Author: "Chalom, Daniel" - Searchworks@Jio Institute Digital Library Search Results

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11 results on '"Chalom, Daniel"'

1. Robustness improvement in imaging based overlay metrology for high topography layers by Talbot targets

Author: Watson, Brian, primary, Katz, Shlomit, additional, Housley, Richard, additional, Thong, Kar Wui, additional, Nikhil Aditya Kumar, Roy, additional, Grauer, Yoav, additional, Shapirov, Diana, additional, Yohanan, Raviv, additional, Gray, Greg, additional, Li, Yonglei, additional, and Chalom, Daniel, additional
Published: 2021
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2. Mask manufacturing of advanced technology designs using multi-beam lithography (Part 1)

Author: Green, Michael, additional, Ham, Young, additional, Dillon, Brian, additional, Kasprowicz, Bryan, additional, Hur, Ik Boum, additional, Park, Joong Hee, additional, Choi, Yohan, additional, McMurran, Jeff, additional, Kamberian, Henry, additional, Chalom, Daniel, additional, Klikovits, Jan, additional, Jurkovic, Michal, additional, and Hudek, Peter, additional
Published: 2016
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3. Mask manufacturing of advanced technology designs using multi-beam lithography (part 2)

Author: Green, Michael, additional, Ham, Young, additional, Dillon, Brian, additional, Kasprowicz, Bryan, additional, Hur, Ik Boum, additional, Park, Joong Hee, additional, Choi, Yohan, additional, McMurran, Jeff, additional, Kamberian, Henry, additional, Chalom, Daniel, additional, Klikovits, Jan, additional, Jurkovic, Michal, additional, and Hudek, Peter, additional
Published: 2016
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4. Investigation of local registration performance of IMS Nanofabrication’s Multi-Beam Mask Writer

Author: Chalom, Daniel, additional, Klikovits, Jan, additional, Geist, David, additional, Hudek, Peter, additional, Eder-Kapl, Stefan, additional, Daneshpanah, Mehdi, additional, Laske, Frank, additional, Eyring, Stefan, additional, and Roeth, Klaus-Dieter, additional
Published: 2015
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5. Haze growth on reticles: What's the RigHT thing to do?

Author: McDonald, Steven M., primary, Chalom, Daniel V., additional, Green, Michael J., additional, McMurran, Jeffrey A., additional, Garrett, Michael B., additional, and Dlouhy, David W., additional
Published: 2009
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6. Haze growth on reticles: What's the RigHT thing to do?

Author: McDonald, Steven M., Chalom, Daniel V., Green, Michael J., McMurran, Jeffrey A., Garrett, Michael B., and Dlouhy, David W.
Published: 2009
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7. Mask manufacturing of advanced technology designs using multi-beam lithography (part 2)

Author: Kasprowicz, Bryan S., Buck, Peter D., Green, Michael, Ham, Young, Dillon, Brian, Kasprowicz, Bryan, Hur, Ik Boum, Park, Joong Hee, Choi, Yohan, McMurran, Jeff, Kamberian, Henry, Chalom, Daniel, Klikovits, Jan, Jurkovic, Michal, and Hudek, Peter
Published: 2016
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8. Robustness improvement in imaging-based overlay metrology for high topography layers by Talbot targets.

Author: Adan, Ofer, Robinson, John C., Watson, Brian, Katz, Shlomit, Housley, Richard, Thong, Kar Wui, Roy, Nikhil Aditya Kumar, Grauer, Yoav, Shapirov, Diana, Yohanan, Raviv, Gray, Greg, Li, Yonglei, and Chalom, Daniel
Published: 2020
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9. Robustness improvement in imaging-based overlay metrology for high topography layers by Talbot targets

Author: Adan, Ofer, Robinson, John C., Watson, Brian, Katz, Shlomit, Housley, Richard, Thong, Kar Wui, Roy, Nikhil Aditya Kumar, Grauer, Yoav, Shapirov, Diana, Yohanan, Raviv, Gray, Greg, Li, Yonglei, and Chalom, Daniel
Published: 2021
Full Text: View/download PDF

10. Mask manufacturing of advanced technology designs using multi-beam lithography (Part 1)

Author: Behringer, Uwe F.W., Finders, Jo, Green, Michael, Ham, Young, Dillon, Brian, Kasprowicz, Bryan, Hur, Ik Boum, Park, Joong Hee, Choi, Yohan, McMurran, Jeff, Kamberian, Henry, Chalom, Daniel, Klikovits, Jan, Jurkovic, Michal, and Hudek, Peter
Published: 2016
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11. Investigation of local registration performance of IMS Nanofabrication’s Multi-Beam Mask Writer

Author: Yoshioka, Nobuyuki, Chalom, Daniel, Klikovits, Jan, Geist, David, Hudek, Peter, Eder-Kapl, Stefan, Daneshpanah, Mehdi, Laske, Frank, Eyring, Stefan, and Roeth, Klaus-Dieter
Published: 2015
Full Text: View/download PDF

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