RWTH Aachen University, Diss., 2016; Schriften des Forschungszentrums Jülich. Reihe Energie & Umwelt 359, 1 Online-Ressource (vi, 172, XI Seiten) : Illustrationen, Diagramme(2017)., To further increase the energy conversion efficiency of thin-film silicon solar cells, the minimization of reflection losses by effective light trapping is essential. Light trapping is achieved by introducing textured surfaces in the layer stack of a solar cell. The incoming light is scattered at the textured interfaces, the light paths within the absorber layer are enhanced and the chance of absorption rises. This work aims to develop an industrial feasible laser-based process for the texturing of the aluminium-doped zinc oxide (ZnO:Al) layer used as front contact in solar cells. While wet chemical etching of the ZnO:Al is an established process for the texturing, a laser-based process offers higher flexibility and controllability of texture scattering properties. Accordingly, the light trapping can be engineered to fit the needs of a solar cell. Within this work, five laser-based processing techniques are evaluated for their applicability to texture ZnO:Al layers in an industrial environment. The direct writing of textures is capable of producing the right feature sizes and is highly flexible. However, it has strong demands on the experimental setup and requires long processing times. Refocusing the laser light by a particle lens array as well as laser-induced chemical etching also lack the industrial feasibility due to the complex processing setup. The creation of laser-induced periodical surface structures (LIPSS) by ultra-short pulse lasers promises small feature sizes with a simple setup. However, the flexibility of feature sizes and shapes is limited. Only direct laser interference patterning (DLIP) is capable of producing a large variety of adjustable textures with right-sized features while being able to cover large areas in reasonable amounts of time with an industrial feasible processing setup.To further investigate DLIP processing, a highly flexible three-beam interference setup was designed and implemented. Within the setup, the beam properties of the three partial beams can be adjusted completely independently. By controlling power, polarization and angle of incidence of the individual beams, the intensity distribution within the overlapping volume is adjusted. This intensity distribution then translates to a topography on the ZnO:Al sample. With one single laser pulse, hundreds of thousands strictly periodic micrometer and submicrometer-sized features are created. The general geometry of the features can be varied and the spatial periodicity can be adjusted deliberately and continuously. The electrical properties of the ZnO:Al remain nearly unchanged and although there is a minor loss in transparency, the incident light is diffracted into distinct and adjustable patterns. Fully functional thin-film silicon solar cells are manufactured on exemplary DLIP textures without growth limitations or adhesion problems. Whereas these unoptimized solar cells show better light trapping behavior than untextured cells, they do not fully reach the level of cells optimized for and deposited on the established wet etched reference texture. In order to improve and optimize DLIP processing, the variety of producible textures as well as their potential light trapping capabilities are described by an extensive model. By mimicking the propagation of the beams through the various optical components, the influence of the experimental setup on the beam properties is determined and the corresponding intensity distribution in the interference volume is calculated. From this intensity distribution the energy intake in the material, the subsequent heat diffusion within the material as well as the resulting ablation is modeled. Consequently, the model is capable of predicting the expected surface texture for a given set of experimental setup parameters. Furthermore, a scalar model for an expected light trapping efficiency of a given texture is adapted to the use on laser textured surfaces. Accordingly, a light trapping efficiency can be assigned to each modeled texture and its potential performance in a solar cell can be evaluated. Hence, the best achievable texture within the limits of the experimental setup is determined by an optimization algorithm. Likewise, the general potential of DLIP processing is evaluated. It is revealed that solar cells deposited on optimized DLIP-textured front contacts are expected to yield higher efficiencies than cells on standard wet chemical etched front contacts. Especially DLIP with multi-pulse processing and/or pulse durations in the subnanosecond regime shows the potential to improve light trapping efficiencies far beyond the ones of state-of-the-art textures., Published by Forschungszentrum Jülich GmbH, Zentralbibliothek, Jülich