12 results on '"Delaye, M.T."'
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2. From MEMS to NEMS: Modelling and Characterization of the Non Linear Dynamics of Resonators, a Way to Enhance the Dynamic Range
3. Ultra-high Q.f product laterally-coupled AlN/silicon and AlN/sapphire High Overtone Bulk Acoustic wave Resonators
4. NEMS Devices for Accelerometers Compatible with Thin SOI Technology.
5. Modeling and Test of Nanostructure Fabricated on 160 nm Thin SOI Wafer for In-Ic Integration.
6. SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators
7. A comparison between micromachined pressure sensors using quartz or silicon vibrating beams
8. A comparison between micromachined pressure sensors using quartz or silicon vibrating beams.
9. Ion implantation profiles in bubble garnets
10. A high density capacitive pressure sensor array for fingerprint sensor application
11. A comparison between micromachined pressure sensors using quartz or silicon vibrating beams
12. A high density capacitive pressure sensor array for fingerprint sensor application.
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