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We present our work in the European project MORPHIC to extend an established silicon photonics platform with low-power and non-volatile micro-electromechanical (MEMS) actuators to demonstrate large-scale programmable photonic integrated circuits (PICs).

We present our work to extend silicon photonics with MEMS actuators to enable low-power, large scale programmable photonic circuits. For this, we start from the existing iSiPP50G silicon photonics platform of IMEC, where we add free-standing movable waveguides using a few post-processing steps. This allows us to implement phase shifters and tunable couplers using electrostatically actuated MEMS, while at the same time maintaining all the original functionality of the silicon photonics platform. The MEMS devices are protected using a wafer-level sealing approach and interfaced with custom multi-channel driver and readout electronics.

Programmable photonic chips allow flexible reconfiguration of on-chip optical connections, controlled through electronics and software. We will present the recent progress of such complex photonic circuits powered by silicon photonic MEMS actuators.

A broadband and temperature tolerant liquid- controlled adiabatic waveguide coupler (LCC) is realized. The LCC with silicon nitride (SiN) waveguides is designed to be com- patible with liquids that can be actuated by an electrowetting-on- dielectric (EWOD) system. This proof-of-principle demonstration with manual actuation paves the way towards the realization of non-volatile optical switch systems. A 630 μm long LCC configured as a 1 × 2 switch has a measured insertion loss less than 1.5 dB and a crosstalk less than -14 dB for both bar and cross state over the telecommunication wavelength range 1260 nm to 1630 nm. Furthermore, the LCC is tolerant to variations in temperature. The measured excess insertion loss over the temperature range 21°C to 73°C is less than 0.3 dB for bar and cross state, over the same wavelength range., info:eu-repo/semantics/published

We present a silicon photonics technology extended with low-power MEMS scalable to large circuits. This enables us to make photonic waveguide meshes that can be reconfigured using electronics and software.

A 16×16 silicon photonic switch circuit suitable for non-volatile operations has been realized. The switch circuit consists of dilated switch elements with liquid-controlled adiabatic waveguide couplers. The switch with a cross-bar architecture is compatible with a non-volatile electrowetting-on-dielectric system for optical actuation. The measured fiber-to-fiber loss is less than 18.9 dB over the wavelength range from 1500 to 1630 nm. At a wavelength of 1550 nm, the loss is between 8.5 and 17.4 dB depending on the length of the light path. The crosstalk of the switch is better than -50 dB over the wavelength range from 1500 to 1630 nm.

A broadband and nonvolatile liquid controlled silicon photonics switch is designed and fabricated. The switch consists of an adiabatic coupler where the oxide above one of the waveguides is removed. Switching is realized by exposing this waveguide to liquids with different refractive indices. The switch design is based on self-consistent orthogonal coupled-mode theory. The measured crosstalk of a 1.4-mm-long switch is less than $- {\text{38}}$ dB and $-{\text{11}}$ dB over a 100-nm wavelength range for bar and cross state, respectively. The insertion loss is less than 1 dB. Also the influence of the silicon waveguide thickness and the difference in liquid refractive indices on the switch performance is studied. Furthermore, an improved performance in cross state is demonstrated when a switch is actuated by a gas and a liquid. With a gas–liquid system a very large difference in cladding refractive index can be obtained.

We demonstrate a non-volatile optical power switch, fabricated by femtosecond laser inscription in a fused silica substrate, with switching operation based on microfluidics-controlled total internal reflection. The switch consists of crossed waveguides and a rectangular, high aspect ratio microfluidic channel, located at the waveguide crossing. The switching between total internal reflection and transmission at the channel wall is determined by the refractive index of the medium inside the channel. Femtosecond laser inscription allows for co-integration of low-loss optical waveguides and channels with smooth sidewalls and thus the fabrication of low insertion loss switches that are broadband and show low polarization dependent losses. The measured total internal reflection loss of the fabricated switch is about 1.5 dB at the wavelength 1550 nm. The loss due to transmission through the channel filled with refractive index matching liquid is about 0.5 dB. Detailed finite difference time domain and beam propagation method simulations of the switch's performance indicate that the losses can be further reduced by optimizing its geometry, together with further adjusting the inscription parameters.

We present the proof of concept of the first non-volatile bistable fiber optic switch combining integrated optics and electrowetting-actuated microfluidics. Design and realization of both EWOD and photonic layer are presented and successful switching of a $2\times 4$ network is demonstrated.

A broadband vertical liquid controlled optical waveguide coupler (LCC) is demonstrated. The fabricated vertical LCC with silicon nitride (SiN) waveguides can switch light between 2 stacked photonic circuit layers with zero energy consumption in a steady switch state. In combination with low-loss interlayer waveguide crossovers they enable large scale non-volatile switch circuits with low loss. The fabricated vertical LCC has a loss less than 2.0 dB in bar state and less than 2.6 dB in cross state over the telecommunication wavelength range 1260 nm to 1630 nm. Interlayer waveguide crossovers with the same interlayer oxide thickness as the LCC have a loss less than 0.06 dB over the same wavelength range. The crosstalk of the LCC is less than 21 dB over the wavelength range 1500 nm to 1630 nm for both bar and cross state. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

A broadband and non-volatile liquid controlled silicon photonics switch is proposed. The measured crosstalk is less than −22dB and −12dB over 100nm wavelength range for bar and cross state, respectively. The insertion loss is less than 1dB.

We present two different platforms integrating silicon photonic biosensors. One is based on integration with reaction tubes to be compatible with traditional lab approaches. The other uses through-chip fluidics in order to achieve better mixing of the analyte.

The application of optical fiber technology for sensing has undergone tremendous growth over the last years. Its use for imaging hard-to-reach locations and its property to conduct light to a remote convenient location make of it a suitable tool for in vivo sensing applications, such as endoscopy. Here, we present an optical fiber probe sensor for label-free biosensing based on SOI ring resonators. We describe the operating principle of the device, the technology used to integrate a Silicon-on-insulator (SOI) chip on a fiber facet and discuss some experimental results.

We propose the combination of a simple reaction tube platform with label free SOI photonic biosensors. The device allows for the excellent performance of ring resonator sensors in a user-friendly platform to be used in labs and hospitals.

With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.