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The failure to achieve stable Ohmic contacts in two-dimensional material devices currently limits their promised performance and integration. Here we demonstrate that a phase transformation in a re...

Controlled breakdown has recently emerged as a highly appealing technique to fabricate solid-state nanopores for a wide range of biosensing applications. This technique relies on applying an electric field of approximately 0.6-1 V/nm across the membrane to induce a current, and eventually, breakdown of the dielectric. However, a detailed description of how electrical conduction through the dielectric occurs during controlled breakdown has not yet been reported. Here, we study electrical conduction and nanopore formation in SiN$_x$ membranes during controlled breakdown. We show that depending on the membrane stoichiometry, electrical conduction is limited by either oxidation reactions that must occur at the membrane-electrolyte interface (Si-rich SiN$_x$), or electron transport across the dielectric (stoichiometric Si$_3$N$_4$). We provide several important implications resulting from understanding this process which will aid in further developing controlled breakdown in the coming years, particularly for extending this technique to integrate nanopores with on-chip nanostructures., Comment: 10 pages, 5 figures

Hypothesis A liquid droplet is apt to be deformed within a compact space in various applications. The morphological change of a droplet and vapor accumulation in the confined space between two parallel surfaces with different gaps and surface wettability are expected to significantly affect the evaporation dynamics of the squeezed droplet therein. Experiments Here the evaporation dynamics of a squeezed droplet between two parallel hydrophobic/superhydrophobic surfaces are experimentally explored. By reducing the surface gap from 1000 μm to 400 μm, the evolution of contact angle, contact radius and volume of the evaporating droplet are measured. A diffusion-driven model based on a two-parameter ellipsoidal segment geometry is developed to predict the morphology and volume evolution of a squeezed droplet during evaporation. Findings Evaporation dynamics of a squeezed water droplet via the constant contact radius (CCR) mode, the constant contact angle (CCA) mode, or the mixed mode are experimentally observed. Confirmed by our ellipsoidal segment model, the evaporation of the squeezed droplet is significantly depressed with the decreasing surface gap, which is primarily attributed to vapor enrichment in a more confined geometry. A linear scaling law between droplet volume and evaporation time is unveiled, which is verified by a simplified cylindrical model.

Due to the limit in computing power arising from the Von Neumann bottleneck, computational devices are being developed that mimic neuro-biological processing in the brain by correlating the device characteristics with the synaptic weight of neurons. This platform combines ionic liquid gating and electrowetting for programmable placement/connectivity of the ionic liquid. In this platform, both short-term potentiation (STP) and long-term potentiation (LTP) are realized via electrostatic and electrochemical doping of the amorphous indium gallium zinc oxide (aIGZO), respectively, and pulsed bias measurements are demonstrated for lower power considerations. While compatible with resistive elements, we demonstrate a platform based on transitive amorphous indium gallium zinc oxide (aIGZO) pixel elements. Using a lithium based ionic liquid, we demonstrate both potentiation (decrease in device resistance) and depression (increase in device resistance), and propose a 2D platform array that would enable a much higher pixel count via Active Matrix electrowetting.

Polycrystalline diamond films have unique structural and thermal properties that make them suitable for use in extreme environments. Recently, they have been utilized in accelerator beamlines for electron stripping due to their unique combination of mechanical and thermal properties. Thermal conductivities of nanocrystalline diamond (NCD) and microcrystalline diamond (μCD) films were characterized using photothermally actuated bimaterial cantilevers. Approximately one micrometer thick NCD and μCD cantilevers were fabricated from microwave plasma enhanced chemical vapor deposition grown polycrystalline diamond (PD) films. A layer of gold was sputtered on the diamond film surfaces to make bilayer cantilevers and the thermal response time was measured by photothermally exciting the bilayer cantilevers, causing them to deflect. Finite element thermomechanical modeling of the deflection dynamics in response to photothermal actuation was performed to determine the NCD and μCD thermal diffusivities and conductivities. By fitting the simulated and experimentally observed response times, thermal conductivities of 10 and 60 W/(m-K) were extracted for the NCD and μCD samples, respectively. Expected changes in thermal conductivity of PD in higher temperature regimes are also discussed. In addition to applications of PD films as electron stripping foils, these findings also have implication in fields such as micro/nano-electromechanical systems.

Carbon based electrodes suitable for integration with CMOS readout electronics are of great importance for a variety of emerging applications. In this study, we have looked into the prerequisites for the optimized pyrolytic conversion of 3D printed polymer microstructures and nanostructures with the goal of developing sensing electrodes for a lab-on-CMOS electrochemical system. As a result, we identified conditions for a sequence of anneals in oxidative and inert environments that yield carbonized structures on metallized substrates with improved shape retention, while also providing electrical insulation of the surrounding metal stack. We demonstrated that titanium metal layers can be conveniently used to form electrically insulating titanium oxide on the substrate outside the carbonized structures in a self-aligned fashion. However, significant shrinkage of polymer structures formed by 3D printing or stereolithography is inevitable during their pyrolysis. Furthermore, the catalytically active titanium oxide present during initial stages of carbonization leads to additional loss of carbon and significant artifacts in the resulting structures. To minimize these adverse effects of titanium oxide on the shape retention of the carbonized structures, we developed an optimized processing sequence. Various processing steps in this sequence were characterized in terms of their effects on titanium oxide growth and geometrical changes in the 3D printed structures, while impedance and Raman spectroscopy were performed to evaluate their degree of pyrolytic conversion and, therefore, potential for electrochemical sensing.

Color centers in hexagonal boron nitride have shown enormous promise as single-photon sources, but a clear understanding of electron-phonon interaction dynamics is critical to their development for quantum communications or quantum simulations. We demonstrate photon antibunching in the filtered auto- and cross-correlations $g^{(2)}_{lm}(\tau)$ between zero-, one- and two-phonon replicas of defect luminescence. Moreover, we combine autocorrelation measurements with a violation of the Cauchy-Schwarz inequality in the filtered cross-correlation measurements to distinguish a low quantum-efficiency defect from phonon replicas of a bright defect. With no background correction, we observe single photon purity of $g^{(2)}(0)=0.20$ in a phonon replica and cross-spectral correlations of $g^{(2)}_{lm}(0)=0.18$ between a phonon replica and the zero phonon line. These results illustrate a coherent interface between visible photons and mid-infrared phonons and provide a clear path toward control of photon-phonon entanglement in 2D materials.

All-dielectric metamaterials offer a potential low-loss alternative to plasmonic metamaterials at optical frequencies. Here, we take advantage of the low absorption loss as well as the simple unit cell geometry to demonstrate large-scale (centimeter-sized) all-dielectric metamaterial perfect reflectors made from silicon cylinder resonators. These perfect reflectors, operating in the telecommunications band, were fabricated using self-assembly based nanosphere lithography. In spite of the disorder originating from the self-assembly process, the average reflectance of the metamaterial perfect reflectors is 99.7% at 1530 nm, surpassing the reflectance of metallic mirrors. Moreover, the spectral separation of the electric and magnetic resonances can be chosen to achieve the required reflection bandwidth while maintaining a high tolerance to disorder. The scalability of this design could lead to new avenues of manipulating light for low-loss and large-area photonic applications.

In this paper, high performance top-gated WSe

This file contains extra details regarding metasurface simulations and fabrication

Plasmonic metasurfaces have recently attracted much attention due to their ability to abruptly change the phase of light, allowing subwavelength optical elements for polarization and wavefront control. However, most previously demonstrated metasurface designs suffer from low coupling efficiency and are based on metallic resonators, leading to ohmic loss. Here, we present an alternative approach to plasmonic metasurfaces by replacing the metallic resonators with high-refractive-index silicon cut-wires in combination with a silver ground plane. We experimentally demonstrate that this meta-reflectarray can be used to realize linear polarization conversion with more than 98% conversion efficiency over a 200 nm bandwidth in the short-wavelength infrared band. We also demonstrate optical vortex beam generation using a meta-reflectarray with an azimuthally varied phase profile. The vortex beam generation is shown to have high efficiency over a wavelength range from 1500 to 1600 nm. The use of dielectric resonators in place of their plasmonic counterparts could pave the way for ultraefficient metasurface-based devices at high frequencies.

Arrays of tilted pillars with characteristic heights spanning from hundreds of nanometers to tens of micrometers were created using wafer level processing and used as Leidenfrost ratchets to control droplet directionality. Dynamic Leidenfrost droplets on the ratchets with nanoscale features were found to move in the direction of the pillar tilt while the opposite directionality was observed on the microscale ratchets. This remarkable switch in the droplet directionality can be explained by varying contributions from the two distinct mechanisms controlling droplet motion on Leidenfrost ratchets with nanoscale and microscale features. In particular, asymmetric wettability of dynamic Leidenfrost droplets upon initial impact appears to be the dominant mechanism determining their directionality on tilted nanoscale pillar arrays. By contrast, asymmetric wetting does not provide a strong enough driving force compared to the forces induced by asymmetric vapour flow on arrays of much taller tilted microscale pillars. Furthermore, asymmetric wetting plays a role only in the dynamic Leidenfrost regime, for instance when droplets repeatedly jump after their initial impact. The point of crossover between the two mechanisms coincides with the pillar heights comparable to the values of the thinnest vapor layers still capable of cushioning Leidenfrost droplets upon their initial impact. The proposed model of the length scale dependent interplay between the two mechanisms points to the previously unexplored ability to bias movement of dynamic Leidenfrost droplets and even switch their directionality.

Leidenfrost phenomena on nano- and microstructured surfaces are of great importance for increasing control over heat transfer in high power density systems utilizing boiling phenomena. They also provide an elegant means to direct droplet motion in a variety of recently emerging fluidic systems. Here, we report the fabrication and characterization of tilted nanopillar arrays (TNPAs) that exhibit directional Leidenfrost water droplets under dynamic conditions, namely on impact with Weber numbers ≥40 at T ≥ 325 °C. The directionality for these droplets is opposite to the direction previously exhibited by macro- and microscale Leidenfrost ratchets where movement against the tilt of the ratchet was observed. The batch fabrication of the TNPAs was achieved by glancing-angle anisotropic reactive ion etching of a thermally dewet platinum mask, with mean pillar diameters of 100 nm and heights of 200-500 nm. In contrast to previously implemented macro- and microscopic Leidenfrost ratchets, our TNPAs induce no preferential directional movement of Leidenfrost droplets under conditions approaching steady-state film boiling, suggesting that the observed droplet directionality is not a result of the widely accepted mechanism of asymmetric vapor flow. Using high-speed imaging, phase diagrams were constructed for the boiling behavior upon impact for droplets falling onto TNPAs, straight nanopillar arrays, and smooth silicon surfaces. The asymmetric impact and directional trajectory of droplets was exclusive to the TNPAs for impacts corresponding to the transition boiling regime, linking asymmetric surface wettability to preferential directionality of dynamic Leidenfrost droplets on nanostructured surfaces.

A fabrication technique to create 3D diamond detectors is presented. Deep reactive ion etching was used to create an array of through-diamond vias (TDVs) in a 2 × 2 × 0.15 mm3 electronic grade single crystal diamond detector. The diameter of the TDVs was nominally 30 μm with a pitch of 100 μm between them. The TDVs were filled with chromium using hexavalent chromium electroplating to create 3D electrodes, which were connected electrically by interdigitated electrodes. The fabricated 3D diamond detector responded to both alpha particles and X-rays, exhibiting a charge collection efficiency of 52.3% at 200 V. Comparing to a diamond detector with the same interdigitated electrodes, but no 3D electrodes, confirms that the 3D electrodes are electrically active within the device. The average resistivity of the 3D electrodes is 2.89 ± 0.03 × 10−5 Ω cm, near that of bulk chromium. These results indicate that this fabrication technique is a potential option for 3D diamond detector fabrication.

We present an experimental demonstration of third harmonic generation from Fano-resonant all-dielectric metasurfaces. The metasurfaces have a conversion enhancement factor of 1.5×105 and an absolute conversion efficiency on the order of 10-6.

Metasurface analogues of electromagnetically induced transparency (EIT) have been a focus of the nanophotonics field in recent years, due to their ability to produce high-quality factor (Q-factor) resonances. Such resonances are expected to be useful for applications such as low-loss slow-light devices and highly sensitive optical sensors. However, ohmic losses limit the achievable Q-factors in conventional plasmonic EIT metasurfaces to values

In this paper, high performance top-gated WSe2 field effect transistor (FET) devices are demonstrated via a two-step remote plasma assisted ALD process. High-quality, low-leakage aluminum oxide (Al2O3) gate dielectric layers are deposited onto the WSe2 channel using a remote plasma assisted ALD process with an ultrathin (~1 nm) titanium buffer layer. The first few nanometers (~2 nm) of the Al2O3 dielectric film is deposited at relatively low temperature (i.e. 50 ?C) and remainder of the film is deposited at 150 ?C to ensure the conformal coating of Al2O3 on the WSe2 surface. Additionally, an ultra-thin titanium buffer layer is introduced at the WSe2 channel surface prior to ALD process to mitigate oxygen plasma induced doping effects. Excellent device characteristics with current on?off ratio in excess of 106 and a field effect mobility as high as 70.1 cm2 V?1 s?1 are achieved in a few-layer WSe2 FET device with a 30 nm Al2O3 top-gate dielectric. With further investigation and careful optimization, this method can play an important role for the realization of high performance top gated FETs for future optoelectronic device applications.

Polarization beam splitters, devices that separate the two orthogonal polarizations of light into different propagation directions, are among the most ubiquitous optical elements. However, traditionally polarization splitters rely on bulky optical materials, while emerging optoelectronic and photonic circuits require compact, chip-scale polarization splitters. Here, we show that a rectangular lattice of cylindrical silicon Mie resonators functions as a polarization splitter, efficiently reflecting one polarization while transmitting the other. We show that the polarization splitting arises from the anisotropic permittivity and permeability of the metasurface due to the twofold rotational symmetry of the rectangular unit cell. The high polarization efficiency, low loss and low profile make these metasurface polarization splitters ideally suited for monolithic integration with optoelectronic and photonic circuits. This article is part of the themed issue ‘New horizons for nanophotonics’.

Microbial communities are incredibly complex systems that dramatically and ubiquitously influence our lives. They help to shape our climate and environment, impact agriculture, drive business, and have a tremendous bearing on healthcare and physical security. Spatial confinement, as well as local variations in physical and chemical properties, affects development and interactions within microbial communities that occupy critical niches in the environment. Recent work has demonstrated the use of silicon based microwell arrays, combined with parylene lift-off techniques, to perform both deterministic and stochastic assembly of microbial communities en masse, enabling the high-throughput screening of microbial communities for their response to growth in confined environments under different conditions. The implementation of a transparent microwell array platform can expand and improve the imaging modalities that can be used to characterize these assembled communities. Here, the fabrication and characterization of a next generation transparent microwell array is described. The transparent arrays, comprised of SU-8 patterned on a glass coverslip, retain the ability to use parylene lift-off by integrating a low temperature atomic layer deposition of silicon dioxide into the fabrication process. This silicon dioxide layer prevents adhesion of the parylene material to the patterned SU-8, facilitating dry lift-off, and maintaining the ability to easily assemble microbial communities within the microwells. These transparent microwell arrays can screen numerous community compositions using continuous, high resolution, imaging. The utility of the design was successfully demonstrated through the stochastic seeding and imaging of green fluorescent protein expressing Escherichia coli using both fluorescence and brightfield microscopies.

The use of two-dimensional (2D) materials in optoelectronics has attracted much attention due to their fascinating optical and electrical properties. However, the low optical absorption of 2D materials arising from their atomic thickness limits the maximum attainable external quantum efficiency. For example, in the visible and near-infrared regimes monolayer MoS2 and graphene absorb only ∼10% and 2.3% of incoming light, respectively. Here, we experimentally demonstrate the use of Fano-resonant photonic crystals to significantly boost absorption in atomically thin materials. Using graphene as a test bed, we demonstrate that absorption in the monolayer thick material can be enhanced to 77% within the telecommunications band, the highest value reported to date. We also show that the absorption in the Fano-resonant structure is non-local, with light propagating up to 16 μm within the structure. This property is particularly beneficial in harvesting light from large areas in field-effect-transistor based graph...

This research focuses on the benefits and properties of TiO2–Al2O3 nanostack thin films deposited on Ga2O3/GaN by plasma-assisted atomic layer deposition (PA–ALD) for gate dielectric development. This combination of materials achieved a high dielectric constant, a low leakage current, and a low interface trap density. Correlations were sought between the films' structure, composition, and electrical properties. The gate dielectrics were approximately 15 nm thick and contained 5.1 nm TiO2, 7.1 nm Al2O3, and 2 nm Ga2O3 as determined by spectroscopic ellipsometry. The interface carbon concentration, as measured by x-ray photoelectron spectroscopy depth profile, was negligible for GaN pretreated by thermal oxidation in O2 for 30 min at 850 °C. The RMS roughness slightly increased after thermal oxidation and remained the same after ALD of the nanostack, as determined by atomic force microscopy. The dielectric constant of TiO2–Al2O3 on Ga2O3/GaN was increased to 12.5 compared to that of pure Al2O3 (8–9) on GaN. In addition, the nanostack's capacitance–voltage (C-V) hysteresis was small, with a total trap density of 8.74 × 1011 cm−2. The gate leakage current density (J = 2.81 × 10−8 A/cm2) was low at +1 V gate bias. These results demonstrate the promising potential of PA–ALD deposited TiO2/Al2O3 for serving as the gate dielectric on Ga2O3/GaN based MOS devices.

Directional control of droplet motion at room temperature is of interest for applications such as microfluidic devices, self-cleaning coatings, and directional adhesives. Here, arrays of tilted pillars ranging in height from the nanoscale to the microscale are used as structural ratchets to directionally transport water at room temperature. Water droplets deposited on vibrating chips with a nanostructured ratchet move preferentially in the direction of the feature tilt while the opposite directionality is observed in the case of microstructured ratchets. This remarkable switch in directionality is consistent with changes in the contact angle hysteresis. To glean further insights into the length scale dependent asymmetric contact angle hysteresis, the contact lines formed by a nonvolatile room temperature ionic liquid placed onto the tilted pillar arrays were visualized and analyzed in situ in a scanning electron microscope. As a result, the ability to tune droplet directionality by merely changing the length scale of surface features all etched at the same tilt angle would be a versatile tool for manipulating multiphase flows and for selecting droplet directionality in other lap-on-chip applications.

We present a lithography-free technological strategy that enables fabrication of large area substrates for surface-enhanced Raman spectroscopy (SERS) with excellent performance in the red to NIR spectral range. Our approach takes advantage of metal dewetting as a facile means to create stochastic arrays of circular patterns suitable for subsequent fabrication of plasmonic disc-on-pillar (DOP) structures using a combination of anisotropic reactive ion etching (RIE) and thin film deposition. Consistent with our previous studies of individual DOP structures, pillar height which, in turn, is defined by the RIE processing time, has a dramatic effect on the SERS performance of stochastic arrays of DOP structures. Our computational analysis of model DOP systems confirms the strong effect of the pillar height and also explains the broadband sensitivity of the implemented SERS substrates. Our Raman mapping data combined with SEM structural analysis of the substrates exposed to benzenethiol solutions indicates that clustering of shorter DOP structures and bundling of taller ones is a likely mechanism contributing to higher SERS activity. Nonetheless, bundled DOP structures appeared to be consistently less SERS-active than vertically aligned clusters of DOPs with optimized parameters. The latter are characterized by average SERS enhancement factors above 10(7).

We have performed near-field scanning microwave microscopy (SMM) of graphene grown by chemical vapor deposition. Due to the use of probe-sample capacitive coupling and a relatively high ac frequency of a few GHz, this scanning probe method allows mapping of local conductivity without a dedicated counter electrode, with a spatial resolution of about 50 nm. Here, the coupling was enabled by atomic layer deposition of alumina on top of graphene, which in turn enabled imaging both large-area films, as well as micron-sized islands, with a dynamic range covering a low sheet resistance of a metal film and a high resistance of highly disordered graphene. The structures of graphene grown on Ni films and Cu foils are explored, and the effects of growth conditions are elucidated. We present a simple general scheme for interpretation of the contrast in the SMM images of our graphene samples and other two-dimensional conductors, which is supported by extensive numerical finite-element modeling. We further demonstrate that combination of the SMM and numerical modeling allows quantitative information about the sheet resistance of graphene to be obtained, paving the pathway for characterization of graphene conductivity with a sub-100 nm special resolution.