Search

Your search keyword '"Chao, Benjamin S."' showing total 15 results
Start Over Author "Chao, Benjamin S."
15 results on '"Chao, Benjamin S."'

2. The growth kinetics of rf sputtered Ba2Si2TiO8 thin films

Author

Yi Li, Chao, Benjamin S., and Hisao Yamauchi

Subjects
Crystals -- Growth, Sputtering (Physics) -- Research, Barium compounds -- Research, Thin films -- Research, Physics
Abstract

A study was conducted on the growth kinetics of radio-frequency sputtered barium titanium silicate (BST) thin films. Results show that BST films deposited at a substrate temperature of 845 degrees celsius are predominantly c-axis oriented. The film growth rate was found to decrease with sputtering time while lateral grain growth was found to increase with grain size. The rapid rate of lateral grain growth indicated a strong interaction between the BST film and the Si substrate. A combined nucleation and growth rate for the initial stages of deposition was also observed.

Published
1992

5. The growth kinetics of rf sputtered Ba2Si2TiO8 thin films.

Author

Li, Yi, Chao, Benjamin S., and Yamauchi, Hisao

Subjects
*DYNAMICS, *SILICON, *THIN films
Abstract

Presents information on a study which deposited the crystal configuration and the growth kinetics of the barium titanium silicate (BST) films deposited on silicon substrates. Growth kinetics of crystal grains; Illustration of the x-ray diffraction spectra recorded from the BST films; Discussion on activation free energy of BST grain growth; Growth rate of thin films.

Published
1992
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results