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Crystalline materials with broken inversion symmetry can exhibit a spontaneous electric polarization, which originates from a microscopic electric dipole moment. Long-range polar or anti-polar order of such permanent dipoles gives rise to ferroelectricity or antiferroelectricity, respectively. However, the recently discovered antiferroelectrics of fluorite structure (HfO2 and ZrO2) are different: A non-polar phase transforms into a polar phase by spontaneous inversion symmetry breaking upon the application of an electric field. Here, we show that this structural transition in antiferroelectric ZrO2 gives rise to a negative capacitance, which is promising for overcoming the fundamental limits of energy efficiency in electronics. Our findings provide insight into the thermodynamically forbidden region of the antiferroelectric transition in ZrO2 and extend the concept of negative capacitance beyond ferroelectricity. This shows that negative capacitance is a more general phenomenon than previously thought and can be expected in a much broader range of materials exhibiting structural phase transitions.

System on chip (SoC) embedded memory solutions promise small form factors and high operating speed, as well as a high energy and cost efficiency. Single cell scalability and basic memory parameters such as data retention, cycling endurance and disturb characteristics on array level are important aspects in stand-alone memory development and can serve as a guideline for embedded solutions. However, one of the key aspects in embedded memory development is compatibility of the memory technology to its underlying complementary metal oxide semiconductor (CMOS) platform. This includes the voltage requirements for logic and memory operation, the need for additional lithographic steps and minimally CMOS invasive integration efforts, as well as the introduction of new materials and related contamination concerns. Especially in state of the art high-k metal gate (HKMG) CMOS technologies at minimum feature size (F) these aspects proof rather challenging when searching for a suitable embedded memory solution. As a consequence most approaches result in large memory cells of multiple F2 or leave a BEoL integration of the memory cell as the only viable option. With the introduction of ferroelectric hafnium oxide, however, a scalable one-transistor (1T) memory solution derived from the conventional HKMG transistor was presented for the 2X nm node. The therewith close resemblance of the memory and logic transistor appears ideally suited for combining nonvolatile data storage and logic circuitry on the same chip. Nevertheless, in order to fulfill these expectations and to ease manufacturing issues this resemblance has to be as close as possible. In the context of a minimally invasive memory integration strategy this means that ideally the ferroelectric hafnium oxide based memory transistor has to adapt to the HKMG transistor in terms of thermal budget and post treatments, vertical and lateral dimensions, the use of stress engineering, as well as metal gate and work function engineering. Based on experimental gate first transistor and metal insulator metal (MIM) capacitor data these aspects together with embedded memory requirements will be analyzed and critically discussed.

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