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Mechanical objects have been widely used at low temperatures for decades, for various applications; from quantum fluids sensing with vibrating wires or tuning forks, to torsional oscillators for the study of mechanical properties of glasses, and finally micro and nano-mechanical objects with the advent of clean room technologies. These small structures opened up new possibilities to experimentalists, thanks to their small size. We report on the characterization of purely metallic goalpost nano-mechanical structures, which are employed today for both quantum fluids studies (especially quantum turbulence in $^4$He, $^3$He) and intrinsic friction studies (Two-Level-Systems unraveling). Extending existing literature, we demonstrate the analytic modeling of the resonances, in good agreement with numerical simulations, for both first and second mechanical modes. Especially, the impact of the curvature of the whole structure (and therefore, in-built surface stress) is analyzed, together with nonlinear properties. We demonstrate that these are of geometrical origin, and device-dependent. Motion and forces are expressed in meters and Newtons experienced at the level of the goalpost's paddle, for any magnitude or curvature, which is of particular importance for quantum fluids and solids studies.

Many laboratories routinely cool samples to 10 mK, but relatively few can cool condensed matter below 1 mK. Easy access to the microkelvin range would propel fields such as quantum sensors and quantum materials. Such temperatures are achieved with adiabatic nuclear demagnetization. Existing nuclear demagnetization refrigerators (NDR) are ``single-shot'', and the recycling time is incompatible with some sub-mK experiments. Furthermore, a high cooling power is required to overcome the excess heat load of order nW on NDR pre-cooled by cryogen-free dilution refrigerators. We report the performance of an aluminum NDR designed for powerful cooling when part of a dual stage continuous NDR (CNDR). Its thermal resistance is minimized to maximize the cycling rate of the CNDR and consequently its cooling power. At the same time, its susceptibility to eddy current heating is minimized. A CNDR based on two of the aluminum NDR presented here would achieve a cooling power of approximately 40 nW at 560 $\mu$K less than six days after cooling from room temperature, with a small offset in electronic temperature that decreases as the time-dependent heat load decays.

Within recent years, the field of nano-mechanics has diversified in a variety of applications, ranging from quantum information processing to biological molecules recognition. Among the diversity of devices produced these days, the simplest (but versatile) element remains the doubly-clamped beam: it can store very large tensile stresses (producing high resonance frequencies $f_0$ and quality factors $Q$), is interfaceable with electric setups (by means of conductive layers), and can be produced easily in clean rooms (with scalable designs including multiplexing). Besides, its mechanical properties are the simplest to describe. Resonance frequencies and $Q$s are being modeled, with as specific achievement the ultra-high quality resonances based on ``soft clamping'' and ``phonon shields''. Here, we demonstrate that the fabrication undercut of the clamping regions of basic nano-beams produces a ``natural soft clamping'', given for free. We present the analytic theory that enables to fit experimental data, which can be used for $\{ Q , f_0 \}$ design: beyond Finite Element Modeling validation, the presented expressions provide a profound understanding of the phenomenon, with both a Q enhancement and a downwards frequency shift., Comment: With Supplementary Information

In recent decades, the laws of thermodynamics have been pushed down to smaller and smaller scales, within the field of stochastic thermodynamics and state-of-art experiments performed on mesoscopic systems. These measurements concern electrons, photons, and mesoscopic mechanical objects. Here we report on the measurements of thermal fluctuations of a single mechanical mode in-equilibrium with a heat reservoir. The device under study is a nanomechanical beam with a first flexure resonating at 3.8MHz, cooled down to temperatures in the range from 100mK to 400mK. The technique is constructed around a microwave opto-mechanical setup using a cryogenic High Electron Mobility Transistor, and is based on two parametric amplifications implemented in series: an in-built opto-mechanical 'blue-detuned' pumping plus a Traveling Wave Parametric Amplifier stage. We demonstrate our ability to resolve energy fluctuations of the mechanical mode in real-time up to the fastest relevant speed given by the mechanical relaxation rate. The energy probability distribution is then exponential, matching the expected Boltzmann distribution. The variance of fluctuations is found to be $(k_B T)^2$ with no free parameters. Our microwave detection floor is about 3 Standard Quantum Limit at 6GHz; the resolution of our fastest acquisition tracks reached about 100 phonons, and is related to the rather poor opto-mechanical coupling of the device ($g_0/2\pi\approx 0.5~$Hz). This result is deeply in the classical regime, but shall be extended to the quantum case in the future with systems presenting a much larger $g_0$ (up to $2\pi\times 250~$Hz), potentially reaching the resolution of a single mechanical quantum. We believe that it will open a new experimental field: phonon-based quantum stochastic thermodynamics, with fundamental implications for quantum heat transport and macroscopic mechanical quantum coherence., Comment: With appendix

Superconducting heat switches with extremely low normal state resistances are needed for constructing continuous nuclear demagnetization refrigerators with high cooling power. Aluminum is a suitable superconductor for the heat switch because of its high Debye temperature and its commercial availability in high purity. We have constructed a high quality Al heat switch whose design is significantly different than that of previous heat switches. In order to join the Al to Cu with low contact resistance, we plasma etched the Al to remove its oxide layer then immediately deposited Au without breaking the vacuum of the e-beam evaporator. In the normal state of the heat switch, we measured a thermal conductance of $8 T$ W/K$^2$ which is equivalent to an electrical resistance of 3 n$\Omega$ according to the Wiedemann-Franz law. In the superconducting state we measured a thermal conductance that is $2\times10^6$ times lower than that of the normal state at 50 mK.

Non-invasive probes are keystones of fundamental research. Their size, and maneuverability (in terms of e.g. speed, dissipated power) define their applicability range for a specific use. As such, solid state physics possesses e.g. Atomic Force Microscopy (AFM), Scanning Tunneling Microscopy (STM), or Scanning SQUID Microscopy. In comparison, quantum fluids (superfluid $^3$He, $^4$He) are still lacking probes able to sense them (in a fully controllable manner) down to their smallest relevant lengthscales, namely the coherence length $\xi_0$. In this work we report on the fabrication and cryogenic characterization of fully suspended (hanging over an open window, with no substrate underneath) Si$_3$N$_4$ nano-beams, of width down to 50 nm and quality factor up to $10^5$. As a benchmark experiment we used them to investigate the Knudsen boundary layer of a rarefied gas: $^4$He at very low pressures. The absence of the rarefaction effect due to the nearby chip surface discussed in Gazizulin et al. [1] is attested, while we report on the effect of the probe size itself.

The mechanical properties of amorphous materials (glasses) at low temperatures are dominated by effects of low energy excitations that are thought to be atomic-scale tunneling two level systems (TTLS). In nanometer-scale glass samples, the temperature dependence of the sound speed and dissipation is modified relative to that of bulk glass samples. In addition to this size effect, the usual presence of a polycrystalline metal in nanomechanical resonators leads to a further departure from the well-studied behavior of insulating bulk glass. We report a dual chip optomechanical measurement technique used to characterize non-metallized amorphous SiN strings at low temperatures. A harp consisting of SiN strings of width 350 nm and lengths 40 to 80 $\mu$m is coupled to an Al superconducting microwave cavity on a separate chip. The strings are driven dielectrically and their motion is detected via its modulation of the microwave resonance frequency.

High-quality microwave amplifiers and notch-filters can be made from microwave optomechanical systems in which a mechanical resonator is coupled to a microwave cavity by radiation pressure. These amplifiers and filters rely on optomechanically induced transparency (OMIT) and absorption (OMIA), respectively. Such devices can amplify microwave signals with large, controllable gain, high dynamic range and very low noise. Furthermore, extremely narrowband filters can be constructed with this technique. We briefly review previous measurements of microwave OMIT and OMIA before reporting our own measurements of these phenomena, which cover a larger parameter space than has been explored in previous works. In particular, we vary probe frequency, pump frequency, pumping scheme (red or blue), probe power, pump power and temperature. We find excellent agreement between our measurements and the predictions of input/output theory, thereby guiding further development of microwave devices based on nanomechanics.

Silicon nitride (SiN) mechanical resonators with high quality mechanical properties are attractive for fundamental research and applications. However, it is challenging to maintain these mechanical properties while achieving strong coupling to an electrical circuit for efficient on-chip integration. Here, we present a SiN drum resonator covered with an aluminum thin film, enabling large capacitive coupling to a suspended top-gate. Implementing the full electrical measurement scheme, we demonstrate a high quality factor ~ 1E4 (comparable to that of bare drums at room temperature) and present our ability to detect ? 10 mechanical modes at low temperature. The drum resonator is also coupled to a microwave cavity, so that we can perform optomechanical sideband pumping with a fairly good coupling strength G and demonstrate mechanical parametric amplification. This SiN drum resonator design provides efficient electrical integration and exhibits promising features for exploring mode coupling and signal processing.

We report on the quantitative experimental illustration of elementary optomechanics within the classical regime. All measurements are performed in a commercial dilution refrigerator on a mesoscopic drumhead aluminium resonator strongly coupled to a microwave cavity, using only strict single-tone schemes. Sideband asymmetry is reported using in-cavity microwave pumping, along with noise squashing and back-action effects. Results presented in this paper are analysed within the simple classical electric circuit theory, emphasizing the analogous nature of classical features with respect to their usual quantum description. The agreement with theory is obtained with no fitting parameters. Besides, based on those results a simple method is proposed for the accurate measurement of the ratio between microwave internal losses and external coupling., Comment: Experimental implementation of arXiv:2007.14438

We report on measurements of dissipation and frequency noise at millikelvin temperatures of nanomechanical devices covered with aluminum. A clear excess damping is observed after switching the metallic layer from superconducting to the normal state with a magnetic field. Beyond the standard model of internal tunneling systems coupled to the phonon bath, here we consider the relaxation to the conduction electrons together with the nature of the mechanical dispersion laws for stressed/unstressed devices. With these key ingredients, a model describing the relaxation of two-level systems inside the structure due to interactions with electrons and phonons with well separated timescales captures the data. In addition, we measure an excess 1/f-type frequency noise in the normal state, which further emphasizes the impact of conduction electrons., Comment: 7 pages (main text) + 9 pages (SI), same as published version

We present two different techniques for achieving low resistance ($<$20 n$\rm \Omega$) contacts between copper and aluminium at cryogenic temperatures. The best method is based on gold plating of the surfaces in an e-beam evaporator immediately after Ar plasma etching in the same apparatus, yielding resistances as low as 3 n$\rm \Omega$ that are stable over time. The second approach involves inserting indium in the Al/Cu joint. For both methods, we believe key elements are surface polishing, total removal of the aluminum oxide surface layer, and temporary application of large (typ. 11 kN) compression forces. We believe the values for gold plated contacts are the lowest ever reported for a Cu/Al joint of a few $\rm cm^{2}$. This technology could simplify the construction of thermal links for advanced cryogenics applications, in particular that of extremely low resistance heat switches for nuclear demagnetization refrigerators., Comment: Accepted by Journal of Low Temperature Physics

Cryogen-free dilution refrigerators generally simplify low temperature research but some types of samples, including superconducting qubits and other nanoelectronic devices, are affected by environmental heat sources such as stray photons or residual helium. We present the design and performance of a hermetic cell installed on the mixing chamber plate of a cryogen-free dilution refrigerator. The performance was quantified by measuring the dependence of the resonance frequency of a mechanical oscillator installed inside the cell on the mixing chamber temperature down to 10 mK. We found the expected logarithmic temperature dependence of the resonance frequency down to the lowest temperatures, demonstrating that the efficiency of the hermetic shield is significantly better than that of a simpler shield with no visible gaps.

We present the development of a two-stage PrNi$_5$ continuous demagnetization refrigerator at the Institut N\'{e}el/CNRS and numerical simulations of its performance. The thermal model used in the simulations is discussed in detail including the likely sources of heating. We demonstrate the effects of the critical thermal links including superconducting heat switches as well as the heat conductivity of the PrNi$_5$, accounting for the dependence of cooling power on the PrNi$_5$ rod diameter. Our simulations show that if extreme care is taken to minimize the thermal resistance between the nuclear stages, a sample temperature of 1~mK can be maintained under a 20~nW heat load.

Silicon double paddle osillators (DPO) have been successfully used for measuring the elastic properties of amorphous films down to 10 mK (see for example \cite{Fefferman16,Liu14}). Until now, our group has used a wet dilution refrigerator for the lowest temperature measurements. We present measurements carried out on a Bluefors cryogen-free dilution refrigerator that demonstrate an extreme sensitivity of the thermal coupling of the DPO to its environment. These measurements show that it is necessary to enclose the DPO in a shield at the mixing chamber (MXC) temperature. Any gaps in the shield limit its effectiveness, even if there is no line-of-sight path to the DPO. In the absence of a cryogenic hermetic shield surrounding the DPO, turning off the pulse tube while maintaining the MXC and still temperatures leads to heating of the DPO. This demonstrates that any heating of the sample due to pulse tube vibrations is a less important effect.

Advances in nanomechanics within recent years have demonstrated an always expanding range of devices, from top-down structures to appealing bottom-up MoS$_2$ and graphene membranes, used for both sensing and component-oriented applications. One of the main concerns in all of these devices is frequency noise, which ultimately limits their applicability. This issue has attracted a lot of attention recently, and the origin of this noise remains elusive up to date. In this Letter we present a very simple technique to measure frequency noise in nonlinear mechanical devices, based on the presence of bistability. It is illustrated on silicon-nitride high-stress doubly-clamped beams, in a cryogenic environment. We report on the same $T/f$ dependence of the frequency noise power spectra as reported in the literature. But we also find unexpected {\it damping fluctuations}, amplified in the vicinity of the bifurcation points; this effect is clearly distinct from already reported nonlinear dephasing, and poses a fundamental limit on the measurement of bifurcation frequencies. The technique is further applied to the measurement of frequency noise as a function of mode number, within the same device. The relative frequency noise for the fundamental flexure $\delta f/f_0$ lies in the range $0.5 - 0.01~$ppm (consistent with literature for cryogenic MHz devices), and decreases with mode number in the range studied. The technique can be applied to {\it any types} of nano-mechanical structures, enabling progresses towards the understanding of intrinsic sources of noise in these devices., Comment: Published 7 may 2018

Thermal transport properties of amorphous materials at low temperatures are governed by the interaction between phonons and localized excitations referred to as tunneling two level systems (TLS). The temperature variation of the thermal conductivity of these amorphous materials is considered as universal and is characterized by a quadratic power law. This is well described by the phenomenological TLS model even though its microscopic explanation is still elusive. Here, by scaling down to the nanometer scale amorphous systems much below the bulk phonon-TLS mean free path, we probed the robustness of that model in restricted geometry systems. Using very sensitive thermal conductance measurements, we demonstrate that the temperature dependence of the thermal conductance of silicon nitride nanostructures remains mostly quadratic independently of the nanowire section. It is not following the cubic power law in temperature as expected in a Casimir-Ziman regime of boundary limited thermal transport. This shows a thermal transport counter intuitively dominated by phonon-TLS interactions and not by phonon-boundary scattering in the nanowires. This could be ascribed to an unexpected high density of TLS on the surfaces which still dominates the phonon diffusion processes at low temperatures and explains why the universal quadratic temperature dependence of thermal conductance still holds for amorphous nanowires.

The low temperature properties of glass are distinct from those of crystals due to the presence of poorly understood low-energy excitations. The tunneling model proposes that these are atoms tunneling between nearby equilibria, forming tunneling two level systems (TLSs). This model is rather successful, but it does not explain the remarkably universal value of the mechanical dissipation $Q^{-1}$ near 1 kelvin. The only known exceptions to this universality are the $Q^{-1}$ of certain thin films of amorphous silicon, carbon and germanium. Recently, it was found that $Q^{-1}$ of amorphous silicon (a-Si) films can be reduced by two orders of magnitude by increasing the temperature of the substrate during deposition. According to the tunneling model, the reduction in $Q^{-1}$ at 1 kelvin implies a reduction in $P_{0}\gamma ^{2}$, where $P_{0}$ is the density of TLSs and $\gamma $ is their coupling to phonons. In this preliminary report, we demonstrate elastic measurements of a-Si films down to 20 mK. This will allow us, in future work, to determine whether $P_{0}$ or $\gamma $ is responsible for the reduction in $Q^{-1}$ with deposition temperature., Comment: accepted by Journal of Low Temperature Physics

Decoherence is an essential mechanism that defines the boundary between classical and quantum behaviours, while imposing technological bounds for quantum devices. Little is known about quantum coherence of mechanical systems, as opposed to electromagnetic degrees of freedom. But decoherence can also be thought of in a purely classical context, as the loss of phase coherence in the classical phase space. Indeed the bridge between quantum and classical physics is under intense investigation, using in particular classical nanomechanical analogues of quantum phenomena. In the present work, by separating pure dephasing from dissipation, we quantitatively model the classical decoherence of a mechanical resonator: through the experimental control of frequency fluctuations, we engineer artificial dephasing. Building on the fruitful analogy introduced between spins/quantum bits and nanomechanical modes, we report on the methods available to define pure dephasing in these systems, while demonstrating the intrinsic almost-ideal properties of silicon-nitride beams. These experimental and theoretical results, at the boundary between classical nanomechanics and quantum information fields, are prerequisite in the understanding of decoherence processes in mechanical devices, both classical and quantum., Comment: SI not provided

We have measured the thermal properties of suspended membranes from 10 K to 300 K for two amplitudes of internal stress (about 0.1 GPa and 1 GPa) and for two different thicknesses (50 nm and 100 nm). The use of the original 3 \omega -Volklein method has allowed the extraction of both the specific heat and the thermal conductivity of each SiN membrane over a wide temperature range. The mechanical properties of the same substrates have been measured at helium temperatures using nanomechanical techniques. Our measurements show that the thermal transport in freestanding SiN membranes is not affected by the presence of internal stress. Consistently, mechanical dissipation is also unaffected even though Qs increase with increasing tensile stress. We thus demonstrate that the theory developed by Wu and Yu [Phys. Rev. B 84, 174109 (2011)] does not apply to this amorphous material in this stress range. On the other hand, our results can be viewed as a natural consequence of the "dissipation dilution" argument [Y. L. Huang and P. R. Saulson, Rev. Sci. Instrum. 69, 544 (1998)] which has been introduced in the context of mechanical damping., Comment: 15 pages, 6 figures. Submitted to PRB

Our experiments show that in $^4$He crystals, the binding of $^3$He impurities to dislocations does not necessarily imply their pinning. Indeed, in these crystals, there are two different regimes of the motion of dislocations when impurities bind to them. At lowdriving strain $\epsilon$ and frequency $\omega$, where the dislocation speed is less than a critical value (45 $\mu$m/s), dislocations and impurities apparently move together. Impurities really pin the dislocations only at higher values of $\omega$. The critical speed separating the two regimes is two orders of magnitude smaller than the average speed of free $^3$He impurities in the bulk crystal lattice.We obtained this result by studying the dissipation of dislocation motion as a function of the frequency and amplitude of a driving strain applied to a crystal at low temperature. Our results solve an apparent contradiction between some experiments, which showed a frequency-dependent transition temperature from a soft to a stiff state, and other experiments or models where this temperature was assumed to be independent of frequency. The impurity pinning mechanism for dislocations appears to be more complicated than previously assumed.

When submitted to large stresses at high temperature, usual crystals may irreversibly deform. This phenomenon is known as plasticity and it is due to the motion of crystal defects such as dislocations. We have discovered that, in the absence of impurities and in the zero temperature limit, helium 4 crystals present a giant plasticity that is anisotropic and reversible. Direct measurements on oriented single crystals show that their resistance to shear nearly vanishes in one particular direction because dislocations glide freely parallel to the basal planes of the hexagonal structure. This plasticity disappears as soon as traces of helium 3 impurities bind to the dislocations or if their motion is damped by collisions with thermal phonons., Comment: accepted by Physical Review Letters

The detection of mechanical vibrations near the quantum limit is a formidable challenge since the displacement becomes vanishingly small when the number of phonon quanta tends towards zero. An interesting setup for on-chip nanomechanical resonators is that of coupling them to electrical microwave cavities for detection and manipulation. Here we show how to achieve a large cavity coupling energy of up to (2 \pi) 1 MHz/nm for metallic beam resonators at tens of MHz. We used focused ion beam (FIB) cutting to produce uniform slits down to 10 nm, separating patterned resonators from their gate electrodes, in suspended aluminum films. We measured the thermomechanical vibrations down to a temperature of 25 mK, and we obtained a low number of about twenty phonons at the equilibrium bath temperature. The mechanical properties of Al were excellent after FIB cutting and we recorded a quality factor of Q ~ 3 x 10^5 for a 67 MHz resonator at a temperature of 25 mK. Between 0.2K and 2K we find that the dissipation is linearly proportional to the temperature., Comment: 6 pages