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Shaping light with microtechnology components has been possible for many years. The Texas Instruments digital micromirror device (DMD) and all types of adaptive optics systems are very sophisticated tools, well established and widely used. Here we present, however, two very dedicated systems, where one is an extremely simple MEMS-based tunable diffuser, while the second device is complex micromirror array with new capabilities for femtosecond laser pulse shaping. Showing the two systems right next to each other demonstrates the vast options and versatility of MOEMS for shaping light in the space and time domain.

We present a dynamic laser beam shaper based on MEMS technology. We show a prototype of a dynamic diffuser made of single crystal silicon. A linearly deformable silicon micromembrane is used to diffuse a laser beam in one dimension. Resonance frequencies of the membrane can range from 1 kHz to 20 kHz. Mode shapes of the deformable mirror are excited using magnetic actuation. Diffusing angle can be tuned by adjusting the driving current in the membrane. We measured a diffusing angle of 1 degrees for an applied current of 40 mA. The aluminum coated mirror can handle 140 W/cm(2) of visible to infrared optical power. Application to smooth out interference pattern generated by a static diffuser is shown.