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148 results on '"Charlot, Benoit"'

1. Brain exposure to SARS-CoV-2 virions perturbs synaptic homeostasis

Author

Partiot, Emma, Hirschler, Aurélie, Colomb, Sophie, Lutz, Willy, Claeys, Tine, Delalande, François, Deffieu, Maika S., Bare, Yonis, Roels, Judith R. E., Gorda, Barbara, Bons, Joanna, Callon, Domitille, Andreoletti, Laurent, Labrousse, Marc, Jacobs, Frank M. J., Rigau, Valérie, Charlot, Benoit, Martens, Lennart, Carapito, Christine, Ganesh, Gowrishankar, and Gaudin, Raphael

Published
2024
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3. Soft chemistry assisted On-chip Integration of Nanostructured quartz-based Piezoelectric Microelectromechanical System

Author

Jolly, Claire, Gomez, Andres, Sanchez-Fuentes, David, Cakiroglu, Dilek, Rathar, Raissa, Maurin, Nicolas, Garcia-Bermejo, Ricardo, Charlot, Benoit, Gich, Marti, Bahriz, Michael, Picas, Laura, and Carretero-Genevrier, Adrian

Subjects
Physics - Applied Physics, Condensed Matter - Materials Science
Abstract

The development of advanced piezoelectric quartz MEMS for sensing and precise frequency control applications requires the nanostructuration and on chip integration on silicon of this material. However, the current quartz manufacturing methods are based on bonding bulk micromachined crystals on silicon, which limits the size, the performance, the integration cost and the scalability of quartz micro devices. Here, we combine chemical solution deposition, soft nanoimprint lithography and top down microfabrication processes to develop the first nanostructured epitaxial 100 quartz 100 Si piezoelectric cantilevers. The coherent Si quartz interface and film thinness combined with a controlled nanostructuration on silicon insulator silicon technology substrates provides high force and mass sensitivity while preserving the mechanical quality factor of the microelectromechanical systems. This work proves that biocompatible nanostructured epitaxial piezoelectric quartz based MEMS on silicon can be engineered at low cost by combining soft chemistry and top down lithographic techniques.

Published
2020

4. Electrochemical Glucose Sensor using Single-Wall Carbon Nanotube Field Effect Transistor

Author

Pandey, Reetu Raj, Liang, Jie, Cakiroglu, Dilek, Charlot, Benoît, and Todri-Sanial, Aida

Subjects
Physics - Chemical Physics, Physics - Applied Physics
Abstract

In this paper, we present a simple yet sensitive method for glucose sensing using carbon nanotube field-effect transistor (CNTFET) based biosensor. The CNTs were well-dispersed to form CNT networks and maintain functional connectivity among CNTs, which increases the electron transfer through the network and thus, the electronic readout. Moreover, glucose oxidase (GOx) molecules are immobilized by CNT functionalization to form effective and sensitive CNT networks as FET channel. The CNTs are functionalized with linkers (1-pyrenebutanoic acid succinimidyl ester) to immobilize GOx on CNTs, where GOx serves as a mediator between CNTs and glucose for electron transfer. The liquid analyte glucose is adsorbed on CNTs via GOx and linkers by releasing additional electrons in the CNTFET channel and thus, increasing the CNTFET readout current. The binding of the target glucose molecules and GOx emulates the gate potential of FET channel and the electronic response of the sensor is recorded in real-time. Moreover, the variations in electronic readout of CNTFET biosensor are observed and is stipulated due to variation in CNT dispersion on each device. Overall, this work presents a simple, fast, sensitive, low-cost, and low concentration (0.01 mM) detection of glucose using CNTFET sensors.

Published
2020

5. High resolution photonic force microscopy based on sharp nano-fabricated tips

Author

Desgarceaux, Rudy, Santybayeva, Zhanna, Battistella, Eliana, Nord, Ashley L., Braun-Breton, Catherine, Abkarian, Manouk, Maragò, Onofrio M., Charlot, Benoit, and Pedaci, Francesco

Subjects
Physics - Instrumentation and Detectors, Physics - Biological Physics, Physics - Optics
Abstract

Sub-nm resolution images can be achieved by Atomic Force Microscopy (AFM) on samples that are deposited on hard substrates. However, it is still extremely challenging to image soft interfaces, such as biological membranes, due to the deformations induced by the tip. Photonic Force Microscopy (PhFM), based on optical tweezers (OT), represents an interesting alternative for soft scanning-probe microscopy. Using light instead of a physical cantilever to hold the scanning probe results in a stiffness ($k_{OT}\sim0.1-0.001$ pN/nm) which can be 2-3 orders of magnitude lower than that of standard cantilevers ($k_{AFM}\sim 10$ pN/nm). Combined with nm resolution of displacement measurements of the trapped probe, this allows for imaging soft materials without force-induced artefacts. However, the size of the optically trapped probe, often chosen as a $\sim \mu$m-size sphere, has so far limited the resolution of PhFM. Here we show a novel and simple nanofabrication protocol to massively produce optically trappable quartz particles which mimic the sharp tips of AFM. We demonstrate and quantify the stable trapping of particles with tips as sharp as 35 nm, the smallest used in PhFM to date. Raster scan images of rigid nanostructures with features smaller than 80 nm obtained with our tips compare well with AFM images of the same samples. Imaging the membrane of living malaria-infected red blood cells produces no visible artefacts and reveals the sub-micron structural features termed knobs, related to the parasite activity within the cell. The use of nano-engineered particles in PhFM opens the way to imaging soft and biological samples at high resolution.

Published
2020
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6. Energy Autonomous Wearable Sensors for Smart Healthcare: A Review

Author

Dahiya, Abhishek Singh, Thireau, Jerome, Boudaden, Jamila, Lal, Swatchith, Gulzar, Umair, Zhang, Yan, Gil, Thierry, Azemard, Nadine, Ramm, Peter, Kiessling, Tim, O'Murchu, Cian, Sebelius, Fredrik, Tilly, Jonas, Glynn, Colm, Geary, Shane, O'Dwyer, Colm, Razeeb, Kafil, Lacampagne, Alain, Charlot, Benoit, and Todri-Sanial, Aida

Subjects
Electrical Engineering and Systems Science - Signal Processing, Computer Science - Human-Computer Interaction
Abstract

Energy Autonomous Wearable Sensors (EAWS) have attracted a large interest due to their potential to provide reliable measurements and continuous bioelectric signals, which help to reduce health risk factors early on, ongoing assessment for disease prevention, and maintaining optimum, lifelong health quality. This review paper presents recent developments and state-of-the-art research related to three critical elements that enable an EAWS. The first element is wearable sensors, which monitor human body physiological signals and activities. Emphasis is given on explaining different types of transduction mechanisms presented, and emerging materials and fabrication techniques. The second element is the flexible and wearable energy storage device to drive low-power electronics and the software needed for automatic detection of unstable physiological parameters. The third is the flexible and stretchable energy harvesting module to recharge batteries for continuous operation of wearable sensors. We conclude by discussing some of the technical challenges in realizing energy-autonomous wearable sensing technologies and possible solutions for overcoming them.

Published
2019

9. Activation of patternable ceramics for hydrogen evolution reaction using molybdenum-based fillers.

Author

Hanniet, Quentin, Anfar, Zakaria, Dory, Hippolyte, Calas-Etienne, Sylvie, Etienne, Pascal, Flaud, Valérie, Castellon, Jérôme, Charlot, Benoit, Miele, Philippe, Voiry, Damien, and Salameh, Chrystelle

Subjects
YOUNG'S modulus, HYDROGEN evolution reactions, RENEWABLE energy sources, PLATINUM group, WATER electrolysis, OXYGEN evolution reactions, MOLYBDENUM
Abstract

Hydrogen is considered a promising alternative to conventional fossil fuels, as it can be easily produced from renewable energy sources. While electrocatalytic water splitting can achieve near-unity faradaic efficiency in producing hydrogen from water, the widespread implementation of large-scale water electrolysis is hindered by reliance on costly platinum group metal-based electrocatalysts. Here, we report on the rational design of Molybdenum-containing SiCN composites (Mo–SiCN) through an active-filler controlled pyrolysis (AFCOP) strategy. Our investigation into the composite's microstructural evolution revealed the formation of a Mo4.8Si3C0.6 Nowotny phase at a relatively low temperature of 1000 °C. After optimization, the resulting catalyst demonstrated a Tafel slope below 95 mV dec−1 and an overpotential near 575 mV at a normalized current density of 1 mA μF−1. As a proof of concept, the AFCOP strategy was employed to engineer a crack-free Mo–SiCN micropattern, enabling the miniaturization of a Pt-free electrochemical water splitting (EWS) reactor. Produced via soft lithography, the Mo–SiCN pattern exhibits feature sizes ranging from 10 to 200 μm, with near-net-shape replication and a Young's modulus of ≈60 GPa. [ABSTRACT FROM AUTHOR]

Published
2025
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16. Trans-synaptic dwelling of SARS-CoV-2 particles perturbs neural synapse organization and function

Author

Partiot, Emma, primary, Hirschler, Aurélie, additional, Colomb, Sophie, additional, Lutz, Willy, additional, Claeys, Tine, additional, Delalande, François, additional, Deffieu, Maika S., additional, Roels, Judith R.E., additional, Bons, Joanna, additional, Callon, Domitille, additional, Andreoletti, Laurent, additional, Labrousse, Marc, additional, Jacobs, Frank M.J., additional, Rigau, Valérie, additional, Charlot, Benoit, additional, Martens, Lennart, additional, Carapito, Christine, additional, Ganesh, Gowrishankar, additional, and Gaudin, Raphael, additional

Published
2022
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17. Protruding cantilever microelectrode array to monitor the inner electrical activity of cerebral organoids.

Author

Phouphetlinthong, Oramany, Partiot, Emma, Bernou, Corentin, Sebban, Audrey, Gaudin, Raphael, and Charlot, Benoit

Subjects
ORGANOIDS, CANTILEVERS, MICROFABRICATION, COMMUNITY organization
Abstract

Stem cell-derived cerebral organoids are artificially grown miniature organ-like structures mimicking embryonic brain architecture. They are composed of multiple neural cell types with 3D cell layer organization exhibiting local field potential. Measuring the extracellular electrical activity by means of conventional planar microelectrode arrays is particularly challenging due to the 3D architecture of organoids. In order to monitor the intra-organoid electrical activity of thick spheroid-shaped samples, we developed long protruding microelectrode arrays able to penetrate the inner regions of cerebral organoids to measure the local potential of neurons within the organoids. A new microfabrication process has been developed which, thanks to the relaxation of internal stresses of a stack of materials deposited over a sacrificial layer, allows one to build a protruding cantilever microelectrode array placed at the apex of beams which rise vertically, over two hundred microns. These slender beams inserted deeply into the organoids give access to the recording of local field potential from neurons buried inside the organoid. This novel device shall provide valuable tools to study neural functions in greater detail. [ABSTRACT FROM AUTHOR]

Published
2023
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21. Design, Fabrication, and In-Vivo Characterization of Strain Sensors Based on 1D Nanomaterials for Health Monitoring Wearable Devices

Author

Boschetto, Gabriele, Tieying, Xu, Yehya, Mohamad, Carapezzi, Stefania, Thireau, Jérôme, Lacampagne, Alain, Charlot, Benoit, Gil, Thierry, Todri-Sanial, Aida, Smart Integrated Electronic Systems (SmartIES), Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier (LIRMM), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Institut d’Electronique et des Systèmes (IES), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Matériaux, Micro et Nanodispositifs (M2N), Physiologie & médecine expérimentale du Cœur et des Muscles [U 1046] (PhyMedExp), Institut National de la Santé et de la Recherche Médicale (INSERM)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Capteurs et Instrumentations (CI), Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM), European Project: 825114,SmartVista, Université de Montpellier (UM)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS), and Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)

Subjects
[CHIM.THEO]Chemical Sciences/Theoretical and/or physical chemistry, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [INFO.INFO-MO]Computer Science [cs]/Modeling and Simulation, [SPI.MAT]Engineering Sciences [physics]/Materials
Published
2021

22. Assessment of 1D and 2D Materials for Health Monitoring Wearable Devices

Author

Boschetto, Gabriele, Xu, Tieying, Yehya, Mohamad, Thireau, Jérôme, Lacampagne, Alain, Charlot, Benoit, Gil, Thierry, Todri-Sanial, Aida, Smart Integrated Electronic Systems (SmartIES), Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier (LIRMM), Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM), Institut d’Electronique et des Systèmes (IES), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Matériaux, Micro et Nanodispositifs (M2N), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Physiologie & médecine expérimentale du Cœur et des Muscles [U 1046] (PhyMedExp), Université de Montpellier (UM)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS), and Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)

Subjects
[CHIM.THEO]Chemical Sciences/Theoretical and/or physical chemistry, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [INFO.INFO-MO]Computer Science [cs]/Modeling and Simulation, [SPI.MAT]Engineering Sciences [physics]/Materials
Abstract

National audience; Here, the performance of 1D and 2D nanomaterials (carbon nanotubes and MoS2, respectively) was assessed for the development of novel highly sensitive and flexible strain sensors to monitor patients’ respiratory rate. To do so, we followed a multi-disciplinary and multi-level ap- proach, starting from atomistic simulations, up to device fabrication and ex-vivo testing. We successfully designed, fabricated and tested a CNT-based flexible strain sensor capable of tracking the respiratory rate, and we showed 1D and 2D materials to have excellent mechanical and electronic properties for the use in such devices.

Published
2021

29. Quartz‐Based Cantilevers: Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System (Adv. Mater. Technol. 3/2021)

Author

Jolly, Claire, primary, Gomez, Andres, additional, Sánchez‐Fuentes, David, additional, Cakiroglu, Dilek, additional, Rathar, Raïssa, additional, Maurin, Nicolas, additional, Garcia‐Bermejo, Ricardo, additional, Charlot, Benoit, additional, Gich, Martí, additional, Bahriz, Michael, additional, Picas, Laura, additional, and Carretero‐Genevrier, Adrian, additional

Published
2021
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30. A sweeping mode integrated fingerprint sensor with 256 tactile microbeams

Author

Charlot, Benoit, Parrain, Fabien, Galy, Nicolas, Basrour, Skandar, and Courtois, Bernard

Subjects
Microelectromechanical systems -- Research, Detectors, Engineering and manufacturing industries, Science and technology
Abstract

This paper reports recent advances in the development of a tactile fingerprint sensor made by a CMOS compatible front side bulk micromachining technology. This device enables the measurement of a fingerprint by the way of a mechanical scanning principle of the finger roughness. While this sensing principle has shown good results on a first prototype of reduced width, we present here the design, fabrication and test of a new sensor. This sensor contains 256 pressure sensitive microbeams for a total length of 1.28 cm and is fully integrated with analog and mixed signal electronics. In this paper we will detail the general working principle of the tactile fingerprint sensor and the two prototypes that have been manufactured and tested with a special focus on the electronic architecture and the test results of the second prototype. Index Terms--CMOS compatible bulk micromachining technologies, fingerprint sensor, integrated MEMS, switch capacitor systems.

Published
2004

31. Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System

Author

Jolly, Claire, primary, Gomez, Andres, additional, Sánchez‐Fuentes, David, additional, Cakiroglu, Dilek, additional, Rathar, Raïssa, additional, Maurin, Nicolas, additional, Garcia‐Bermejo, Ricardo, additional, Charlot, Benoit, additional, Gich, Martí, additional, Bahriz, Michael, additional, Picas, Laura, additional, and Carretero‐Genevrier, Adrian, additional

Published
2021
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35. Nanostructure engineering of epitaxial piezoelectric α-quartz thin films on silicon

Author

Zhang, Qianzhe, Sanchez, David, Desgarceaux, Rudy, Gomez, A., Escofet-Majoral, Pau, Oró-Soler, J, Gàzquez, J., Larrieu, G., Charlot, Benoit, Gich, M, Carretero-Genevrier, Adrian, Institut de Ciència de Materials de Barcelona (ICMAB), Consejo Superior de Investigaciones Científicas [Spain] (CSIC), Institut de Mathématiques de Toulouse UMR5219 (IMT), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS), Institut d’Electronique et des Systèmes (IES), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Galaxies, Etoiles, Physique, Instrumentation (GEPI), Institut national des sciences de l'Univers (INSU - CNRS)-Observatoire de Paris, PSL Research University (PSL)-PSL Research University (PSL)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie (IEMN) - UMR 8520 (IEMN), Centre National de la Recherche Scientifique (CNRS)-Université de Lille-Université Polytechnique Hauts-de-France (UPHF)-Ecole Centrale de Lille-Université Polytechnique Hauts-de-France (UPHF)-Institut supérieur de l'électronique et du numérique (ISEN), Techniques of Informatics and Microelectronics for integrated systems Architecture (TIMA), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA), Matériaux, MicroCapteurs et Acoustique (M2A), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Consejo Superior de Investigaciones Científicas [Madrid] (CSIC), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Université Paris Diderot - Paris 7 (UPD7)-Centre National de la Recherche Scientifique (CNRS), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS), Centre National de la Recherche Scientifique (CNRS)-Institut national des sciences de l'Univers (INSU - CNRS)-Université Paris Diderot - Paris 7 (UPD7)-Observatoire de Paris, Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL), Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés (TIMA), and Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])

Subjects
nanostructuration, piezoelectricity, thin films, epitaxial growth, silicon, Quartz, [CHIM.MATE]Chemical Sciences/Material chemistry
Abstract

The monolithic integration of sub-micron quartz structures on silicon substrates is a key issue for the future development of telecommunication to the GHz frequencies. Here we report unprecedented large-scale fabrication of ordered arrays of piezoelectric epitaxial quartz nanostructures on silicon substrates by the combination of soft-chemistry and three cost effective lithographic techniques: (i) laser transfer lithography, (ii) soft nanoimprint lithography on Sr-doped SiO2 sol-gel thin films and (iii) self-assembled SrCO3 nanoparticles reactive nanomasks. Epitaxial α-quartz nanopillars with different diameters (down to 50 nm) and heights (up to 2000 nm) were obtained for the first time. This work proves the control over the shape, micro-and nano-patterning of quartz thin films while preserving its crystallinity, texture and piezoelectricity. This work opens up the opportunity to fabricate new high frequency resonators and high sensitivity sensors relevant in different fields of application.

Published
2019

36. Nanostructure engineering of epitaxial piezoelectric {\alpha}-quartz thin films on silicon

Author

Zhang, Q., Sánchez-Garcia, D., Desgarceaux, R., Gomez, A., Escofet-Majora, P., Oró-Soler, J., Gàzquez, J., Larrieu, Guilhem, Charlot, Benoit, Gich, M., Carretero-Genevrier, Adrian, Argonne National Laboratory [Lemont] (ANL), Institut d’Electronique et des Systèmes (IES), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Matériaux, MicroCapteurs et Acoustique (M2A), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Institut de Ciència de Materials de Barcelona (ICMAB), Consejo Superior de Investigaciones Científicas [Madrid] (CSIC), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Argonne National Laboratory [Lemont] [ANL], Institut d’Electronique et des Systèmes [IES], Matériaux, MicroCapteurs et Acoustique [M2A], Institut de Ciència de Materials de Barcelona [ICMAB], Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN], Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM), Matériaux, Micro et Nanodispositifs (M2N), Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM), Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), and Capteurs et Instrumentations (CI)

Subjects
Condensed Matter - Materials Science, Physics - Applied Physics, [CHIM.MATE]Chemical Sciences/Material chemistry
Abstract

The monolithic integration of sub-micron quartz structures on silicon substrates is a key issue for the future development of telecommunication to the GHz frequencies. Here we report unprecedented large-scale fabrication of ordered arrays of piezoelectric epitaxial quartz nanostructures on silicon substrates by the combination of soft-chemistry and three cost effective lithographic techniques: (i) laser transfer lithography, (ii) soft nanoimprint lithography on Sr-doped SiO2 sol-gel thin films and (iii) self-assembled SrCO3 nanoparticles reactive nanomasks. Epitaxial {\alpha}-quartz nanopillars with different diameters (down to 50 nm) and heights (up to 2000 nm) were obtained for the first time. This work proves the control over the shape, micro- and nano-patterning of quartz thin films while preserving its crystallinity, texture and piezoelectricity. This work opens up the opportunity to fabricate new high frequency resonators and high sensitivity sensors relevant in different fields of application.

Published
2019

37. Talbot displacement lithography with soft elastomeric conformal phase masks

Author

Desgarceaux, Rudy, Santibayeva, Zhanna, Pedaci, Francesco, Charlot, Benoit, Institut d’Electronique et des Systèmes (IES), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Matériaux, MicroCapteurs et Acoustique (M2A), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Centre de Biochimie Structurale [Montpellier] (CBS), and Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Institut National de la Santé et de la Recherche Médicale (INSERM)

Subjects
Diffraction, Materials science, business.industry, 02 engineering and technology, Grating, Photoresist, 010402 general chemistry, 021001 nanoscience & nanotechnology, 01 natural sciences, 0104 chemical sciences, Optics, Resist, Talbot effect, Phase-shift mask, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, business, Lithography, Diffraction grating
Abstract

International audience; We report a novel method to create 2D hierarchical nanopatterns with a simple PDMS scaffold made of a replica of a grating and a spacer. This technique takes advantage of the Talbot effect that is the creation of an interference pattern from a grating at a given distance normal to the grating surface. By combining a conformal soft mask made of PDMS and a spacer to separate the phase shift mask from the photoresist, we can take advantage of the interference pattern to imprint smaller structures.

Published
2018
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39. Review—Energy Autonomous Wearable Sensors for Smart Healthcare: A Review

Author

Dahiya, Abhishek Singh, primary, Thireau, Jerome, additional, Boudaden, Jamila, additional, Lal, Swatchith, additional, Gulzar, Umair, additional, Zhang, Yan, additional, Gil, Thierry, additional, Azemard, Nadine, additional, Ramm, Peter, additional, Kiessling, Tim, additional, O'Murchu, Cian, additional, Sebelius, Fredrik, additional, Tilly, Jonas, additional, Glynn, Colm, additional, Geary, Shane, additional, O'Dwyer, Colm, additional, Razeeb, Kafil M., additional, Lacampagne, Alain, additional, Charlot, Benoit, additional, and Todri-Sanial, Aida, additional

Published
2019
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40. Tailoring the crystal growth of quartz on silicon for patterning epitaxial piezoelectric films

Author

European Research Council, Agence Nationale de la Recherche (France), Ministerio de Ciencia, Innovación y Universidades (España), China Scholarship Council, Zhang, Qianzhe, Sánchez Fuentes, David, Gómez Rodríguez, Andrés, Desgarceaux, Rudy, Charlot, Benoit, Gázquez, Jaume, Carretero Genevrier, Adrian, Gich, Martí, European Research Council, Agence Nationale de la Recherche (France), Ministerio de Ciencia, Innovación y Universidades (España), China Scholarship Council, Zhang, Qianzhe, Sánchez Fuentes, David, Gómez Rodríguez, Andrés, Desgarceaux, Rudy, Charlot, Benoit, Gázquez, Jaume, Carretero Genevrier, Adrian, and Gich, Martí

Abstract

Epitaxial films of piezoelectric alpha-quartz could enable the fabrication of sensors with unprecedented sensitivity for prospective applications in electronics, biology and medicine. However, the prerequisites are harnessing the crystallization of epitaxial alpha-quartz and tailoring suitable film microstructures for nanostructuration. Here, we bring new insights into the crystallization of epitaxial alpha-quartz films on silicon (100) from the devitrification of porous silica and the control of the film microstructures: we show that by increasing the quantity of devitrifying agent (Sr) it is possible to switch from an alpha-quartz microstructure consisting of a porous flat film to one dominated by larger, fully dense alpha-quartz crystals. We also found that the film thickness, relative humidity and the nature of the surfactant play an important role in the control of the microstructure and homogeneity of the films. Via a multi-layer deposition method, we have extended the maximum thickness of the alpha-quartz films from a few hundreds of nm to the mu m range. Moreover, we found a convenient method to combine this multilayer approach with soft lithography to pattern silica films while preserving epitaxial crystallization. This improved control over crystallization and the possibility of preparing patterned films of epitaxial alpha-quartz on Si substrates pave the path to future developments in applications based on electromechanics, optics and optomechanics.

Published
2019

46. Surface-enhanced infrared absorption with Si-doped InAsSb/GaSb nano-antennas

Author

Milla, M., Barho, F., Gonzalez-Posada, F., Cerutti, L., Charlot, Benoit, Bomers, M., Neubrech, F., Tournié, E., Taliercio, T., Institut d’Electronique et des Systèmes (IES), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Composants à Nanostructure pour le moyen infrarouge (NANOMIR), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Matériaux, MicroCapteurs et Acoustique (M2A), Kirchhoff Institut für Physik, and Universität Heidelberg [Heidelberg]

Subjects
ComputingMilieux_MISCELLANEOUS, [SPI.TRON]Engineering Sciences [physics]/Electronics
Abstract

International audience

Published
2017
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