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4. Prediction and measurement of boundary waves at the interface between LiNb[O.sub.3] and silicon

Author

Gachon, D., Daniau, W., Courjon, E., Laude, V., Ballandras, S., and Majjad, H.

Subjects
Lithium alloys -- Acoustic properties, Lithium alloys -- Electric properties, Niobium -- Electric properties, Niobium -- Acoustic properties, Photoresistors -- Design and construction, Silicon -- Electric properties, Silicon -- Acoustic properties, Acoustic surface waves -- Analysis, Business, Electronics, Electronics and electrical industries
Published
2010

5. Lamb wave transducers built on periodically poled Z-cut LiNb[O.sub.3] wafers

Author

Courjon, E., Courjal, N., Daniau, W., Lengaigne, G., Gauthier-Manuel, L., Ballandras, S., and Hauden, J.

Subjects
Piezoelectric transducers -- Research, Piezoelectric ceramics -- Usage, Piezoelectric ceramics -- Research, Physics
Abstract

The development of piezoelectric transducers based on periodically poled ferroelectric domains of Z-cut LiNb[O.sub.3] is examined. Elliptically polarized modes as well as quasipure longitudinal waves are observed and the robustness of the devices to lapping and polishing operations is tested.

Published
2007

6. Theoretical analysis of damping effects of guided elastic waves at solid/fluid interfaces

Author

Ballandras, S., Reinhardt, A., Khelif, A., Wilm, M., Laude, V., Daniau, W., and Blondeau-Patissier, V.

Subjects
Elastic waves -- Acoustic properties, Viscous flow -- Analysis, Physics
Abstract

A theoretical description of ideal and viscous fluid media is proposed to address the problem of modeling damping effects of surface acoustic waves and more generally of any guided elastic waves at the interface between viscous fluids and solids. The influence of acoustic radiation and viscosity effects on different kinds of waves excited on various substrates is reported and discussed.

Published
2006

8. Design and fabrication of a capacitance switch array usable on a DTCXO

Author

Daniau, W., Marianneau, G., Girardet, E., and Marguier, J.

Subjects
Switched capacitor circuits -- Design and construction, Crystal oscillators -- Research, Business, Electronics, Electronics and electrical industries
Abstract

A 12-b capacitance switch array (CSA) has been integrated in a 20-pin dual in-line package to replace the conventional compensation system, which uses a digital analog converter coupled with a varactor, in a digitally temperature-compensated crystal oscillator (DTCXO). The CSA device can be used to manufacture high-quality DTCXOs with low power and supply voltage requirements. Simulations of DTCXOs using the CSA device show that high efficiency can be achieved for the compensation of third-order quartz crystals.

Published
1996

12. A mixed finite element/boundary element approach to simulate complex guided elastic wave periodic transducers.

Author

Ballandras, S., Lardat, R., Wilm, M., Pastureaud, Th., Reinhardt, A., Champavert, N., Steichen, W., Daniau, W., Laude, V., Armati, R., and Martin, G.

Subjects
BOUNDARY element methods, FINITE element method, ELASTIC waves, TRANSDUCERS, SURFACE waves (Fluids), WAVEGUIDES, ELECTRODES
Abstract

The development of new surface acoustic wave devices exhibiting complicated electrode patterns or layered excitation transducers has been favored by an intense innovative activity in this area. For instance, devices exhibiting interdigital transducers covered by piezoelectric or dielectric layers have been fabricated and tested, but the design of such structures requires simulation tools capable to accurately take into account the actual shape of the wave guide elements. A modeling approach able to address complicated surface acoustic wave periodic structures (defined in the saggital plane) exhibiting any geometry then has been developed and implemented. It is based on the combination of a finite element analysis and a boundary element method. A first validation of the computation is reported by comparison with standard surface wave devices. Surface transverse wave resonators covered by amorphous silica have been built and consequently used for theory/experiment assessment. Also the case of recessed electrodes has been considered. The proposed model offers large opportunities for modeling any two-dimensional periodic elastic wave guide. [ABSTRACT FROM AUTHOR]

Published
2009
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13. Lamb wave transducers built on periodically poled Z-cut LiNbO3 wafers.

Author

Courjon, E., Courjal, N., Daniau, W., Lengaigne, G., Gauthier-Manuel, L., Ballandras, S., and Hauden, J.

Subjects
SEMICONDUCTOR wafers, ELECTRIC equipment, FINITE element method, TRANSDUCERS, ELECTRONIC equipment, SEMICONDUCTORS, PIEZOELECTRIC devices
Abstract

In this paper, the development of piezoelectric transducers based on periodically poled ferroelectric domains is investigated. Optical quality Z-cut LiNbO3 wafers have been used for the fabrication of test devices operating in the range of 10–100 MHz. The fabrication process is detailed and the characterization results are reported. A very good agreement between theoretical predictions achieved by periodic finite element analysis and experiments is observed, allowing for a precise identification of the excited modes. Elliptically polarized modes as well as quasipure longitudinal waves are pointed out. The robustness of the devices to lapping and polishing operations has also been tested. The possible utilizations of such transducers are discussed to conclude the paper. [ABSTRACT FROM AUTHOR]

Published
2007
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14. Periodic finite element/boundary element modeling of capacitive micromachined ultrasonic transducers.

Author

Ballandras, S., Wilm, M., Daniau, W., Reinhardt, A., Laude, V., and Armati, R.

Subjects
ULTRASONIC transducers, FINITE element method, BOUNDARY element methods, NUMERICAL analysis, ELECTROACOUSTIC transducers, ELECTROMECHANICAL devices
Abstract

The possibility to excite and detect acoustic waves in fluids using capacitive transducers built on silicon using surface micromachining offers attractive opportunities in the manufacturing of high quality low cost imaging probes. As in the case of standard probe transducers, simulation codes are required to accurately design such devices. The periodic structures extensively used for these capacitive transducers has to be accounted for. In this work, a two-dimensional finite element analysis of capacitive micromachined ultrasonic transducers (cMUT) is proposed, taking into account periodicity and radiation in fluids. The convergence of the calculation is verified using different computation approaches. It is then shown that the periodic computations provide a rapid and precise analysis of the cMUT compared to non periodic calculations. The mutual displacements are deduced from the periodic harmonic calculation, providing an efficient estimation of cross-talk phenomena arising for cMUT radiating in water. The capability of cMUT operating under such conditions to generate a low velocity wave guided at the fluid/silicon interface is theoretically pointed out. [ABSTRACT FROM AUTHOR]

Published
2005
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15. Simulations of surface acoustic wave devices built on stratified media using a mixed finite element/boundary integral formulation.

Author

Ballandras, S., Reinhardt, A., Laude, V., Soufyane, A., Camou, S., Daniau, W., Pastureaud, T., Steichen, W., Lardat, R., Solal, M., and Ventura, P.

Subjects
ACOUSTIC surface wave devices, FINITE element method, SURFACE energy, FLUID dynamics, SURFACE waves (Fluids), BOUNDARY element methods
Abstract

The demand for high frequency surface acoustic wave devices for modern telecommunication applications imposes the development of devices able to answer the manufacturer requirements. The use of high velocity substrates for which a piezoelectric layer is required to excite and detect surface waves has been widely investigated and requires the implementation of accurate theoretical tools to identify the best combinations of material. The present paper proposes a mixed formulation combining finite element analysis with a boundary integral method to accurately simulate the capability of massive periodic interdigital transducers to excite and detect guided acoustic waves in layered media. The proposed model is exploited for different typical configurations. © 2004 American Institute of Physics. [ABSTRACT FROM AUTHOR]

Published
2004
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16. Analysis and experimental study of surface transverse wave resonators on quartz.

Author

Gavignet, E., Ballandras, S., Bigler, E., Bonjour, C., Renaud, J.-C., and Daniau, W.

Subjects
RESONATORS, SHEAR waves, QUARTZ, RADIO wave propagation
Abstract

Presents an analysis and experimental study of surface transverse wave (STW) resonators on quartz. Description of an STW propagation model; Structure of a cavity with a periodic discontinuity grating for guiding STWs; Definition of the transfer matrix for a periodic grating of metal strips.

Published
1996
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17. Characterization of WO3 layers deposited on quartz and lithium niobate SAW resonators for the design of gas sensors

Author

David, M., Arab, Madjid, Gavarri, J., Rabus, D., Daniau, W., Baron, T., Friedt, J., Delmas, L., Ballandras, S., Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), and Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Finite element methods, Surface acoustic waves, [PHYS.PHYS]Physics [physics]/Physics [physics], Temperature sensors, Lithium niobate, Surface acoustic wave devices, Films
Abstract

International audience; Surface acoustic wave (SAW) gas sensors generally require the use of a reactive layer for molecule adsorption. WO 3 has been identified for a long time as a high potential sensitive layer particularly for NH 3 , NO X , CO, etc. We report here on the characterization of elastic properties of such material using the dispersion behavior of SAW propagating under gratings passivated wich WO 3 films of various thicknesses. Quartz as well as LiNbO 3 SAW devices are used in that purpose, allowing for the derivation of a reliable data set. Complementary structural characterization using direct measurement techniques (DRX, AFM, TEM,) are reported to confirm the analysis deduced from SAW measurements. As a conclusion, the exploitation of WO 3 for SAW-based sensor is discussed.

Published
2011
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19. Single-crystal based composite wafers for high quality passive RF microdevices

Author

Ballandras, S., Daniau, W., Ulliac, G., Queste, S., Romand, J.-P., Clatot, S., Gachon, D., Courjon, E., Hermelin, D., Bassignot, F., Pijolat, M., Defaÿ, E., Deguet, C., Reinhardt, A., Aïd, M., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)

Subjects
[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic
Abstract

International audience; New guiding principles and concepts are currently investigated for developing high frequency devices capable to answer the RF manufacturer demand for telecommunication an remote transmission modern components. Beside the use of physically or chemically deposited piezoelectric overlays, the use of composite wafers composed by single crystal layers and wafers obtained by wafer bonding and lapping/polishing techniques offers attractive opportunities for overpassing the known limitations of acoustics-based radio-frequency devices. In this paper, we present different approaches for manufacturing such composite wafers and we describe different applications taking advantage of their unique characteristics. Lithium niobate is particularly considered for the piezoelectric layers because of its exceptional piezoelectric properties and its very high acoustic quality, and various substrate such as silicon, sapphire and lithium niobate again are used to guide and trap the excited waves. State-of-the-art Surface Acoustic Wave (SAW) devices, Harmonic Bulk Acoustic Resonators (HBARS) and Periodically Poled Transducers developed on such wafers are presented to illustrate the potential of this technological approach.

Published
2009

20. Epitaxial Pb(Zr0.2Ti0.8)O3 Thin Layers for the Fabrication of Radio-Frequency Elastic Wave Transducers

Author

Salut, R., Daniau, W., Ballandras, S., Gariglio, Stefano, Triscone, Gilles, and Triscone, Jean-Marc

Subjects
Fabrication, Substrates, Optical films, Radio frequency, Transducers, Optical reflection, Sputtering, ddc:500.2, Argon, Gas insulation, Temperature distribution
Abstract

In this paper, we investigate the capability of epitaxial Pb(Zr0.2Ti0.8)O3 thin films for RF applications. Films have been grown on insulating (001) SrTiO3 single crystal substrates by off-axis magnetron sputtering in 180 mTorr of an oxygen/argon mixture at a substrate temperature of 510degC. Contrary to PZT layers obtained by conventional sputtering or sol-gel techniques, still exhibiting granular structures, the films are extremely smooth and exhibit finite size effects around the (001) reflection peaks, allowing the measurement of the thickness (150 nm and 200 nm in this case). Curie temperature of the films is measured close to 680degC, which is much higher than standard PZT and allows for operating on an extended temperature range. Focused ion beam (FIB) etching techniques have been used to fabricate standard inter-digital transducers (IDTs). Electromechanical coupling in the vicinity of 3% with Q factors near 100 was found in the frequency range 3.5-5 GHz.

Published
2007

21. Theoretical analysis of damping effects of acoustic waves at solid/fluid interfaces using a mixed periodic FEA/BEM approach

Author

Reinhardt, A., Abdelkrim Khelif, Wilm, M., Laude, V., Daniau, W., Blondeau-Pâtissier, V., Lengaigne, G., Ballandras, S., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], ComputingMilieux_MISCELLANEOUS, [PHYS.MECA.ACOU]Physics [physics]/Mechanics [physics]/Acoustics [physics.class-ph]
Abstract

International audience

Published
2005

22. Measuring the Inner Body Temperature using a Wireless Temperature SAW-sensor-based System

Author

Martin, G., Berthelot, P., Daniau, W., Virginie BLONDEAU-PATISSIER, Guichardaz, B., Ballandras, S., Lambert, A., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Physique et Métrologie des Oscillateurs, Cancéropôle du Grand Est-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Génétique et biologie des populations de crustacés (GBPC), and Université de Poitiers-Centre National de la Recherche Scientifique (CNRS)

Subjects
ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2005

23. Integrated Love Wave device dedicated to biomolecular interactions measurements in aquous media

Author

Virginie BLONDEAU-PATISSIER, Boireau, W., Cavallier, B., Lengaigne, G., Daniau, W., Ballandras, S., Martin, G., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Laboratoire Magmas et Volcans (LMV), Observatoire de Physique du Globe de Clermont-Ferrand (OPGC), Université Blaise Pascal - Clermont-Ferrand 2 (UBP)-Institut national des sciences de l'Univers (INSU - CNRS)-Centre National de la Recherche Scientifique (CNRS)-Université Blaise Pascal - Clermont-Ferrand 2 (UBP)-Institut national des sciences de l'Univers (INSU - CNRS)-Centre National de la Recherche Scientifique (CNRS)-Université Jean Monnet - Saint-Étienne (UJM)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de physique des matériaux (LPM), Université Henri Poincaré - Nancy 1 (UHP)-Institut National Polytechnique de Lorraine (INPL)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Physique et Métrologie des Oscillateurs, Cancéropôle du Grand Est-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Institut national des sciences de l'Univers (INSU - CNRS)-Université Jean Monnet [Saint-Étienne] (UJM)-Université Blaise Pascal - Clermont-Ferrand 2 (UBP)-Observatoire de Physique du Globe de Clermont-Ferrand (OPGC), Université Blaise Pascal - Clermont-Ferrand 2 (UBP)-Institut national des sciences de l'Univers (INSU - CNRS)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS), Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)-Cancéropôle du Grand Est

Published
2005

24. A Novel Piezoelectric Interdigital Transducer for the Excitation of High Frequency Surface Acoustic Wave

Author

Daniau, W., K. Sarin Kumar, A., Paruch, P., Triscone, J.-M., Ballandras, S., Miglierina, Myriam, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Université, Département de Physique et matière Condensé (UNIGE - DPMC), and Université de Genève (UNIGE)

Subjects
ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2004

25. 'Anhybride hexafluorhydric acid sensors with a high sensibility

Author

Virginie BLONDEAU-PATISSIER, Ballandras, S., Lengaigne, G., Nadal M.H., Daniau, W., Martin, G., Eyraud, V., Hauden, D., Blind, P., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2004

26. Résonateurs à ondes de surface haute fréquence sur substrat composite LiNbO3/Si réalisé par transfert de couches sur silicium et implantation ionique

Author

Solal, M., Pastureaud, Th., Ballandras, S., Aspar, B., Biasse, B., Daniau, W., Steichen, W., Laude, V., Laens, A., Temex, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Physique et Métrologie des Oscillateurs, Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)-Cancéropôle du Grand Est, Institute of Atomic Physics, and Université de Roumanie

Published
2004

27. Caractérisation comparative de transducteurs bimorphes AlN/Si et PZT/Si à modes de flexion

Author

Dogheche, Karim, Robert, Laurent, Daniau, W., Ballandras, S., Jeannot, J.-C., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)

Published
2004

29. High frequency-low loss SAW resonators built on NanoCrystalline Diamond-based substrate

Author

Braun, L., primary, Boillot, P., additional, Renaud, S., additional, Girardet, E., additional, Martin, G., additional, Salut, R., additional, Daniau, W., additional, Gesset, C., additional, Bergonzo, P., additional, Saada, S., additional, Courjon, E., additional, Laroche, T., additional, Ballandras, S., additional, Desgrez, S., additional, Raynaud, L., additional, Aissa, K. Ait, additional, Legrani, O., additional, Sarry, F., additional, Vincent, B., additional, Mazria, O. El, additional, Laurent, S., additional, and Nallatamby, J.-C., additional

Published
2014
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30. Miniaturized Potentiometric Sensors Based on pH-Dependent Polymer

Author

Lakard, B., Herlem, G., Michel de Labachelerie, Jeannot J.C., Daniau, W., Laurent Robert, Spajer, D., Martin, G., Fahys, B., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Published
2003

31. Displacement of droplets on surface using ultrasonics vibration

Author

Alzuaga, S., Daniau, W., Jf., Manceau, Ballandras, S., Bastien, F., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Published
2003

32. Fabrication of a pMUT using silicon bulk micromachining and a sputtered PZT layer

Author

Daniau, W., Dogheche, K., Ballandras, S., ERIC CATTAN, Denis Remiens, Steichen, W., Blind, P., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN (MAMINA - IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520 (IEMN-DOAE), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Institute of Atomic Physics, Université de Roumanie, Temex, CETEHOR [Département technique du Comité FRANCECLAT], Comité Francéclat, Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), and Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)

Published
2002

33. oward a virtual laboratory for the design of acoustic imaging systems

Author

Ballandras, S., Wilm, M., Laude, V., Daniau, W., Dogeche, K., Pastureaud, T., Lardat, R., Steichen, W., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Published
2002

34. Effect of C-axis misalignement on sapphire disk resonator performances

Author

Di Monaco, O., Daniau, W., Kersalé, Y., Giordano, V., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
[SPI.OTHER]Engineering Sciences [physics]/Other
Published
1998

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