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Your search keyword '"Christoph Waberski"' showing total 4 results
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4 results on '"Christoph Waberski"'

1. Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears

Author

Rainer Engelke, Varshni Singh, Udo Kirsch, Reinhard Degen, Martin Bednarzik, Bernd Loechel, Gabi Gruetzner, Christoph Waberski, Jost Goettert, and Gisela Ahrens

Subjects
Engineering, business.industry, Mechanical engineering, Condensed Matter Physics, Aspect ratio (image), Electronic, Optical and Magnetic Materials, law.invention, Resist, Hardware and Architecture, law, Harmonic, Production (economics), Harmonic drive, Electrical and Electronic Engineering, business, Actuator, LIGA, Engineering design process
Abstract

In a close collaboration the team of Micromotion, micro resist technology, BESSY, and LSU-CAMD have successfully mastered the challenges of LIGA production of ultra-precision microparts for Micro Harmonic Drive® gears. The complementary expertise ranging from design and application know-how to process research and technical support resulted in high quality LIGA microparts and superior Micro Harmonic Drive® gears taking advantages of the free 2D design capability and material choice. It is also an excellent example that through contributions from partners with different background and expertise LIGA precision parts can be produced with high quality and yield and for a market competitive price.

Published
2008
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2. Generation and Characterization of Super-Hydrophobic Micro- and Nano-structured Surfaces

Author

Arne Schleunitz, Josef Kouba, Daniel Schondelmaier, Ivo Rudolph, Antje Walter, Christoph Waberski, Olaf Mertsch, Bernd Loechel, and Oliver Kutz

Subjects
chemistry.chemical_classification, Nanostructure, Materials science, Nanotechnology, Surfaces and Interfaces, General Chemistry, Polymer, engineering.material, Surfaces, Coatings and Films, Contact angle, chemistry, Coating, Mechanics of Materials, Monolayer, Nano, Materials Chemistry, engineering, Wetting, Composite material, Porosity
Abstract

Here we describe the use of a backside exposure method for the creation of high aspect ratio tapered microstructures with nano-porous sidewalls. These sidewalls result from the exposure and curing conditions of the SU8 matrix. The structures show ultra-hydrophobic behavior with water contact angles of more than 160°, without an additional coating of the SU8 polymer. By choosing appropriate exposure conditions, needlelike structures can be created with a high level of porosity, covering their entire surface. The contact angle hysteresis values of such structures lie in the range of 20°. After an additional deposition of smooth and thin metallic gold film and coating it with an alkyl thiol selfassembled monolayer (SAM), we were able to decrease this hysteresis to values of around 10°. By using thin and rough metallic films like wet chemically oxidized titanium oxide and a fluoralkylsilane SAM, the hysteresis values could be reduced to only 4°.

Published
2008
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3. Mixer slit plates fabricated by direct-LIGA.

Author

Martin Bednarzik, Christoph Waberski, Ivo Rudolph, Bernd Löchel, Frank Herbstritt, and Gisela Ahrens

Subjects
*MICROSTRUCTURE, *MICROTECHNOLOGY, *MICROFABRICATION, *ELECTROPLATING, *X-ray lithography, *MICROREACTORS, *GRAPHITE
Abstract

Abstract  Direct-LIGA services combining X-ray based micro-fabrication and electroplating are routinely provided to customers worldwide on a “best effort” basis by several LIGA centers. In a publicly founded project in collaboration between BESSY and Ehrfeld Mikrotechnik BTS GmbH the direct-LIGA process was adapted and optimised for fabricating mixer slit plates for micro-reactors. The application of SU-8 as a resist in deep X-ray lithography opens new opportunities for a direct and cost-effective mass fabrication of LIGA metal micro-parts. This joint paper will report on efforts from BESSY, Micro Resist Technology, and Ehrfeld BTS in fabrication of mixer slit plates by direct-LIGA for use in modular micro-reaction technology. The high demands regarding precision and yield of the micro-slit plates need certain improvements in the LIGA processing chain. Our approach consists of X-ray patterned SU-8 resist molds with a layer thickness of up to 350 μm and an aspect ratio of up to 30:1. Furthermore, the pattern-transfer into the SU-8 resist was done by a low-cost X-ray mask based on a graphite membrane. Other processing steps like NiFe electroplating and SU-8 removal will be discussed in this paper. [ABSTRACT FROM AUTHOR]

Published
2008
Full Text
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4. Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears.

Author

Bernd Loechel, Jost Goettert, Gabi Gruetzner, Martin Bednarzik, Christoph Waberski, Gisela Ahrens, Rainer Engelke, Varshni Singh, Reinhard Degen, and Udo Kirsch

Subjects
HARMONIC drives, MICROMECHANICS, NICKEL, IRON, POWER transmission, PRODUCT quality
Abstract

Abstract  In a close collaboration the team of Micromotion, micro resist technology, BESSY, and LSU-CAMD have successfully mastered the challenges of LIGA production of ultra-precision microparts for Micro Harmonic Drive® gears. The complementary expertise ranging from design and application know-how to process research and technical support resulted in high quality LIGA microparts and superior Micro Harmonic Drive® gears taking advantages of the free 2D design capability and material choice. It is also an excellent example that through contributions from partners with different background and expertise LIGA precision parts can be produced with high quality and yield and for a market competitive price. [ABSTRACT FROM AUTHOR]

Published
2008
Full Text
View/download PDF

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