different thermal coupling to a single-transition-edge sensor microcalorimeter. Their development is motivated by a desire to achieve very large pixel arrays with some modest compromise in performance. We report on the design, optimization, and first results from devices with small pitch pixels (<75 μm) being developed for a high-angular and energy resolution imaging spectrometer for Lynx. The Lynx x-ray space telescope is a flagship mission concept under study for the National Academy of Science 2020 decadal survey. Broadband full-width-half-maximum (FWHM) resolution measurements on a 9-pixel hydra have demonstrated ΔE(FWHM) = 2.23 ± 0.14 eV at Al-Kα, ΔE(FWHM) = 2.44 ± 0.29 eV at Mn-Kα, and ΔE(FWHM) = 3.39 ± 0.23 eV at Cu-Kα. Position discrimination is demonstrated to energies below <1 keV and the device performance is well-described by a finite-element model. Results from a prototype 20-pixel hydra with absorbers on a 50-μm pitch have shown ΔE(FWHM) = 3.38 ± 0.20 eV at Cr-Kα1. We are now optimizing designs specifically for Lynx and extending the number of absorbers up to 25/hydra. Numerical simulation suggests optimized designs could achieve ∼3 eV while being compatible with the bandwidth requirements of the state-of-the art multiplexed readout schemes, thus making a 100,000 pixel microcalorimeter instrument a realistic goal.

Lynx is a proposed NASA X-Ray telescope flight mission aimed at achieving state-of-the-art angular and energy resolution with a 100 kilopixel array to probe the hot energetic young universe in unprecedented detail. To achieve these goals, our team plans on leveraging our current work in development of the focal plane for the Athena X-Ray Integral Field Unit (X-IFU) while advancing the state-of-the-art in transition edge sensor (TES) X-ray detector technology. The TES is an optimal technology for achieving both high energy and fine angular resolution at the same time because pixel features can be made extremely small and the absorber which dominates the heat capacity can be tuned to meet resolution requirements. Specifically, the proposed mission concept calls for a hybrid detector of three different arrays fabricated in the same planar process in one focal plane and optimized for different science goals. The main arrays consist of 5x5 hydras, 25 pixels of 4 micron thick Au absorbers each with a different thermal link to one common TES. The outer array has absorbers on a 50-micron pitch for most of the 5 arc-minute field-of-view, and the inner array has 25-micron absorbers for the central 1 arc-minute region. A high resolution array consisting of single pixel 1 micron thick Au absorbers on 50-micron pitch will lie off to the side. Reading out an array of this magnitude will likely require improvements in indium bump bonding to superconducting flexible wiring. Fabrication of absorbers of two different sizes requires electroplating through a photoresist mold by careful tuning of the current density to achieve uniform flat absorbers on a fine pitch scale, followed by ion milling to yield narrow streets separating the pixels while preserving high quantum efficiency. We report on progress made at fabricating the hybrid array with different absorber sizes and thicknesses. Further, we also report on ongoing work to adequately heat sink the pixels with backside wire bonding and copper coating. We also report on work to improve detector pixel yield and top side indium bump bonding to flexible wiring.

Lynx, one of the four mission concepts under consideration for the next Astrophysics DecadalReview, will include a microcalorimeter array consisting of more than 100,000 pixels in a compact arrangement with absorber pitch as small as 25 microns. In order to realize the desired array scale, fine-pitch multi-level superconducting wiring with high yield, compatible with rapid expansion of our hydra absorber designs, is essential. We have demonstrated a method of integrating transition edge sensor (TES) microcalorimeters with suitable multilevel buried wiring, fabricated at MIT Lincoln Laboratory using advanced tools dedicated to superconducting circuit fabrication. The TES Mo/Au bilayer is deposited on a high-quality oxide surface created by chemical-mechanical polishing, allowing tight specifications on the TES superconducting transition and link conductivity to be achieved even though the process order has been inverted. The TESs contact the top-level niobium wiring through vias etched through silicon dioxide down to the topmost wiring layer. The article discusses the overall fabrication process, as wellas the behavior of sensors with different via designs, proximity structures, and lateral sizes. An initial iteration of the integrated fabrication process indicates that microcalorimeters fabricated in this way should meet mission specifications using a Mo/Au bilayer with a reasonable critical temperature below 100 mK.

We have developed transition-edge sensor (TES) microcalorimeter arrays with high count-rate capability and high energy resolution to carry out x-ray imaging spectroscopy observations of various astronomical sources and the Sun. We have studied the dependence of the energy resolution and throughput (fraction of processed pulses) on the count rate for such microcalorimeters with two different transition temperatures T(sub c). Devices with both transition temperatures were fabricated within a single microcalorimeter array directly on top of a solid substrate where the thermal conductance of the microcalorimeter is dependent upon the thermal boundary resistance between the TES sensor and the dielectric substrate beneath. Because the thermal boundary resistance is highly temperature dependent, the two types of device with different T(sub c)(sup s) had very different thermal decay times, approximately one order of magnitude different. In our earlier report, we achieved energy resolutions of 1.6 and 2.eV at 6 keV from lower and higher T(sub c) devices, respectively, using a standard analysis method based on optimal filtering in the low flux limit. We have now measured the same devices at elevated x-ray fluxes ranging from 50 Hz to 1000 Hz per pixel. In the high flux limit, however, the standard optimal filtering scheme nearly breaks down because of x-ray pile-up. To achieve the highest possible energy resolution for a fixed throughput, we have developed an analysis scheme based on the socalled event grade method. Using the new analysis scheme, we achieved 5.0 eV FWHM with 96 Percent throughput for 6 keV x-rays of 1025 Hz per pixel with the higher T(sub c) (faster) device, and 5.8 eV FWHM with 97 Percent throughput with the lower T(sub c) (slower) device at 722 Hz.

Multi-pixel transition-edge sensors (TESs), commonly referred to as 'hydras', are a type of position sensitive micro-calorimeter that enables very large format arrays to be designed without commensurate increase in the number of readout channels and associated wiring. In the hydra design, a single TES is coupled to discrete absorbers via varied thermal links. The links act as low pass thermal filters that are tuned to give a different characteristic pulse shape for x-ray photons absorbed in each of the hydra sub pixels. In this contribution we report on the experimental results from hydras consisting of up to 20 pixels per TES. We discuss the design trade-offs between energy resolution, position discrimination and number of pixels and investigate future design optimizations specifically targeted at meeting the readout technology considered for Lynx.

The performance of Transition-Edge Sensors (TES) and their SQUID multiplexed read-outs are very sensitive to the ambient magnetic field from Earth and fluctuations that can arise due to fluctuating magnetic fields outside of the focal plane assembly from the Adiabatic Demagnetization Refrigerator (ADR).Thus, the experimental platform we are building to test the FPA of the X-ray Integral Field Unit (X-IFU) of the Athena mission needs to include a series of shields and a coil in order to meet the following requirement of magnetic field density and uniformity.

We performed a small-scale demonstration at GSFC of high-resolution x-ray TES microcalorimeters read out using a microwave SQUID multiplexer. This work is part of our effort to develop detector and readout technologies for future space based x-ray instruments such as the microcalorimeter spectrometer envisaged for Lynx, a large mission concept under development for the Astro 2020 Decadal Survey. In this paper we describe our experiment, including details of a recently designed, microwave-optimized low-temperature setup that is thermally anchored to the 50 mK stage of our laboratory ADR. Using a ROACH2 FPGA at room temperature, we simultaneously read out 32 pixels of a GSFC-built detector array via a NIST-built multiplexer chip with Nb coplanar waveguide resonators coupled to RF SQUIDs. The resonators are spaced 6 MHz apart (at approx. 5.9 GHz) and have quality factors of approximately 15,000. Using flux-ramp modulation frequencies of 160 kHz we have achieved spectral resolutions of 3 eV FWHM on each pixel at 6 keV. We will present the measured system-level noise and maximum slew rates, and briefly describe the implications for future detector and readout design.

We have been developing superconducting transition-edge sensor (TES) microcalorimeters for a variety of potential astrophysics missions, including Athena. The X-ray Integral Field Unit (X-IFU) instrument on this mission requires close-packed pixels on a 0.25 mm pitch, and high quantum efficiency between 0.2 and 12 keV. The traditional approach within our group has been to use square TES bilayers on molybdenum and gold that are between 100 and 140 microns in size, deposited on silicon nitride membranes to provide a weak thermal conductance to a 50 mK heat bath temperature. It has been shown that normal metal stripes on top of the bilayer are needed to keep the unexplained noise at a level consistent with the expected based upon estimates for the non-equilibrium non-linear Johnson noise.In this work we describe a new approach in which we use a square TES bilayer that is 50 microns in size. While the weak link effect is much stronger in this size of TES, we have found that excellent spectral performance can be achieved without the need for any normal metal strips on top of the TES. A spectral performance of 1.58 eV at 6 KeV has been achieved, the best resolution seen in any of our devices with this pixel size. The absence of normal metal stripes has led to more uniform transition shapes, and more reliable excellent spectral performance. The smaller TES size has meant that that the thermal conductance to the heat bath, determined by the perimeter length of the TES and the membrane thickness, is lower than on previous devices, and thus has a lower count rate capability. This is an advantage for low count-rate applications where the slower speed enables easier multiplexing in the read-out, thus potential higher multiplexing factors. In order to recover the higher count rate capabilities, a potential path exits using thicker silicon nitride membranes to increase the thermal conductance to the heat bath.

We have developed large-format, close-packed X-ray microcalorimeter arrays fabricated on solid substrates, designed to achieve high energy resolution with count rates up to a few hundred counts per second per pixel for X-ray photon energies upto 8 keV. Our most recent arrays feature 31-micron absorbers on a 35-micron pitch, reducing the size of pixels by about a factor of two. This change will enable an instrument with significantly higher angular resolution. In order to wire out large format arrays with an increased density of smaller pixels, we have reduced the lateral size of both the microstrip wiring and the Mo/Au transition-edge sensors (TES). We report on the key physical properties of these small TESs and the fine Nb leads attached, including the critical currents and weak-link properties associated with the longitudinal proximity effect.

Four astrophysics missions are currently being studied by NASA as candidate large missions to be chosen inthe 2020 astrophysics decadal survey.1 One of these missions is the X-Ray Surveyor (XRS), and possibleconfigurations of this mission are currently under study by a science and technology definition team (STDT). Oneof the key instruments under study is an X-ray microcalorimeter, and the requirements for such an instrument arecurrently under discussion. In this paper we review some different detector options that exist for this instrument,and discuss what array formats might be possible. We have developed one design option that utilizes eithertransition-edge sensor (TES) or magnetically coupled calorimeters (MCC) in pixel array-sizes approaching 100kilo-pixels. To reduce the number of sensors read out to a plausible scale, we have assumed detector geometriesin which a thermal sensor such a TES or MCC can read out a sub-array of 20-25 individual 1 pixels. In thispaper we describe the development status of these detectors, and also discuss the different options that exist forreading out the very large number of pixels.

Requirements for focal planes for x-ray astrophysics vary widely depending on the needs of the science application such as photon count rate, energy band, resolving power, and angular resolution. Transition edge sensor x-ray calorimeters can encounter limitations when optimized for these specific applications. Balancing specifications leads to choices in, for example, pixel size, thermal sinking arrangement, and absorber thickness and material. For the broadest specifications, instruments can benefit from multiple pixel types in the same array or focal plane. Here we describe a variety of focal plane architectures that anticipate science requirements of x-ray instruments for heliophysics and astrophysics. We describe the fabrication procedures that enable each array and explore limitations for the specifications of such arrays, including arrays with multiple pixel types on the same array.

Here we present our latest results on a magnetically tuned transition-edge sensor (MTES).

Here we investigate the effects a non-uniform applied magnetic field has on superconducting transition-edge sensors (TESs) critical current. This has implications on TES optimization. It has been shown that TESs resistive transition can be altered by magnetic fields. We have observed critical current rectification effects and explained these effects in terms of a magnetic self-field arising from asymmetric current injection into the sensor. Our TES physical model shows that this magnetic self-field can result in significantly degraded or improved TES performance. In order for this magnetically tuned TES strategy to reach its full potential we are investigating the effect a non-uniform applied magnetic field has on the critical current.

We have recently shown that normal-metal/superconductor (N/S) bilayer TESs (superconducting Transition-Edge Sensors) exhibit weak-link behavior.l Here we extend our understanding to include TESs with added noise-mitigating normal-metal structures (N structures). We find TESs with added Au structures also exhibit weak-link behavior as evidenced by exponential temperature dependence of the critical current and Josephson-like oscillations of the critical current with applied magnetic field. We explain our results in terms of an effect converse to the longitudinal proximity effect (LoPE) 1, the lateral inverse proximity effect (LaiPE), for which the order parameter in the N/S bilayer is reduced due to the neighboring N structures. Resistance and critical current measurements are presented as a function of temperature and magnetic field taken on square Mol Au bilayer TESs with lengths ranging from 8 to 130 {\mu}m with and without added N structures. We observe the inverse proximity effect on the bilayer over in-plane distances many tens of microns and find the transition shifts to lower temperatures scale approximately as the inverse square of the in- plane N-structure separation distance, without appreciable broadening of the transition width. We also present evidence for nonequilbrium superconductivity and estimate a quasiparticle lifetime of 1.8 \times 10-10 s for the bilayer. The LoPE model is also used to explain the increased conductivity at temperatures above the bilayer's steep resistive transition.

High spectral resolution, high cadence, imaging x-ray spectroscopy has the potential to revolutionize the study of the solar corona. To that end we have been developing transition-edge-sensor (TES) based x-ray micro calorimeter arrays for future solar physics missions where imaging and high energy resolution spectroscopy will enable previously impossible studies of the dynamics and energetics of the solar corona. The characteristics of these x-ray microcalorimeters are significantly different from conventional micro calorimeters developed for astrophysics because they need to accommodate much higher count rates (300-1000 cps) while maintaining high energy resolution of less than 4 eV FWHM in the X-ray energy band of 0.2-10 keV. The other main difference is a smaller pixel size (less than 75 x 75 square microns) than is typical for x-ray micro calorimeters in order to provide angular resolution less than 1 arcsecond. We have achieved at energy resolution of 2.15 eV at 6 keV in a pixel with a 12 x 12 square micron TES sensor and 34 x 34 x 9.1 micron gold absorber, and a resolution of 2.30 eV at 6 keV in a pixel with a 35 x 35 micron TES and a 57 x 57 x 9.1 micron gold absorber. This performance has been achieved in pixels that are fabricated directly onto solid substrates, ie. they are not supported by silicon nitride membranes. We present the results from these detectors, the expected performance at high count-rates, and prospects for the use of this technology for future Solar missions.

We are developing arrays of Mo/Au bilayer transition-edge sensors (TES's) for applications in future X-ray astronomy missions such as NASA's Constellation-X. The physical properties of the superconducting-to-normal transition in our TES bilayers, while often reproducible and characterized, are not well understood. The addition of normal metal features on top of the bilayer are found to change the shape and temperature of the transition, and they typically reduce the unexplained 'excess' noise. In order to understand and potentially optimize the properties of the transition, we have been studying the temperature, widths and current dependence of these transitions. We report on the characterization of devices both deposited on silicon substrates and suspended on thin silicon nitride membranes. This includes key device parameters such as the logarithmic resistance sensitivity with temperature alpha, and the logarithmic resistance sensitivity with current beta, of the phase-transition. We investigate alpha and beta as a function of current, both at fixed and varying bias points in the transition. Using Ginzburg-Landau theory for the current dependence of the superconducting transition temperature, we investigate the relationship between alpha and beta and compare our measured and theoretical estimates.

X-ray microcalorimeters using transition-edge sensors (TES) show great promise for use in astronomical x-ray spectroscopy. We have obtained very high energy resolution (2.8 electronvolts at 1.5 kiloelectronvolts and 3.7 electronvolts at 3.3 kiloelectronvolts) in a large, isolated TES pixel using a Mo/Au proximity-effect bilayer on a silicon nitride membrane. We will discuss the performance and our characterization of that device. In order to be truly suitable for use behind an x-ray telescope, however, such devices need to be arrayed with a pixel size and focal-plane coverage commensurate with the telescope focal length and spatial resolution. Since this requires fitting the TES and its thermal link, a critical component of each calorimeter pixel, into a far more compact geometry than has previously been investigated, we must study the fundamental scaling laws in pixel optimization. We have designed a photolithography mask that will allow us to probe the range in thermal conductance that can be obtained by perforating the nitride membrane in a narrow perimeter around the sensor. This mask will also show the effects of reducing the TES area. Though we have not yet tested devices of the compact designs, we will present our progress in several of the key processing steps and discuss the parameter space of our intended investigations.