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1. DOE experiment for scattering bars optimization at the 90nm node

Author

Bouton, G., primary, Connolly, B., additional, Courboin, D., additional, Di Giacomo, A., additional, Gasnier, F., additional, Lallement, R., additional, Parker, D., additional, Pindo, M., additional, Richoilley, J. C., additional, Royere, F., additional, Rameau-Savio, A., additional, and Tissier, M., additional

Published
2011
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