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Your search keyword '"EWI-17074"' showing total 2 results
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2 results on '"EWI-17074"'

1. Impact of sidewalls on electrical characterization

Author

Roy, Deepu, in 't Zandt, Micha, and Wolters, Robertus A.M.

Subjects
EWI-17074, IR-69088, CBKR structures, side walls, Van der Pauw, Contact resistance, phase change material, METIS-264277
Abstract

In this article the impact of sidewalls, formed during reactive ion etching, on the electrical behavior of thin film structures is presented. The presence of sidewalls was experimentally characterized by sheet resistance measurements on Van der Pauw structures. The effect of these sidewalls on the extraction of specific contact resistance from Cross Bridge Kelvin Resistance (CBKR) structures is discussed.

Published
2009

2. Impact of sidewalls on electrical characterization

Subjects
EWI-17074, IR-69088, CBKR structures, side walls, Van der Pauw, Contact resistance, phase change material, METIS-264277
Abstract

In this article the impact of sidewalls, formed during reactive ion etching, on the electrical behavior of thin film structures is presented. The presence of sidewalls was experimentally characterized by sheet resistance measurements on Van der Pauw structures. The effect of these sidewalls on the extraction of specific contact resistance from Cross Bridge Kelvin Resistance (CBKR) structures is discussed.

Published
2009

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