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With a view to improve measurements, this paper presents a statistical approach for characterizing the behaviour of roughness parameters based on measurements performed on ground surface topographies (grit #080/#120). A S neoxTM (Sensofar®, Terrassa, Spain), equipped with three optical instrument modes (Focus Variation (FV), Coherence Scanning Interferometry (CSI), and Confocal Microscopy (CM)), is used according to a specific measurement plan, called Morphomeca Monitoring, including topography representativeness and several time-based measurements. Previously applied to the Sa parameter, the statistical approach based here solely on the Quality Index (QI) has now been extended to a multi-parameter approach. Firstly, the study focuses on detecting and explaining parameter disturbances in raw data by identifying and quantifying outliers of the parameter’s values, as a new first indicator. This allows us to draw parallels between these outliers and the surface topography, providing reflection tracks. Secondly, the statistical approach is applied to highlight disturbed parameters concerning the instrument mode used and the concerned grit level with two other indicators computed from QI, named homogeneity and number of modes. The applied method shows that a cleaning of the data containing the parameters values is necessary to remove outlier values, and a set of roughness parameters could be determined according to the assessment of the indicators. The final aim is to provide a set of parameters which best describe the measurement conditions based on monitoring data, statistical indexes, and surface topographies. It is shown that the parameters Sal, Sz and Sci are the most reliable roughness parameters, unlike Sdq and S5p, which appear as the most unstable parameters. More globally, the volume roughness parameters appear as the most stable, differing from the form parameters. This investigated point of view offers thus a complementary framework for improving measurement processes. In addition, this method aims to provide a global and more generalizable alternative than traditional methods of uncertainty calculation, based on a thorough analysis of multi-parameter and statistical indexes.

Stitching methods allow one to measure a wider surface without the loss of resolution. The observation of small details with a better topographical representation is thus possible. However, it is not excluded that stitching methods generate some errors or aberrations on topography reconstruction. A device including confocal microscopy (CM), focus variation (FV), and coherence scanning interferometry (CSI) instrument modes was used to chronologically follow the drifts and the repositioning errors on stitching topographies. According to a complex measurement plan, a wide measurement campaign was performed on TA6V specimens that were ground with two neighboring SiC FEPA grit papers (P#80 and P#120). Thanks to four indicators (quality, drift, stability, and relevance indexes), no measurement drift in the system was found, indicating controlled stitching and repositioning processes for interferometry, confocal microscopy, and focus variation. Measurements show commendable stability, with interferometric microscopy being the most robust, followed by confocal microscopy, and then focus variation. Despite variations, robustness remains constant for each grinding grit, minimizing interpretation biases. A bootstrap analysis reveals time-dependent robustness for confocal microscopy, which is potentially linked to human presence. Despite Sa value discrepancies, all three metrologies consistently discriminate between grinding grits, highlighting the reliability of the proposed methodology.