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2. Hydrogen sorption in yttrium-based getter thin films

Author

Kutyla, Charlotte, Bessouet, Clément, Lemettre, Sylvain, Leroy, Laetitia, Bosseboeuf, Alain, Coste, Philippe, Sauvage, Thierry, Wendling, Olivier, Bellamy, Aurélien, Jagtap, Piyush, Escoubas, Stéphanie, Guichet, Christophe, Thomas, Olivier, and Moulin, Johan

Published
2023
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7. Activation of getter films for MEMS packaging studied by in situ NRA

Author

Bessouet, Clément, Bejjit, Charaf-Eddine, Kutyla, Charlotte, Lemettre, Sylvain, Bosseboeuf, Alain, Coste, Philippe, Sauvage, Thierry, Wendling, Olivier, Bellamy, Aurelien, Jagtap, Pratik, Escoubas, Stephanie, Guichet, Christophe, Thomas, Olivier, Moulin, Johan, Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Conditions Extrêmes et Matériaux : Haute Température et Irradiation (CEMHTI), Université d'Orléans (UO)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), and Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI]Engineering Sciences [physics]
Abstract

International audience

Published
2022

8. Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging

Author

Kutyla, Charlotte, primary, Lemettre, Sylvain, additional, Bessouet, Clement, additional, Bosseboeuf, Alain, additional, Coste, Philippe, additional, Sauvage, Thierry, additional, Wendling, Olivier, additional, Bellamy, Aurelien, additional, Jagtap, Piyush, additional, Escoubas, Stephanie, additional, Guichet, Christophe, additional, Thomas, Olivier, additional, and Moulin, Johan, additional

Published
2022
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10. Piezoelectric Properties of Pb1−xLax(Zr0.52Ti0.48)1−x/4O3 Thin Films Studied by In Situ X-ray Diffraction

Author

Cornelius, Thomas, Mocuta, Cristian, Escoubas, Stephanie, Lima, Luiz, Araújo, Eudes, Kholkin, Andrei, Thomas, Olivier, Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), Universidade Estadual Paulista Júlio de Mesquita Filho = São Paulo State University (UNESP), Departments of Physics (CICECO), Universidade de Aveiro, and Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], lanthanum-modified lead zirconate titanate (PLZT), piezoelectric properties, X-ray diffraction
Abstract

International audience; The piezoelectric properties of lanthanum-modified lead zirconate titanate Pb1−xLax(Zr0.52Ti0.48)1−x/4O3 thin films, with x = 0, 3 and 12 mol% La, were studied by in situ synchrotron X-ray diffraction under direct (DC) and alternating (AC) electric fields, with AC frequencies covering more than four orders of magnitude. The Bragg reflections for thin films with low lanthanum concentration exhibit a double-peak structure, indicating two contributions, whereas thin films with 12% La possess a well-defined Bragg peak with a single component. In addition, built-in electric fields are revealed for low La concentrations, while they are absent for thin films with 12% of La. For static and low frequency AC electric fields, all lanthanum-modified lead zirconate titanate thin films exhibit butterfly loops, whereas linear piezoelectric behavior is found for AC frequencies larger than 1 Hz.

Published
2020

12. Stress Buildup Upon Crystallization of GeTe Thin Films: Curvature Measurements and Modelling

Author

Tholapi, Rajkiran, primary, Gallard, Manon, additional, Burle, Nelly, additional, Guichet, Christophe, additional, Escoubas, Stephanie, additional, Putero, Magali, additional, Mocuta, Cristian, additional, Richard, Marie-Ingrid, additional, Chahine, Rebecca, additional, Sabbione, Chiara, additional, Bernard, Mathieu, additional, Fellouh, Leila, additional, Noé, Pierre, additional, and Thomas, Olivier, additional

Published
2020
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16. Thermo-mechanical study of a 2.5D passive silicon interposer technology: Experimental, numerical and In-Situ stress sensors developments

Author

Vianne, Benjamin, primary, Bar, Pierre, additional, Fiori, Vincent, additional, Petitdidier, Sebastien, additional, Chevrier, Norbert, additional, Gallois-Garreignot, Sebastien, additional, Farcy, Alexis, additional, Chausse, Pascal, additional, Escoubas, Stephanie, additional, Hotellier, Nicolas, additional, and Thomas, Olivier, additional

Published
2013
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