128 results on '"Elwenspoek, M. C."'
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2. Micro-Machining of a Cryogenic Imaging Array of Transition Edge X-Ray Microcalorimeters
3. A Light Absorption Cell for μ-TAS with KOH/IPA Etched 45° Mirrors in Silicon
4. A Simple Selfpriming Bubble-Tolerant Peristaltic Micropump
5. An electronical characterisation method for an acoustic and thermal flow sensor
6. Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications
7. Electrochemical Fabrication of Multi Walled Micro Channels
8. A Mixer Based on Diffusion-Mixing Designed for the Mafias-Project
9. A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems
10. Monolithic Versus Modular Integration of a Micro-FIA System for Ammonium Determination
11. Macroscopic equivalence for microscopic motion in a turbulence driven three-dimensional self-assembly reactor.
12. Parallel-beams/lever electrothermal out-of-plane actuator
13. Micromachined fountain pen for SPM-based surface modification
14. An AFM-based device for in-situ characterization of nano-wear
15. Thermal-wave balancing flow sensor with low-drift power feedback
16. Studies of AIN growth on various substrates by RF reactive sputtering techniques
17. Monolithic fiber-top sensor for critical environments and standard applications
18. Fiber-top atomic force microscope
19. Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation
20. Scalable six-axis force-torque sensor with a large range for biomechanical applications
21. Determination of the Young's modulus of pulsed laser deposited epitaxial PZT thin films
22. Incorporation of in-plane interconnects to reflow bonding for electrical functionality
23. Analysis of single quantum-dot mobility inside 1D nanochannel devices
24. Parallel optical readout of cantilever arrays in dynamic mode
25. Black silicon method XI: oxygen pulses in SF6plasma
26. Measurement setup for detecting the Casimir force between parallel plates separated at a sub-micron distance
27. Characterization of MEMS-on-tube assembly: reflow bonding of borosilicate glass (Duran®) tubes to silicon substrates
28. Transition flow through an ultra-thin nanosieve
29. Fabrication and interfacing of nanochannel devices for single-molecule studies
30. Nozzle fabrication for micropropulsion of a microsatellite
31. Fiber-top refractometer
32. Black silicon method: X. A review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment
33. Fiber-top micromachined devices
34. High frequency pressure oscillator for microcryocoolers
35. Fusion-bonded fluidic interconnects
36. Design and analysis of a high pressure piezoelectric actuated microvalve
37. Experimental investigation of anisotropy in isotropic silicon etching
38. Fibre-top cantilevers: design, fabrication and applications
39. Pressure drop of laminar gas flows in a microchannel containing various pillar matrices
40. Piezoelectric Microvalve for Precise Control of Gas Flow at High Pressure
41. Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in Si (110)
42. Fiber-top atomic force microscope
43. Seedless electroplating on patterned silicon
44. Carving fiber-top optomechanical transducers from an optical fiber
45. Monolithic fiber-top sensor for critical environments and standard applications
46. Precise Test of the Diffusion-Controlled Wet Isotropic Etching of Silicon via Circular Mask Openings
47. Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes
48. Fabrication of micromachined fountain pen with in situ characterization possibility of nanoscale surface modification
49. In situ characterization technique for nanotribological investigations
50. Micromachined fountain pen for atomic force microscope-based nanopatterning
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