14 results on '"Carpaij, Rene"'
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2. Stitching for High NA: new insights and path forward
3. Overview of stitching for high NA: imaging and overlay experimental and simulation results
4. Fundamental understanding and experimental verification of bright versus dark field imaging
5. Experimental verification of high-NA imaging simulations using SHARP
6. Qualification, monitoring, and integration into a production environment of the world's first fully programmable illuminator
7. Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process
8. Compensating measured intra-wafer ring oscillator stage delay with intra-wafer exposure dose corrections
9. Etch, reticle, and track CD fingerprint corrections with local dose compensation
10. In-line lithography cluster monitoring and control using integrated scatterometry
11. Optimizing and enhancing optical systems to meet the low k 1 challenge
12. Characterization of integrated optical CD for process control.
13. Optimizing and enhancing optical systems to meet the low k1 challenge.
14. Experimental verification of high-NA imaging simulations using SHARP.
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