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AbstractThis paper presents a novel capacitive microelectromechanical system comprising an array of elastomeric micro-pillars, which has been developed through the introduction of a coupled set of three nonlinear equations. The results have demonstrated that the new model utilizing polydimethylsiloxane is effective in reducing the actuation voltage, although this efficiency is reduced when the temperature is decreased. Moreover, the impact of frequency-dependent permittivity and its relaxation time on the vibrations of the moving electrode has been examined. The provided model and procedure can be utilized to analyze the effects of other materials on the system’s performance and to enhance its sensitivity. [ABSTRACT FROM AUTHOR]

This paper studies the thermoelastic damping in microbeams considering the couple stress theory with microstructure. This theory includes the microinertia effects, coming from the kinetic energy due to the velocity gradient through the differential macroelements. A Galerkin-based reduced order model and complex frequency approach have been used to determine the quality factor. For a gold microbeam as a case study, the obtained results for different ambient temperatures, beam lengths and thicknesses are compared to those obtained using the classic theory of elasticity. The comparison has been made for different values of the length scale parameter. The effects of the microinertia term on the magnitude of the thermoelastic damping have also been investigated and shown that for which conditions these effects are significant. [ABSTRACT FROM AUTHOR]