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Multiphoton microscopy combined with optogenetic photostimulation is a powerful technique in neuroscience enabling precise control of cellular activity to determine the neural basis of behavior in a live animal. Two-photon patterned photostimulation has taken this further by allowing interrogation at the individual neuron level. However, it remains a challenge to implement imaging of neural activity with spatially patterned two-photon photostimulation in a freely moving animal. We developed a miniature microscope for high resolution two-photon fluorescence imaging with patterned two-photon optogenetic stimulation. The design incorporates a MEMS scanner for two-photon imaging and a second beam path for patterned two-photon excitation in a compact and lightweight design that can be head-attached to a freely moving animal. We demonstrate cell-specific optogenetics and high resolution MEMS based two-photon imaging in a freely moving mouse. The new capabilities of this miniature microscope design can enable cell-specific studies of behavior that can only be done in freely moving animals., Competing Interests: Competing financial interests K.K. is a co-founder and part-owner of 3i. The other authors declare no competing financial interests.

This study demonstrates the fabrication and evaluation of a monolithic electrowetting prism with a minimized electrode gap. The electrically tunable prism is capable of two-dimensional beam steering of approximately ±4 degrees under voltage differentials up to ±15 V. The main innovation lies in reducing the electrode gap to 30 μm, accomplished using direct write laser lithography on three dimensional substrates. Through simulations and experimental validation, we show that reducing the gap between electrodes to 30 μm enables the transmission of a 1.2 mm diameter beam with negligible impact on imaging quality. The improved imaging quality makes electrowetting prisms an attractive option for future advancements in optical scanning technologies.

We demonstrate a novel electrowetting liquid combination using a room temperature ionic liquid (RTIL) and a nonpolar liquid, 1-phenyl-1-cyclohexene (PCH) suitable for focus-tunable 3-photon microscopy. We show that both liquids have over 90% transmission at 1300 nm over a 1.1 mm pathlength and an index of refraction contrast of 0.123. A lens using these liquids can be tuned from a contact angle of 133 to 48° with applied voltages of 0 and 60 V, respectively. Finally, a three-photon imaging system including an RTIL electrowetting lens was used to image a mouse brain slice. Axial scans taken with an electrowetting lens show excellent agreement with images acquired using a mechanically scanned objective., Competing Interests: The authors declare no conflicts of interest., (© 2024 Optica Publishing Group.)

The authors present an erratum to update the Acknowledgements section in their published article, ["Fabrication and characterization of a two-dimensional individually addressable electrowetting microlens array," Opt. Express31, 30550 (2023)10.1364/OE.497992].

Molecular layer deposition (MLD) provides the opportunity to perform condensation polymerization one vaporized monomer at a time for the creation of precise, selective nanofilms for desalination membranes. Here, we compare the structure, chemistry, and morphology of two types of commercial interfacial polymerzation (IP) membranes with lab-made MLD films. M-phenylenediamine (MPD) and trimesoyl chloride (TMC) produced a cross-linked, aromatic polyamide often used in reverse osmosis membranes at MLD growth rates of 2.9 Å/cycle at 115 °C. Likewise, piperazine (PIP) and TMC formed polypiperazine amide, a common selective layer in nanofiltration membranes, with MLD growth rates of 1.5 Å/cycle at 115 °C. Ellipsometry and X-ray reflectivity results suggest that the surface of the MLD films is comprised of polymer segments roughly two monomers in length, which are connected at one end to the cross-linked bulk layer. As a result of this structure as well as the triple-functionality of TMC, MPD-TMC had a temperature window of stable growth rate from 115 to 150 °C, which is unlike any non-cross-linked MLD chemistries reported in the literature. Compared to IP films, corresponding MLD films were denser and morphologically conformal, which suggests a reduction in void volumes; this explains the high degree of salt rejection and reduced flux previously observed for exceptionally thin MPD-TMC MLD membranes. Using X-ray photoelectron spectroscopy and infrared spectroscopy, MLD PIP-TMC films evidenced a completely cross-linked internal structure, which lacked amine and carboxyl groups, pointing to a hydrophobic bulk structure, ideal for optimized water flux. Grazing-incidence wide-angle X-ray scattering showed broad features in each polyamide with d -spacings of 5.0 Å in PIP-TMC compared to that of 3.8 Å in MPD-TMC. While MLD and IP films were structurally identical to PIP-TMC, MPD-TMC IP films had a structure that may have been altered by post-treatment compared to MLD films. These results provide foundational insights into the MLD process, structure-performance relationships, and membrane fabrication., Competing Interests: The authors declare no competing financial interest., (© 2024 American Chemical Society.)

We demonstrate a two-dimensional, individually tunable electrowetting microlens array fabricated using standard microfabrication techniques. Each lens in our array has a large range of focal tunability from -1.7 mm to -∞ in the diverging regime, which we verify experimentally from 0 to 75 V for a device coated in Parylene C. Additionally, each lens can be actuated to within 1% of their steady-state value within 1.5 ms. To justify the use of our device in a phase-sensitive optical system, we measure the wavefront of a beam passing through the center of a single lens in our device over the actuation range and show that these devices have a surface quality comparable to static microlens arrays. The large range of tunability, fast response time, and excellent surface quality of these devices open the door to potential applications in compact optical imaging systems, transmissive wavefront shaping, and beam steering.

Electrowetting-based adaptive optics are of great interest for applications ranging from confocal microscopy to LIDAR, but the impact of low-frequency mechanical vibration on these devices remains to be studied. We present a simple theoretical model for predicting the resonance modes induced on the liquid interface in conjunction with a numerical simulation. We experimentally confirm the resonance frequencies by contact angle modulation. They are found to be in excellent agreement with the roots of the zero-order Bessel functions of the first kind. Next, we experimentally verify that external axial vibration of an electrowetting lens filled with density mismatched liquids ( Δ ρ  = 250 kg/m 3 ) will exhibit observable Bessel modes on the liquid-liquid interface. An electrowetting lens filled with density matched liquids ( Δ ρ  = 4 kg/m 3 ) is robust to external axial vibration and is shown to be useful in mitigating the effect of vibrations in an optical system., Competing Interests: The authors have no conflicts to disclose., (© 2023 Author(s).)

Optical sectioning structured illumination microscopy (OS-SIM) provides optical sectioning capability in wide-field microscopy. The required illumination patterns have traditionally been generated using spatial light modulators (SLM), laser interference patterns, or digital micromirror devices (DMDs) which are too complex to implement in miniscope systems. MicroLEDs have emerged as an alternative light source for patterned illumination due to their extreme brightness capability and small emitter sizes. This paper presents a directly addressable striped microLED microdisplay with 100 rows on a flexible cable (70 cm long) for use as an OS-SIM light source in a benchtop setup. The overall design of the microdisplay is described in detail with luminance-current-voltage characterization. OS-SIM implementation with a benchtop setup shows the optical sectioning capability of the system by imaging within a 500 µm thick fixed brain slice from a transgenic mouse where oligodendrocytes are labeled with a green fluorescent protein (GFP). Results show improved contrast in reconstructed optically sectioned images of 86.92% (OS-SIM) compared with 44.31% (pseudo-widefield). MicroLED based OS-SIM therefore offers a new capability for deep tissue widefield imaging.

We demonstrate a method that permits wavefront aberration correction using an array of electrowetting prisms. A fixed high fill factor microlens array followed by a lower fill factor adaptive electrowetting prism array is used to correct wavefront aberration. The design and simulation of such aberration correction mechanism is described. Our results show significant improvement to the Strehl ratio by using our aberration correction scheme which results in diffraction limited performance. Compactness and effectiveness of our design can be implemented in many applications that require aberration correction, such as microscopy and consumer electronics., (© 2023 Author(s).)

We present a tunable on-chip liquid resonator in conjunction with a tapered fiber coupling scheme. The resonator consists of a glycerol droplet submerged within an immiscible liquid bath, which mitigates the effects of environmental fluctuations. The platform is fabricated using standard semiconductor techniques, which enable the future integration of photonic components for an on-chip liquid resonator device. The liquid resonator maintains its high Q-factor on chip (10 5 ) due to surface tension forming an atomically smooth liquid-liquid interface. Higher Q-factor resonance modes experienced linewidth broadening due to the random excitation of thermal capillary vibrations. Spectral tuning is demonstrated using the electrowetting effect, increasing the surface's wettability and an expansion in the droplet diameter. A maximum spectral tuning of 1.44 nm ± 5 pm is observed by applying 35 V. The tuning range is twice the free spectral range (FSR) of 0.679 nm measured at a pumping wavelength range of 770-775 nm. A 2D axisymmetric finite-element simulation shows resonance modes in good agreement with experimentally measured spectra and with predicted tuning speeds of 20 nm/s.

We present a high-resolution miniature, light-weight fluorescence microscope with electrowetting lens and onboard CMOS for high resolution volumetric imaging and structured illumination for rejection of out-of-focus and scattered light. The miniature microscope (SIMscope3D) delivers structured light using a coherent fiber bundle to obtain optical sectioning with an axial resolution of 18 µm. Volumetric imaging of eGFP labeled cells in fixed mouse brain tissue at depths up to 260 µm is demonstrated. The functionality of SIMscope3D to provide background free 3D imaging is shown by recording time series of microglia dynamics in awake mice at depths up to 120 µm in the brain., Competing Interests: The authors declare no conflicts of interest., (© 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.)

We present a calibration method to correct for fabrication variations and optical misalignment in a two-dimensional electrowetting scanner. These scanners are an attractive option due to being transmissive, nonmechanical, having a large scan angle (±13.7°), and low power consumption ( μ W). Fabrication imperfections lead to non-uniform deposition of the dielectric or hydrophobic layer which results in actuation inconsistency of each electrode. To demonstrate our calibration method, we scan a 5 × 5 grid target using a four-electrode electrowetting prism and observe a pincushion type optical distortion in the imaging plane. Zemax optical simulations verify that the symmetric distortion is due to the projection of a radial scanning surface onto a flat imaging plane, while in experiment we observe asymmetrical distortion due to optical misalignment and fabrication imperfections. By adjusting the actuation voltages through an iterative Delaunay triangulation interpolation method, the distortion is corrected and saw an improvement in the mean error across 25 grid points from 43 μ m (0.117°) to 10 μ m (0.027°).

An optical switch based on an electrowetting prism coupled to a multimode fiber has demonstrated a large extinction ratio with speeds up to 300 Hz. Electrowetting prisms provide a transmissive, low power, and compact alternative to conventional free-space optical switches, with no moving parts. The electrowetting prism performs beam steering of ±3 ° with an extinction ratio of 47 dB between the ON and OFF states and has been experimentally demonstrated at scanning frequencies of 100-300 Hz. The optical design is modeled in Zemax to account for secondary rays created at each surface interface (without scattering). Simulations predict 50 dB of extinction, in good agreement with experiment.

A light detection and ranging (lidar) system with ±90° of steering based on an adaptive electrowetting-based prism for nonmechanical beam steering has been demonstrated. Electrowetting-based prisms provide a transmissive, low power, and compact alternative to conventional adaptive optics as a nonmechanical beam scanner. The electrowetting prism has a steering range of ±7.8°. We demonstrate a method to amplify the scan angle to ±90° and perform a one-dimensional scan in a lidar system.

Electrowetting adaptive optical devices are versatile, with applications ranging from microscopy to remote sensing. The choice of liquids in these devices governs its tuning range, temporal response, and wavelength of operation. We characterized a liquid system, consisting of 1-phenyl-1-cyclohexene and deionized water, using both lens and prism devices. The liquids have a large contact angle tuning range, from 173 to 60°. Measured maximum scanning angle was realized at ±13.7° in a two-electrode prism, with simulation predictions of ±18.2°. The liquid's switching time to reach 90° contact angle from rest, in a 4 mm diameter device, was measured at 100 ms. Steady-state scanning with a two-electrode prism showed linear and consistent scan angles of ±4.8° for a 20 V differential between the two electrodes, whereas beam scanning using the liquid system achieved ±1.74° at 500 Hz for a voltage differential of 80 V.

We present a miniature head mounted two-photon fiber-coupled microscope (2P-FCM) for neuronal imaging with active axial focusing enabled using a miniature electrowetting lens. We show three-dimensional two-photon imaging of neuronal structure and record neuronal activity from GCaMP6s fluorescence from multiple focal planes in a freely-moving mouse. Two-color simultaneous imaging of GFP and tdTomato fluorescence is also demonstrated. Additionally, dynamic control of the axial scanning of the electrowetting lens allows tilting of the focal plane enabling neurons in multiple depths to be imaged in a single plane. Two-photon imaging allows increased penetration depth in tissue yielding a working distance of 450 μm with an additional 180 μm of active axial focusing. The objective NA is 0.45 with a lateral resolution of 1.8 μm, an axial resolution of 10 μm, and a field-of-view of 240 μm diameter. The 2P-FCM has a weight of only ~2.5 g and is capable of repeatable and stable head-attachment. The 2P-FCM with dynamic axial scanning provides a new capability to record from functionally distinct neuronal layers, opening new opportunities in neuroscience research.

We present numerical simulations of multielectrode electrowetting devices used in a novel optical design to correct wavefront aberration. Our optical system consists of two multielectrode devices, preceded by a single fixed lens. The multielectrode elements function as adaptive optical devices that can be used to correct aberrations inherent in many imaging setups, biological samples, and the atmosphere. We are able to accurately simulate the liquid-liquid interface shape using computational fluid dynamics. Ray tracing analysis of these surfaces shows clear evidence of aberration correction. To demonstrate the strength of our design, we studied three different input aberrations mixtures that include astigmatism, coma, trefoil, and additional higher order aberration terms, with amplitudes as large as one wave at 633 nm.

Laser scanners are an integral part of high resolution biomedical imaging systems such as confocal or 2-photon excitation (2PE) microscopes. In this work, we demonstrate the utility of electrowetting on dielectric (EWOD) prisms as a lateral laser-scanning element integrated in a conventional 2PE microscope. To the best of our knowledge, this is the first such demonstration for EWOD prisms. EWOD devices provide a transmissive, low power consuming, and compact alternative to conventional adaptive optics, and hence this technology has tremendous potential. We demonstrate 2PE microscope imaging of cultured mouse hippocampal neurons with a FOV of 130 × 130 μm 2 using EWOD prism scanning. In addition, we show simulations of the optical system with the EWOD prism, to evaluate the effect of propagating a Gaussian beam through the EWOD prism on the imaging quality. Based on the simulation results a beam size of 0.91 mm full width half max was chosen to conduct the imaging experiments, resulting in a numerical aperture of 0.17 of the imaging system., Competing Interests: The authors declare that there are no conflicts of interest related to this article.

Broadband microfluidic-based impedance spectroscopy can be used to characterize complex fluids, with applications in medical diagnostics and in chemical and pharmacological manufacturing. Many relevant fluids are ionic; during impedance measurements ions migrate to the electrodes, forming an electrical double-layer. Effects from the electrical double-layer dominate over, and reduce sensitivity to, the intrinsic impedance of the fluid below a characteristic frequency. Here we use calibrated measurements of saline solution in microfluidic coplanar waveguide devices at frequencies between 100 kHz and 110 GHz to directly measure the double-layer admittance for solutions of varying ionic conductivity. We successfully model the double-layer admittance using a combination of a Cole-Cole response with a constant phase element contribution. Our analysis yields a double-layer relaxation time that decreases linearly with solution conductivity, and allows for double-layer effects to be separated from the intrinsic fluid response and quantified for a wide range of conducting fluids.

Adaptive optical lenses based on the electrowetting principle are being rapidly implemented in many applications, such as microscopy, remote sensing, displays, and optical communication. To characterize the response of these electrowetting lenses, the dependence upon direct current (DC) driving voltage functions was investigated in a low-viscosity liquid system. Cylindrical lenses with inner diameters of 2.45 and 3.95 mm were used to characterize the dynamic behavior of the liquids under DC voltage electrowetting actuation. With the increase of the rise time of the input exponential driving voltage, the originally underdamped system response can be damped, enabling a smooth response from the lens. We experimentally determined the optimal rise times for the fastest response from the lenses. We have also performed numerical simulations of the lens actuation with input exponential driving voltage to understand the variation in the dynamics of the liquid-liquid interface with various input rise times. We further enhanced the response time of the devices by shaping the input voltage function with multiple exponential rise times. For the 3.95 mm inner diameter lens, we achieved a response time improvement of 29% when compared to the fastest response obtained using single-exponential driving voltage. The technique shows great promise for applications that require fast response times.

Focused ion beam (FIB) micromachining is a powerful tool for maskless lithography and in recent years FIB has been explored as a tool for strain engineering. Ion beam induced deformation can be utilized as a means for folding freestanding thin films into complex 3D structures. FIB of high energy gallium (Ga + ) ions induces stress by generation of dislocations and ion implantation within material layers, which create creases or folds upon mechanical relaxation enabled by motion of the material layers. One limitation on such processing is the ability to fabricate flat freestanding thin film structures. This capability is limited by the residual stresses formed during processing and fabrication of the films, which can result in initial curvature and deformation of films upon release from a sacrificial fabrication layer. This paper demonstrates folding in freestanding ultrathin films (<40 nm thin) of heterogeneous composition (metal, insulator, semiconductor, etc) with large lateral dimension structures (aspect ratio >1:1000) by ion-induced stress relaxation. The ultrathin flat structures are fabricated using atomic layer deposition on sacrificial polyimide. We have demonstrated vertical folding with 30 keV Ga + ions in structures with lateral dimensions varying from 10 to 50 μm.

The recent development of low-temperature (<200 °C) atomic layer deposition (ALD) for fabrication of freestanding nanostructures has enabled consideration of active device design based on engineered ultrathin films. This paper explores audible sound production from thermoacoustic loudspeakers fabricated from suspended tungsten nanobridges formed by ALD. Additionally, this paper develops an approach to lumped-element modeling for design of thermoacoustic nanodevices and relates the near-field plane wave model of individual transducer beams to the far-field spherical wave sound pressure that can be measured with standard experimental techniques. Arrays of suspended nanobridges with 25.8 nm thickness and sizes as small as 17 μm × 2 μm have been fabricated and demonstrated to produce audible sound using the thermoacoustic effect. The nanobridges were fabricated by ALD of 6.5 nm Al 2 O 3 and 19.3 nm tungsten on sacrificial polyimide, with ALD performed at 130 °C and patterned by standard photolithography. The maximum observed loudspeaker sound pressure level (SPL) is 104 dB, measured at 20 kHz, 9.71 W input power, and 1 cm measurement distance, providing a loudspeaker sensitivity value of ∼64.6 dB SPL/1 mW. Sound production efficiency was measured to vary proportional to frequency f 3 and was directly proportional to input power. The devices in this paper demonstrate industrially feasible nanofabrication of thermoacoustic transducers and a sound production mechanism pertinent to submicron-scale device engineering.

A large extinction ratio optical shutter has been demonstrated using electrowetting liquids. The device is based on switching between a liquid-liquid interface curvature that produces total internal reflection and one that does not. The interface radius of curvature can be tuned continuously from 9 mm at 0 V to -45 mm at 26 V. Extinction ratios from 55.8 to 66.5 dB were measured. The device shows promise for ultracold chip-scale atomic clocks.

Work presented here measures and interprets the electrical and thermal conductivities of atomic layer deposited (ALD) free-standing single film and periodic tungsten and aluminum oxide nanobridges with thicknesses from ∼5-20 nm and ∼3-13 nm, respectively. Electrical conductivity of the W films is reduced by up to 99% from bulk, while thermal conductivity is reduced by up to 91%. Results indicate phonon contribution to thermal conductivity is dominant in these ALD films and may be substantially reduced by the incorporation of periodicity in the ALD W/Al2O3 nanolaminates. Additionally, thin film conduction modeling demonstrates nano-structured grain features largely dictate electron and phonon conduction in ALD W. New fabrication methods have allowed for the development of free-standing ultra-thin structures with layers on the order of several nanometers utilizing ALD. While the literature contains diverse studies of the physical properties of thin films prepared by traditional micro-fabrication sputtering or chemical vapor deposition techniques, there remains little data on freestanding structures containing ALD generated materials. Specifically, knowledge of the electrical and thermal conductivity of ALD generated materials will aid in the future development of ultra-thin nano-devices.

An adaptive electrowetting-based element with focusing and steering capability has been demonstrated in a monolithic design. Curvature and tip-tilt variation have been demonstrated using low voltages. A steering range of up to 4.3° and lens tuning of 18 diopters have been measured at 30 V DC and 21 V DC, respectively.

Electrowetting lenses with record low power consumption (microwatts) have been demonstrated using high-quality parylene AF-4 dielectric layers and large dodecyl sulfate ions. Water and propylene glycol are interchanged as the polar liquid to enable diverging and converging lens operation achievable with the application of 15 V. The optical quality of the lenses is comparable to conventional microlenses and the tuning exhibits very little (<0.5°) contact angle hysteresis.

We report a miniature, lightweight fiber-coupled confocal fluorescence microscope that incorporates an electrowetting variable focus lens to provide axial scanning for full three-dimensional (3D) imaging. Lateral scanning is accomplished by coupling our device to a laser-scanning confocal microscope through a coherent imaging fiber-bundle. The optical components of the device are combined in a custom 3D-printed adapter with an assembled weight of <2  g that can be mounted onto the head of a mouse. Confocal sectioning provides an axial resolution of ∼12  μm and an axial scan range of ∼80  μm. The lateral field-of-view is 300 μm, and the lateral resolution is 1.8 μm. We determined these parameters by imaging fixed sections of mouse neuronal tissue labeled with green fluorescent protein (GFP) and fluorescent bead samples in agarose gel. To demonstrate viability for imaging intact tissue, we resolved multiple optical sections of ex vivo mouse olfactory nerve fibers expressing yellow fluorescent protein (YFP).

The strain-induced change in a carbon-nanotube diffraction pattern is found after applying strain, using a microelectromechanical tensile stage, to the outer shell of a double-walled carbon nanotube, while the inner shell provides an unstrained reference pattern. The nanotube is found to have chirality (63,21)@(65,32) with 16-20° tilt and strain up to 1% in the outer shell., (© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.)

GaN nanowires were coated with tungsten by means of atomic layer deposition. These structures were then adapted as probe tips for near-field scanning microwave microscopy. These probes displayed a capacitive resolution of ~0.03 fF, which surpasses that of a commercial Pt tip. Upon imaging of MoS₂ sheets with both the Pt and GaN nanowire tips, we found that the nanowire tips were comparatively immune to surface contamination and far more durable than their Pt counterparts.

Large arrays of 3-terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non-linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions., (© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.)

Molecular layer deposition (MLD) techniques were used to deposit conformal coatings on bulk quantities of carbon nanotubes (CNTs). Several metalcone MLD chemistries were employed, including alucone (trimethylaluminum/glycerol and trimethylaluminum/ethylene glycol), titanicone (TiCl4/glycerol), and zincone (diethyl zinc/glycerol). The metalcone MLD films grew directly on the CNTs and MLD initiation did not require atomic layer deposition (ALD) of an adhesion layer. Transmission electron microscopy revealed that MLD formed three-dimensional conformal deposits throughout a CNT scaffold. Mechanical testing was also performed on sheets of CNT networks coated by MLD. Young's Modulus values improved from an initial value of 510 MPa for uncoated CNT sheet to values that ranged from 2.2 GPa, for 10 nm of glycerol alucone (AlGL), to 8.7 GPa for a composite 5 nm AlGL + 5 nm Al2O3 coating.

We have demonstrated a one-dimensional array of individually addressable electrowetting tunable liquid lenses that compensate for more than one wave of phase distortion across a wavefront. We report a scheme for piston control using tunable liquid lens arrays in volume-bound cavities that alter the optical path length without affecting the wavefront curvature. Liquid lens arrays with separately tunable focus or phase control hold promise for laser communication systems and adaptive optics.

In this Letter we report on the fabrication, device characteristics, and optical coupling of a two-nanowire device comprising GaN nanowires with light-emitting and photoconductive capabilities. Axial p-n junction GaN nanowires were grown by molecular beam epitaxy, transferred to a non-native substrate, and selectively contacted to form discrete optical source or detector nanowire components. The optical coupling demonstrated for this device may provide new opportunities for integration of optical interconnects between on-chip electrical subsystems.

A novel application of electrowetting devices has been simulated: wavefront correction using an array of electrowetting lenses and prisms. Five waves of distortion can be corrected with Strehl ratios of 0.9 or higher, utilizing piston, tip-tilt, and curvature corrections from arrays of 19 elements and fill factors as low as 40%. Effective control of piston can be achieved by placing the liquid lens array at the focus of two microlens arrays. Seven waves of piston delay can be generated with variation in focal length between 1.5 and 500 mm.

We present a near-field scanning microwave microscope (NSMM) that has been configured for imaging photovoltaic samples. Our system incorporates a Pt-Ir tip inserted into an open-ended coaxial cable to form a weakly coupled resonator, allowing the microwave reflection S(11) signal to be measured across a sample over a frequency range of 1 GHz - 5 GHz. A phase-tuning circuit increased impedance-measurement sensitivity by allowing for tuning of the S(11) minimum down to -78 dBm. A bias-T and preamplifier enabled simultaneous, non-contact measurement of the DC tip-sample current, and a tuning fork feedback system provided simultaneous topographic data. Light-free tuning fork feedback provided characterization of photovoltaic samples both in the dark and under illumination at 405 nm. NSMM measurements were obtained on an inhomogeneous, third-generation Cu(In,Ga)Se(2) (CIGS) sample. The S(11) and DC current features were found to spatially broaden around grain boundaries with the sample under illumination. The broadening is attributed to optically generated charge that becomes trapped and changes the local depletion of the grain boundaries, thereby modifying the local capacitance. Imaging provided by the NSMM offers a new RF methodology to resolve and characterize nanoscale electrical features in photovoltaic materials and devices.

Effects of design and materials on the dielectrophoretic self-assembly of individual gallium nitride nanowires (GaN NWs) onto microfabricated electrodes have been experimentally investigated. The use of TiO(2) surface coating generated by atomic layer deposition (ALD) improves dielectrophoretic assembly yield of individual GaN nanowires on microfabricated structures by as much as 67%. With a titanium dioxide coating, individual nanowires were placed across suspended electrode pairs in 46% of tests (147 out of 320 total), versus 28% of tests (88 out of 320 total tests) that used uncoated GaN NWs. An additional result from these tests was that suspending the electrodes 2.75 μm above the substrate corresponded with up to 15.8% improvement in overall assembly yield over that of electrodes fabricated directly on the substrate.

Single-walled carbon nanotube field-effect transistors (CNFETs) are promising functional structures in future micro- or nanoelectronic systems and sensor applications. Research on the fundamental device concepts includes the investigation of the conditions for stable long term CNFET operation. CNFET operation in ambient air leads to on-state current degradation and fluctuating signals due to the well-known sensitivity of the electronic properties of the CNT to many environmental condition changes. It is the goal of device and sensor research to understand various kinds of sensor-environment interactions and to overcome the environmental sensitivity. Here, we show that the encapsulation of CNFETs by a thermal atomic-layer-deposited (ALD) aluminium oxide (Al(2)O(3)) layer of approximately 100 nm leads to stable device operation for 260 days and reduces their sensitivity to the environment. The characteristics of CNFETs prior to and after Al(2)O(3) encapsulation are comparatively investigated. It is found that encapsulation improves the stability of the CNFET characteristics with respect to the gate threshold voltage, hysteresis width and the on-state current, while 1/f noise is lowered by up to a factor of 7. Finally, CNFETs embedded in a dielectric membrane are employed as pressure sensors to demonstrate sensor operation of CNFETs encapsulated by ALD as piezoresistive transducers.

We report on the fabrication and characterization of bulk micromachined pressure sensors based on individual single-walled carbon nanotubes (SWNTs) as the active electromechanical transducer elements. The electromechanical sensor device consists of an individual electrically connected SWNT adsorbed on top of a 100-nm-thick atomic layer deposited (ALD) circular alumina (Al(2)O(3)) membrane with a radius in the range of 50-100 microm. A white light interferometer (WLI) was used to measure the deflection of the membrane due to differential pressure, and the mechanical properties of the device were characterized by bulge testing. Finally, we performed the first electromechanical measurements on strained metallic SWNTs adhering to a membrane and found a piezoresistive gauge factor of approximately 210 for metallic SWNTs.

A holographic interferometer senses vapor-induced optical path length changes in polymer or other chemically sensitive films. The interferometer is inherently sensitive to changes in chemical vapor content, self-compensates for drifts, and accommodates a large array of sensor elements. A sniff-locked-loop synchronous detection method takes advantage of the interferometer's rapid response to achieve vapor concentration sensitivity in the parts-per-billion (ppb, parts in 10(9)) range. We demonstrate, for example, 40 ppb sensitivity to ethyl alcohol using poly(N-vinyl pyrrolidone) with a measurement time of 5 s.

An atom Michelson interferometer is implemented on an "atom chip." The chip uses lithographically patterned conductors and external magnetic fields to produce and guide a Bose-Einstein condensate. Splitting, reflecting, and recombining of condensate atoms are achieved by a standing-wave light field having a wave vector aligned along the atom waveguide. A differential phase shift between the two arms of the interferometer is introduced by either a magnetic-field gradient or with an initial condensate velocity. Interference contrast is still observable at 20% with an atom propagation time of 10 ms.

Quadratic aberration is successfully corrected with a segmented microelectromechanical deformable mirror in conjunction with a refractive lenslet array. Use of the lenslet array greatly improves the effective fill factor of the correcting element. Experimental results show correction approaching the diffraction limit for an extreme spherical aberration.

A micromachined system has been developed for reducing the vibration sensitivity of surface transverse wave (STW) resonators. The isolation system consists of a support platform for mounting the STW resonator, four support arms, and a support rim. The entire isolation system measures 8 mm by 9 mm by 0.4 mm without the resonator mounted on the platform. The system acts as a passive vibration isolation system, decreasing the magnitude of high frequency (>1.2 kHz) vibrations. Finite element analysis is used to analyze the acceleration sensitivity of the mounted resonator. The isolation system is then modeled as a damped mass-spring system and the transmissibility of vibration from the support rim to the support platform is calculated. Multiplying the acceleration sensitivity of the resonator by the transmissibility results in the expected system vibration sensitivity. The isolation systems are fabricated using two sided bulk etching of (110) oriented silicon wafers. STW resonators were mounted on the isolation systems, and the isolated units were mounted on commercial hybrid oscillator substrates. Vibration sensitivity measurements were taken for vibrations with frequencies ranging from 100 Hz to 5 kHz. The measured data show that the system performs as expected with a low frequency (<500 Hz) vibration sensitivity of 1.8x10(-8)/g and a high frequency roll off of 12 dB/octave.