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Using the equivalent transparency models, the Fraunhofer diffraction phenomena in the coherent light are studied at an extended object with a constant thickness in the shape of a volumetric asymmetric edge with a bevel and a plane reflecting (gray) inner surface of the object characterized by the module of reflection coefficient and the phase shift in the reflected wave. It has been shown that the far-zone field can be represented in the form of two components: transmitted and reflected, the first of which corresponds to light diffraction at an absolutely absorbing asymmetric edge, while the second describes diffraction phenomena at the volumetric structure in the shape of a biplanar slot illuminated by a plane light wave. Based on the constructive approximation of the integral Fresnel function, an expression has been obtained for the object spectrum, which can be used to investigate the behavior of the far-zone fields. It has been shown that in the case of a large bevel, the main contribution to the field is made by the reflected component. The methods are proposed for determining geometric parameters of the object by measuring the position of the central maximum of the reflected component and its effective width. [ABSTRACT FROM AUTHOR]

In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calculating the phase shift between interferograms, which allows reducing the measurement error, is proposed. The results of numerical and full scale experiments are presented.

Modern industry and science require novel 3D optical measuring systems and laser technologies with micro/nanometer resolution for solving actual problems. Such systems, including the 3D dimensional inspection of ceramic parts for electrotechnical industry, laser inspection of wheel pair diagnostic for running trains and 3D superresolution low-coherent micro- /nanoprofilometers are presented. The newest results in the field of laser technologies for high-precision synthesis of microstructures by updated image generator using the semiconductor laser are given. The measuring systems and the laser image generator developed and produced by TDI SIE and IAE SB RAS have been tested by customers and used in different branches of industry and science.