1. Direct graphene growth on transitional metal with solid carbon source and its converting into graphene/transitional metal oxide heterostructure
- Author
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Steven B. Fairchild, John Boeckl, Patrick Soukiassian, Tyson C. Back, Dominique Martinotti, Ludovic Douillard, Jeongho Park, William C. Mitchel, Said Elhamri, Air Force Research Laboratory (AFRL), United States Air Force (USAF), University of Dayton, Laboratoire d'Electronique et nanoPhotonique Organique (LEPO), Service de physique de l'état condensé (SPEC - UMR3680), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS)-Institut Rayonnement Matière de Saclay (IRAMIS), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay, University Paris-Sud, and Laboratoire d'Etude des NanoStructures et Imagerie de Surface (LENSIS)
- Subjects
Materials science ,Oxide ,Nanotechnology ,02 engineering and technology ,Chemical vapor deposition ,01 natural sciences ,7. Clean energy ,law.invention ,chemistry.chemical_compound ,X-ray photoelectron spectroscopy ,law ,0103 physical sciences ,General Materials Science ,010306 general physics ,Graphene oxide paper ,[PHYS]Physics [physics] ,business.industry ,Graphene ,Graphene foam ,General Chemistry ,021001 nanoscience & nanotechnology ,chemistry ,Optoelectronics ,0210 nano-technology ,business ,Graphene nanoribbons ,Molecular beam epitaxy - Abstract
International audience; The oxide/semiconductor structure is key to controlling current in electronic devices and HfO$_2$ is a common gate material in conventional electronic devices due to its favorable dielectric properties. Graphene devices also require insulating gates. We demonstrate a unique direct growth approach to obtain the bottom gate structure (graphene/HfO$_2$/n-SiC). The present approach involves transfer of graphene grown by chemical vapor deposition (CVD) on Cu to oxidized Si wafers, a complex process prone to low yield and reduced performance. Furthermore, HfO$_2$ is preferred to SiO$_2$ because of its superior properties. The proposed concept consists of the direct deposition of graphene by solid carbon molecular beam epitaxy on Hf metal coated n-type SiC, followed by oxygen intercalation to form HfO$_2$. The oxygen intercalation will then convert the underlying Hf into HfO$_2$ due to the strong affinity of Hf with oxygen. We identify the graphene/HfO 2 formation by Raman, X-ray photoelectron spectroscopy (XPS), Low energy electron diffraction (LEED), Low energy electron microscopy (LEEM) and electrical properties including Hall mobility and leakage current measurement.
- Published
- 2017
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