1. Improving Gold and Palladium Ohmic Contacts of Carbyne-Based Devices.
- Author
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Tomov, Rade and Aleksandrova, Mariya
- Subjects
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OHMIC contacts , *GAS detectors , *PALLADIUM , *WEATHER , *ELECTRIC lines , *ANNEALING of metals - Abstract
The effects of the sequence of technology steps of electrical contact formation between carbyne layers and metal electrodes (gold, platinum) on contact parameters were explored. Enhancements in contact parameters were achieved through thermal annealing of the samples. Contact parameters were measured by transmission line method (TLM) and impedance spectroscopy after annealing at atmospheric conditions. Lowering of contact resistivity and sheet resistance of the carbyne layer after annealing was observed for temperatures up to 150∘C for palladium contacts and up to 100∘C for gold contacts. It was found that exceeding these temperatures is not recommended, as higher annealing temperatures led to a reduction in the sheet resistance of the carbyne layer. Based on these findings, it can be concluded that the electrical losses at metal contacts of carbyne-based devices, with Au or Pd metallization, can be reduced through annealing. This is particularly critical in carbyne-based gas sensors, where decreasing contact resistance enhances sensitivity. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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