1. All Oxide-Based Magnetic Tunnel Junctions Fabricated by Focused Ion Beam Nanomachining Technique.
- Author
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Tiwari, Kaushal, Bera, Anup Kumar, Godha, Akshat, Makineni, Surendra Kumar, Blamire, Mark, and Prasad, Bhagwati
- Subjects
MAGNETIC tunnelling ,MAGNETIC control ,TUNNEL magnetoresistance ,FOCUSED ion beams ,PULSED laser deposition - Abstract
This study offers a comprehensive investigation into the fabrication of all-oxide-based magnetic tunnel junctions (MTJs) utilizing the focused ion beam (FIB) nanomachining method. The oxide thin films of SrTiO
3 (STO), La 1 − x Cax MnO3 (LCMO) and La 1 − x Srx MnO3 (LSMO) were grown using pulsed laser deposition (PLD). Magnetization measurements at 5K revealed a notable difference in coercivity between LCMO and LSMO films, highlighting their suitability as electrodes in MTJ device fabrication. The deposited trilayer structure of LCMO/STO/LSMO exhibited heteroepitaxial growth, enabling the independent magnetic switching of electrode layers in the MTJ with the STO barrier layer. Conventional photolithography and ion milling were used to create a series of 4 μ m Hall bar tracks in the deposited films. Nanopillar devices, sized 250 nm × 250 nm, were successfully fabricated on these 4 μ m tracks by optimizing the FIB nanomachining technique. The fabricated MTJs demonstrated a high tunnel magnetoresistance (TMR) response, leading to the conclusion that the FIB nanomachining technique holds significant promise for the development of high-performance oxide-based spintronic devices. [ABSTRACT FROM AUTHOR]- Published
- 2024
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