Emmanuel Flahaut, M. Yang, Ender Suvaci, Yasemin Çelik, Walter Escoffier, Anadolu Üniversitesi, Mühendislik Fakültesi, Malzeme Bilimi ve Mühendisliği Bölümü, Suvacı, Ender, Centre interuniversitaire de recherche et d'ingenierie des matériaux (CIRIMAT), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Anadolu [Turkey], Laboratoire national des champs magnétiques intenses - Toulouse (LNCMI-T), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Anadolu University (TURKEY), Centre National de la Recherche Scientifique - CNRS (FRANCE), Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE), Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE), Université Toulouse III - Paul Sabatier - UT3 (FRANCE), Laboratoire National des Champs Magnétiques Intenses - LNCMI (Toulouse, France), Institut National Polytechnique de Toulouse - INPT (FRANCE), Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), and Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])
WOS: 000385900100060, Low-pressure chemical vapor deposition synthesis of graphene films on two different Cu foils, with different surface oxygen and carbon contents, was performed by controlling H-2 and/or Ar flow rates during heating. The influences of heating atmosphere on the final impurity level, quality of the synthesized graphene films and thickness uniformity were investigated depending on Cu foil impurities. Heating of carbon-rich, but oxygen-poor Cu foil in H-2 environment resulted in covering the foil surface by residual carbon which then acted as active sites for multilayer graphene growth. Ar-only flow was required during heating to promote high quality graphene growth on this foil. On carbon-poor, but oxygen-rich Cu foil high quality graphene growth was promoted when the heating was carried out under Ar/H-2 environment. Almost no carbon residues were observed on this foil even under H-2 only flow during heating. The heating atmosphere affected not only graphene growth, but also the type and amount of impurities formed on the surface. H-2 and Ar/H-2 heating resulted in the formation of spherical nanometer-sized impurities, while irregular-shaped, large (a few mu m) SiO2 impurities were observed when Ar alone was used during heating. Quality of the grown films was tested by Quantum Hall Effect measurements, Anadolu University Scientific Research Projects Commission [1110F155, 1101F005], The financial support for this study by Anadolu University Scientific Research Projects Commission (under the project numbers of 1110F155 and 1101F005) is gratefully acknowledged. The authors also thank Jerome Esvan (CIRIMAT, Toulouse) for XPS analyses and Lucien Datas for TEM analyses which were performed at R. Castaing characterization platform, UMS 3623.