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2. Micrometer-Thin Crystalline-Silicon Solar Cells Integrating Numerically Optimized 2-D Photonic Crystals

Author

Depauw, V., Meng, X., Daif, O. El, Gomard, G., Lalouat, L., Drouard, E., Trompoukis, C., Fave, A., Seassal, C., and Gordon, I.

Subjects
Condensed Matter - Materials Science, Physics - Optics
Abstract

A 2-D photonic crystal was integrated experimentally into a thin-film crystalline-silicon solar cell of 1-{\mu}m thickness, after numerical optimization maximizing light absorption in the active material. The photonic crystal boosted the short-circuit current of the cell, but it also damaged its open-circuit voltage and fill factor, which led to an overall decrease in performances. Comparisons between modeled and actual optical behaviors of the cell, and between ideal and actual morphologies, show the global robustness of the nanostructure to experimental deviations, but its particular sensitivity to the conformality of the top coatings and the spread in pattern dimensions, which should not be neglected in the optical model. As for the electrical behavior, the measured internal quantum efficiency shows the strong parasitic absorptions from the transparent conductive oxide and from the back-reflector, as well as the negative impact of the nanopattern on surface passivation. Our exemplifying case, thus, illustrates and experimentally confirms two recommendations for future integration of surface nanostructures for light trapping purposes: 1) the necessity to optimize absorption not for the total stack but for the single active material, and 2) the necessity to avoid damage to the active material by pattern etching., Comment: Authors' postprint version - Editor's pdf published online on Nov. 5

Published
2013
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3. Absorbing photonic crystals for thin film photovoltaics

Author

Daif, O. El, Drouard, E., Gomard, G., Meng, X., Kaminski, A., Fave, A., Lemiti, M., Caurel, E. Garcia, Cabarrocas, P. Roca i, Ahn, S., Jeon, H., and Seassal, C.

Subjects
Condensed Matter - Other Condensed Matter, Physics - Optics
Abstract

The absorption of thin hydrogenated amorphous silicon layers can be efficiently enhanced through a controlled periodic patterning. Light is trapped through coupling with photonic Bloch modes of the periodic structures, which act as an absorbing planar photonic crystal. We theoretically demonstrate this absorption enhancement through one or two dimensional patterning, and show the experimental feasibility through large area holographic patterning. Numerical simulations show over 50% absorption enhancement over the part of the solar spectrum comprised between 380 and 750nm. It is experimentally confirmed by optical measurements performed on planar photonic crystals fabricated by laser holography and reactive ion etching., Comment: 6 pages. SPIE Photonics Europe paper

Published
2010
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4. Subacute monomelic radiculoplexus neuropathy following Comirnaty© (Pfizer-BioNTech COVID-19) vaccination: A case report

Author

Coly, M., primary, Balcerac, A., additional, Brasseur, N., additional, Sallansonnet-Froment, M., additional, Tafani, C., additional, Taifas, I., additional, Bréchemier, M.L., additional, Drouard, E., additional, Foissaud, V., additional, Vest, P., additional, Vandendries, C., additional, Bompaire, F., additional, Bihan, K., additional, and Ricard, D., additional

Published
2023
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6. Pseudo-tumour lesion of the brainstem: A case and discussion

Author

Maillot, J., primary, Brunet de Courssou, J.-B., additional, Brechemier, M.-L., additional, Tafani, C., additional, Sallansonnet-Froment, M., additional, Taifas, I., additional, Cournac, J.-M., additional, Drouard, E., additional, Bompaire, F., additional, Faivre, A., additional, and Ricard, D., additional

Published
2022
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7. Halide perovskites for photonic applications

Author

Chamarro, M., primary, Mayer, C. R., additional, Pauporté, T., additional, Drouard, E., additional, Nguyen, H.-S., additional, Seassal, C., additional, Boehme, S. C., additional, Kovalenko, M. V., additional, and Deleporte, E., additional

Published
2022
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9. PSEUDODISORDERED STRUCTURES FOR LIGHT TRAPPING IMPROVEMENT IN MONO CRYSTALLINE SI THIN FILMS

Author

Ding, H, Lalouat, L, Gonzalez-Acevedo, B, Harouri, A, Orobtchouk, R, Depauw, V, Drouard, E, Seassal, C, He, DING, INL - Nanophotonique (INL - Photonique), Institut des Nanotechnologies de Lyon (INL), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-École Centrale de Lyon (ECL), Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE), IMEC (IMEC), Catholic University of Leuven - Katholieke Universiteit Leuven (KU Leuven), École Centrale de Lyon (ECL), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Lyon (ECL), and Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS]Physics [physics], [PHYS] Physics [physics]
Abstract

International audience; Light trapping structures are of crucial importance for ultra thin film crystalline Silicon solar cells, mainly due to the low absorption of this material in the red and near infrared part of the solar spectrum. Photonic Crystals (PC) consisting in a direct square lattice of holes etched in the absorbing material have shown theoretically and experimentally [1, 2, 3] their ability to drastically enhance the absorption of the impinging light and thus of the short circuit current.

Published
2015

10. PHOTOVOLTAIC TECHNICAL CONFERENCE -THIN FILM & ADVANCED SILICON SOLUTIONS 2014- LIGHT TRAPPING IN HOLES OR PYRAMID PATTERNS FOR THIN FILM SOLAR CELLS

Author

Ding, H, Liu, J, Lalouat, L, Orobtchouk, R, Seassal, C, and Drouard, E

Subjects
[PHYS]Physics [physics]
Abstract

International audience; Light trapping is expected to enable the generation of promising thin film photovoltaic solar cells based on crystalline silicon (c-Si) [1]. In particular, photonic crystal (PhC) structures have a great potential to improve the thin-film solar cell absorption thanks to their slow Bloch modes [2]. In this work, we investigate numerically the influence of different kinds of PhC patterns in thin c-Si layers (less than 2 µm thick). We focus on arrays of cylindrical holes and inverted pyramids structure, as depicted in Fig. 1. The numerical results are then supported by experimental realizations of nano-patterns. 2) Description of approach and techniques Using finite difference time domain (FDTD) optical simulations [3], we calculate the absorption of the thin film silicon solar cell with 2D photonic crystal structures, as well as the maximum achievable short-circuit current density (Jsc), assuming the internal quantum efficiency equals unity. Standard AM1.5G spectrum is used and optical indices are experimental data. The considered cells typically consist of an ITO front electrode, an amorphous hydrogenated silicon (a-Si:H) layer, then a lowly doped c-Si layer acting as the main active region, lying on a highly doped c-Si acting as a BSF layer. In a preliminary step, we investigate numerically the influence of the patterns only acting as front anti-reflection coating, i.e. in structure having a thick BSF layer as presented in Fig. 1. The thickness of the active region is 1.535µm. The parameters are the period, the air filling fraction (ff) of the pattern (for both patterns) and the etching depth (only in the case of cylindrical hole structure, since for the pyramid structure this parameter is set by the angle of wet etching of the c-Si). Then the BSF thickness is reduced and lies on an optical spacer on a back metallic contact, in order to obtain a complete thin film solar cell structure as depicted in Fig. 2a. In this case, the thickness of the optical spacer (110nm) has been adjusted in the numerical simulation. It can be noted that the thickness of the lowly doped c-Si layer changes from 1.535µm to 1.1µm due to fabrication aspect. Finally, we present the fabrication of the designed structures. In order to pattern such stacks, we develop a high throughput process based on laser interference lithography (LIL), reactive ion etching (RIE), possibly combined to wet c-Si etching. The LIL is employed to form the initial mask by double exposing an ultrathin, high resolution photoresist [4]. This pattern is then transferred to a SiO2 hard mask by using RIE process with CHF3. Subsequently, the inverted pyramids are obtained by wet-chemical etching in a KOH solution, whereas the cylinders are formed by another RIE etching with a mixture of gases (SF6 and Ar) into the silicon side. 3) Results / Conclusions / Perspectives Both photonic crystal structures (inverted pyramid and cylindrical hole) enhance the absorption compared to the unpatterned reference. This enhancement can be mainly associated to a decrease of the sunlight reflected by the patterns structure as it can be seen in Fig. 3. Fig. 4 summarizes the maximal achievable short-circuit current that can be obtained from three different periods (300, 450 and 600nm) for both the pyramidal and cylindrical patterns. It shows that an increase of the period induces the increase of the pattern size to obtain a good anti-reflection coating. In addition, the inverted pyramid structure enables to achieve higher short-circuit current than cylindrical hole structure for each simulated period. Experimental structures are realized in a c-Si substrate by the technique described previously. The SEM images in Fig. 5a and Fig. 5b illustrate respectively the top view of inverted pyramid structure with a 300 nm period and cylindrical hole structure with a 450 nm period. The lower part of each image (see Fig. 5c and Fig. 5d) is the corresponding cross-sectional image, which clearly demonstrates the shape of each photonic structure. In the case of the complete solar cell (see Fig. 2a), the behavior of the absorption spectra changes. Slow Bloch mode appears in the red part of the solar spectrum as it can be shown in the dash region in Fig. 2b. As in the previous case, the inverted pyramid structure (Jsc=23.59 mA/cm 2) enables to achieve higher short-circuit current density than the cylindrical hole structure (Jsc=17.65 mA/cm 2). To summarize, we clearly evidence that with the targeted solar cell architecture, a smooth pattern enables to achieve a higher short-circuit current density than a sharp pattern (from an optical point of view). To go further, electrical aspect will be taken into account and other kinds of smooth pattern samples are under realization.

Published
2014

12. Electro-Optical Optimization of c-Si Thin Solar Cells Patterned by Photonic Crystals

Author

Champory, F., Peretti, R., Lalouat, L., Gomard, G., Marion, L.C., Meng, X., Fave, A., Seassal, C., and Drouard, E.

Subjects
THIN FILM SOLAR CELLS, Silicon-based Thin Film Solar Cells
Abstract

28th European Photovoltaic Solar Energy Conference and Exhibition; 2634-2637, Using Photonic Crystals (PC) to pattern the top surface of thin film solar cells aims at increasing absorption in the red part of the solar spectrum. In this conference, we explain that a PC also introduces new optical properties for high energy photons since they can be channeled through the holes of the PC itself. Then, optical intensity at the corresponding wavelength is mainly located into the air (or cladding media), leading to a lower effective absorbing constant compared to the bulk material. In other words, these photons can be absorbed further from a carrier collector located at the surface, where carrier recombinations are elevated due to a high doping level. Unfortunately, surface recombinations are even more critical since the residual absorption of the channeled photons is mainly located on the lateral surface of the holes. In this communication, we focus on the influence of the junction location, the shape of the top contact doping profile (conformal or not) and on the influence of the surface passivation to obtain a robust devices.

Published
2013
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13. Design and Simulation of 2D Photonic Crystal Thin Film Photovoltaic, Cells

Author

Gomard, G., Drouard, E., El Daif, O., Meng, X., Seassal, C., Kaminski-Cachopo, A., Fave, A., Lemiti, M., Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS), INL - Photovoltaïque (INL - PV), Institut des Nanotechnologies de Lyon (INL), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-École Centrale de Lyon (ECL), Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE), and Domenget, Chahla

Subjects
[PHYS.COND.CM-GEN] Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2010

14. Fabrication and Characterisation of Photonic Crystal Amorphous Silicon Photovoltaic Cells

Author

El Daif, O., Gomard, G., Meng, X., Drouard, E., Kaminski-Cachopo, A., Fave, A., Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut National Polytechnique de Grenoble (INPG)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS), INL - Photovoltaïque (INL - PV), Institut des Nanotechnologies de Lyon (INL), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-École Centrale de Lyon (ECL), Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE), and Domenget, Chahla

Subjects
[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2010

17. Photonic Crystal Enhanced Absorption of Amorphous Silicon for Solar Cells

Author

El Daif, O., Drouard, E., Gomard, G., Fave, A., Kaminski, A., Lemiti, M., Park, Y., Letartre, X., Viktorovitch, P., Ahn, S., Jeon, H., and Seassal, C.

Subjects
Advanced Photovoltaics, Fundamental Studies
Abstract

24th European Photovoltaic Solar Energy Conference, 21-25 September 2009, Hamburg, Germany; 548-552, Absorption enhancement of ultra-thin amorphous silicon (aSi) layers is demonstrated both theoretically and experimentally, through photonic crystal patterning of the absorbing layer. We show through simulation that an increase of the absorption by a factor of 1.5 is expected for a demonstrator of 100nm of aSi. The proposal is then validated by an experimental demonstration, showing a 50% relative increase of the absorption of 100nm of aSi deposited on glass, holographically lithographed and dry-etched in order to fabricate a one-dimensional photonic crystal. This shows new possibilities of increasing the efficiency of thin film photovoltaic cells. Photonic crystal based architecture of thin film cells are proposed and discussed.

Published
2009
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18. Thermo-optical coefficients of sol-gel ZrO2 thin films

Author

Elalamy, Z., Drouard, E., Mcgovern, T., Escoubas, Ludovic, Simon, J.J., Flory, F., Institut FRESNEL (FRESNEL), Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), and Torchio, Philippe

Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Published
2004

19. Adaptateur de mode pourvu de deux canaux distincts

Author

Tisserand, Stephane, Roux, L., Reversat, F., Jacob, S., Drouard, E., Escoubas, Ludovic, Silios Technologies, Institut FRESNEL (FRESNEL), Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), and Ferrand, Patrick

Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Published
2003

20. Design of deeply etched planar waveguide filters of arbitrary spectral response

Author

Drouard, E., Escoubas, Ludovic, Flory, F., Institut FRESNEL (FRESNEL), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), Torchio, Philippe, and Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU)

Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Abstract

Poster présenté, September 22-25, 2003, Rimini, Italie

Published
2003

21. From optical interference coatings to optical micro/nano components

Author

Flory, F., Escoubas, Ludovic, Drouard, E., Simon, J.J., Institut FRESNEL (FRESNEL), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU), and Torchio, Philippe

Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Abstract

Conférence invitée September 2003

Published
2003

22. One-dimensional transfer matrix formalism with localised losses for fast designing of quasi-periodic waveguide filters

Author

Boucher, Y., Drouard, E., Escoubas, Ludovic, Flory, F., Institut FRESNEL (FRESNEL), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), Torchio, Philippe, and Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU)

Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Abstract

Conférence "Optical Systems Design", September-3 October (2003), SPIE

Published
2003

23. dn/dt measurements of solgel thin films

Author

Elalamy, Z., Drouard, E., Escoubas, Ludovic, Flory, F., Institut FRESNEL (FRESNEL), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU), and Torchio, Philippe

Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Abstract

St Etienne, 30 September-3 October (2003), SPIE

Published
2003

24. Study of the refractive index of nano - structured optical materials

Author

Flory, F., Escoubas, Ludovic, Drouard, E., Institut FRESNEL (FRESNEL), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), Torchio, Philippe, and Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU)

Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Abstract

Vol.4640

Published
2002

25. dn/dT measurements performed using guided waves and their application to the temperature sensitivity of WDM filters

Author

Drouard, E., Huguet-Chantôme, P., Escoubas, Ludovic, Flory, F., Institut FRESNEL (FRESNEL), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU), and Torchio, Philippe

Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Published
2002

26. Modeling of optical guided - wave filters

Author

Escoubas, Ludovic, Drouard, E., Flory, F., Torchio, Philippe, Institut FRESNEL (FRESNEL), Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU), and Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[PHYS.PHYS.PHYS-OPTICS] Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Abstract

Vol.4640

Published
2002

28. Luminescence enhancement of a self-organised Y2O3:Eu3+ thin film-coated porous alumina membrane.

Author

Abdellaoui, N., Pereira, A., Kandri, T., Drouard, E., Novotny, M., Moine, B., and Pillonnet, A.

Abstract

Y2O3:Eu3+ thin films were deposited by pulsed laser deposition (PLD) on unordered porous alumina membranes (PAMs). We showed that by adjusting the deposition parameters, self-organisation of Y2O3:Eu3+ on the PAM occurs, which leads to the formation of a disordered photonic structure with high index contrast. Luminescence measurements showed a strong enhancement of the red emission (up to 12 times) compared to a continuous layer. We demonstrated experimentally and theoretically that such luminescence enhancement is directly correlated to an increase of the absorption efficiency in the UV range. [ABSTRACT FROM AUTHOR]

Published
2016
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32. Absorbing photonic crystals for thin film photovoltaics

Author

El Daif, O., primary, Drouard, E., additional, Gomard, G., additional, Meng, X., additional, Kaminski, A., additional, Fave, A., additional, Lemiti, M., additional, Garcia Cavrel, E., additional, Roca i Cabarrocas, P., additional, Ahn, S., additional, Jeon, H., additional, and Seassal, C., additional

Published
2010
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49. Ion implanted integrated optics (I3O) technology for planar lightwave circuits fabrication.

Author

Drouard, E., Escoubas, L., Flory, F., Tisserand, S., and Roux, L.

Abstract

The Ion Implanted Integrated Optics (I3O) technology, using titanium ion implantation in bulk silica to fabricate passive compact planar lightwave circuits (PLCs), is presented in this paper. Its advantages are described and compared with other waveguide fabrication technologies. It is demonstrated that the guided electromagnetic field can be tailored by adjusting the titanium ion dose either to fit the guided mode of standard single-mode fibers or to allow a sharp radius of curvature of bent waveguides. [ABSTRACT FROM PUBLISHER]

Published
2004
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