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1. A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy

2. Effects of Mask Material on Lateral Undercut of Silicon Dry Etching

3. Design and Fabrication of a Novel Poly-Si Microhotplate with Heat Compensation Structure

4. A Novel Packaged Ultra-High Q Silicon MEMS Butterfly Vibratory Gyroscope

5. A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost

6. ZRO Drift Reduction of MEMS Gyroscopes via Internal and Packaging Stress Release

7. A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging

8. A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

9. A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers

10. The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes

11. A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology

12. Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications

13. Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators

14. A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer

15. Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication

16. A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope

17. Research on Wafer-Level MEMS Packaging with Through-Glass Vias

18. Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope

19. PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes

20. Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

22. Iridium–Iron Diatomic Active Sites for Efficient Bifunctional Oxygen Electrocatalysis

25. Bifunctional atomically dispersed ruthenium electrocatalysts for efficient bipolar membrane water electrolysis

28. Coke Deposition on Pt-Based Catalysts in Propane Direct Dehydrogenation: Kinetics, Suppression, and Elimination

29. Boosting electrocatalytic activity for CO2 reduction on nitrogen-doped carbon catalysts by co-doping with phosphorus

30. A new DRIE cut-off material in SOG MEMS process

31. Resolving the Mechanism Complexity of Oxidative Dehydrogenation of Hydrocarbons on Nanocarbon by Microkinetic Modeling

32. Tuning of interactions between cathode and lithium polysulfide in Li-S battery by rational halogenation

33. Critical Role of Interfacial Sites between Nickel and CeO2 Support in Dry Reforming of Methane: Revisit of Reaction Mechanism and Origin of Stability

34. Revealing the role of nitrogen dopants in tuning the electronic and optical properties of graphene quantum dots via a TD-DFT study

35. A Double-Step Unscented Kalman Filter and HMM-Based Zero-Velocity Update for Pedestrian Dead Reckoning Using MEMS Sensors

37. Single Au Anion Can Catalyze Acetylene Hydrochlorination: Tunable Catalytic Performance from Rational Doping

38. A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer

39. Halogenation of graphene triggered by heteroatom doping

40. A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

41. A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers

42. Revealing the role of nitrogen dopants in tuning the electronic and optical properties of graphene quantum dots

43. The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes

45. Revealing the Janus Character of the Coke Precursor in the Propane Direct Dehydrogenation on Pt Catalysts from a kMC Simulation

46. Phosphorus-doped onion-like carbon for CO2 electrochemical reduction: the decisive role of the bonding configuration of phosphorus

47. Probing the reaction mechanism of acetylene hydrochlorination on metal-free doped boron nitride: Decisive role of carbon dopant

48. A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer

49. Resonant Properties of a T-sbape Aluminum Nitride Piezoelectric Structure for MEMS Device

50. Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via

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