1. Conception and realization of a novel design for a capacitive pressure sensor with high sensitivity and linear response
- Author
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Samia Achouch, Rihab Bousseta, Fakhita Regragui, and Mourad Gharbi
- Subjects
Pressure sensor ,capacitive sensing ,linearity ,sensitivity ,3D printing technology ,Technology - Abstract
In order to improve the performance (linearity and sensitivity) of capacitive-based diaphragm pressure sensors, a new design is proposed. The non-linearity is improved by eliminating the capacitance of a small area in the central region of the sensor. In contrast, the sensitivity is improved by enhancing the contribution of the edges of the sensor, which leads to a structure where the distance between the fixed and movable diaphragms is non-uniform. Unlike the other research works, we focus on the case of large deflections. The mathematical model allowing the determination of the capacitance as a function of pressure for this new design is presented. Three prototypes with different sized non-metalized central areas are successfully fabricated using 3D printing technology and machining process.Simulation results show that this form allows a non-linearity inferior to 1% if the reference capacitor is variable.
- Published
- 2022
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